JP2532910Y2 - Dicing equipment - Google Patents

Description

[Detailed description of the invention]

[0001]

The present invention relates to a dicing apparatus,
More particularly, the present invention relates to a dicing apparatus for cutting a semiconductor wafer into dice.

[0002]

2. Description of the Related Art When a semiconductor wafer (hereinafter referred to as "work") is cut into a dice by a dicing apparatus, the work is attracted to a cutting table and cut by a cutting blade (hereinafter referred to as "blade") of the dicing apparatus. . Conventionally, as shown in FIG. 3, this type of dicing apparatus rotates a spindle 2 connected to a drive motor 1 to rotate a blade 3 to cut a workpiece 4 into a predetermined dice. The blade 3 is fixed to the outer periphery of the side surface 5a of the hub 5 formed in a donut shape. On the other hand, the flange 6 is fixed to the spindle 2. The side surface 5a of the hub 5
Is precisely machined with an NC lathe or the like.
By contacting a with the supporting surface 6a of the flange 6, the vertical accuracy of the blade 3 with respect to the work 4 is maintained. The hub 5 is fixed to the flange 6 by screwing a hub fixing nut 8 into a screw 6b of the flange 6.

[0003] Reference numeral 11 denotes a flange fixing nut for fixing the flange 6 to the spindle 2. on the other hand,
The rotating blade 3 is cooled by cutting water jetted from a cutting water jet nozzle 9 shown by a two-dot chain line, and
The contamination of the work 4 attached to both end surfaces of the blade 3 is removed by the cleaning water jetted from the pair of cleaning water supply nozzles 10 and 10.

[0004]

However, since the blade 3 of the conventional dicing apparatus is fixedly supported by the hub 5, the blade 3 easily swings while the workpiece 4 is being cut.
When the blade 3 oscillates, there is a disadvantage that the cut surface of the cut die-shaped chip is chipped. Further, in the conventional dicing apparatus, since the outer peripheral portion of the flange 6 falls in the radial direction more than the outer peripheral portion of the hub 5, the cutting water and the cleaning water are compared with the blade 5 side of the blade 3 (left side in FIG. 3). Then, it is difficult to ride on the side of the flange (the right side in FIG. 3). As a result, contamination on the side surface of the flange of the blade 3 is hard to fall, and there is a disadvantage that the contamination adheres to the work 4.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a dicing apparatus which can reduce the runout of a blade and reliably remove contamination attached to the blade.

[0006]

According to the present invention, in order to achieve the above object, a cutting blade mounting flange is fixed to a rotating spindle, and a hub having a cutting blade is fixed to the flange to mount the cutting blade. In the dicing apparatus, the cutting blade is sandwiched between the outer peripheral portion of the hub and the outer peripheral portion of the flange, and the shapes of the outer peripheral portion of the hub and the outer peripheral portion of the flange that sandwich the cutting blade are substantially sandwiched by the cutting blade. It is characterized by being formed in a symmetrical shape.

[0007]

According to the present invention, the surface of the cutting blade can be machined with the same precision as the side surface of the hub by improving the lathe processing technology. It was made to pinch. Thereby, the run-out of the cutting blade is significantly reduced as compared with the run-out of the conventional cutting blade fixedly supported on the hub.

In addition, by forming the outer peripheral portion of the hub and the outer peripheral portion of the flange which hold the cutting blade in a substantially symmetrical shape with the cutting blade interposed therebetween, cutting water and washing water can easily flow on the flange side surface of the cutting blade. . Thereby, the contamination attached to the side surface of the flange of the cutting blade can be reliably removed.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the dicing apparatus according to the present invention will be described in detail with reference to the accompanying drawings. 1 and 2
3 shows a perspective view and a cross-sectional view of the dicing apparatus 20 according to the present invention, and the same and similar members as those in the conventional example shown in FIG.

