JPH0560635B2 - - Google Patents

Info

Publication number
JPH0560635B2
JPH0560635B2 JP62055374A JP5537487A JPH0560635B2 JP H0560635 B2 JPH0560635 B2 JP H0560635B2 JP 62055374 A JP62055374 A JP 62055374A JP 5537487 A JP5537487 A JP 5537487A JP H0560635 B2 JPH0560635 B2 JP H0560635B2
Authority
JP
Japan
Prior art keywords
pattern
value
smoothing
pixel
differential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62055374A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63223883A (ja
Inventor
Satoshi Sakurai
Hiroshige Sakahara
Yoriaki Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62055374A priority Critical patent/JPS63223883A/ja
Publication of JPS63223883A publication Critical patent/JPS63223883A/ja
Publication of JPH0560635B2 publication Critical patent/JPH0560635B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
JP62055374A 1987-03-12 1987-03-12 パタ−ン検査装置 Granted JPS63223883A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62055374A JPS63223883A (ja) 1987-03-12 1987-03-12 パタ−ン検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62055374A JPS63223883A (ja) 1987-03-12 1987-03-12 パタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS63223883A JPS63223883A (ja) 1988-09-19
JPH0560635B2 true JPH0560635B2 (enrdf_load_stackoverflow) 1993-09-02

Family

ID=12996706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62055374A Granted JPS63223883A (ja) 1987-03-12 1987-03-12 パタ−ン検査装置

Country Status (1)

Country Link
JP (1) JPS63223883A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63223883A (ja) 1988-09-19

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