The dicing apparatus 20 performs fine alignment of the work 4 sucked on the cutting table 22 shown in FIG. 2 via the sheet 23, and thereafter, the work 4 is rotated in a clockwise direction at a high speed by a predetermined dice shape. Cut into chips. At the time of cutting, the blade 3 is cooled and cleaned by the cutting water and cleaning water jetted from the cutting water injection nozzle 9 and the cleaning water injection nozzles 10 and 10, so that the processing accuracy of the work 4 is maintained.

As shown in FIG. 2, a spindle 2 having a tapered surface 2a is connected to a drive motor 1 and a tapered surface 2a of the spindle 2 has an inner peripheral taper of a flange 24 as shown in FIG. The surface 24a is fitted and the flange 24 is attached. The flange 24 is positioned and fixed to the spindle 2 by screwing the nut 11 for fixing the flange, which is screwed to the tip of the spindle 2.

A hub 5 formed in a donut shape is fitted into an outer peripheral portion of the flange 24. The blade 5 is fixed to the outer periphery of the side surface 5 a of the hub 5, and the blade 3 is in contact with the support surface 24 b of the flange 24. The hub 5 is fixed to the flange 24 by screwing the hub fixing nut 8 into the screw 24c of the flange 24.

The surface of the blade 3 is
In order to maintain the vertical accuracy, the workpiece has been processed with high precision in advance using an NC lathe or the like. The cross-sectional shapes of the outer peripheral portion 5b of the hub 5 and the outer peripheral portion 24d of the flange 24 that sandwich the blade 3 are formed substantially symmetrically with the blade 3 interposed therebetween.
Next, the operation of the dicing apparatus 20 configured as described above will be described.

First, the drive motor 1 is driven and the blade 3
Is rotated at a high speed to cut the work 4. At this time, since the blade 3 is sandwiched between the outer peripheral portion 5b of the hub 5 and the outer peripheral portion 24d of the flange 24, the runout of the blade 3 is smaller than that of the conventional runout fixedly supported by the hub 5.
It can be significantly reduced. Therefore, chipping generated on the cut surface of the die-shaped chip can be significantly reduced. Therefore, it is easy to process a narrow street since the cutting width can be reduced.

On the other hand, cutting water and cleaning water are sprayed from the cutting water injection nozzle 9 and the cleaning water injection nozzles 10 and 10 onto the rotating blade 3. The cutting water and the cleaning water are supplied to the outer peripheral portion 5 b of the hub 5 that holds the blade 3 and the flange 24.
Is formed in a substantially symmetrical shape with the blade 3 interposed therebetween, so that it is easy to ride on the flange side surface of the blade 3 (the right side in FIG. 2). This allows
The contamination on the side of the flange of the blade 3 can be removed in the same manner as the contamination on the side of the hub of the blade 3 (the left side in FIG. 2).

[0016]

As described above, according to the dicing apparatus according to the present invention, since the cutting blade is sandwiched between the outer peripheral portion of the hub and the outer peripheral portion of the flange, the conventional cutting device fixedly supported by the hub is supported. The run-out of the cutting blade can be greatly reduced as compared with the run-out of the blade. Therefore, it is easy to process a narrow street since the cutting width can be reduced.

Further, by forming the outer peripheral portion of the hub holding the cutting blade and the outer peripheral portion of the flange in a substantially symmetrical shape with the cutting blade interposed therebetween, cutting water and washing water also run on the flange side surface of the cutting blade. As a result, contamination on the cutting blade can be reliably removed.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a dicing apparatus according to the present invention.

FIG. 2 is a sectional view showing an embodiment of the dicing apparatus according to the present invention;

FIG. 3 is a sectional view showing an embodiment of a conventional dicing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Drive motor 2 ... Spindle 3 ... Blade 5 ... Hub 20 ... Dicing device 24 ... Flange

Claims (1)

(57) [Scope of request for utility model registration] 1. A dicing apparatus in which a cutting blade mounting flange is fixed to a rotating spindle, a hub having a cutting blade is fixed to the flange, and the cutting blade is mounted to the cutting blade. A dicing apparatus sandwiched between the outer periphery of the flange and the outer periphery of the hub that sandwiches the cutting blade and the outer periphery of the flange are formed substantially symmetrically with respect to the cutting blade.