JPH0560562B2 - - Google Patents

Info

Publication number
JPH0560562B2
JPH0560562B2 JP22612085A JP22612085A JPH0560562B2 JP H0560562 B2 JPH0560562 B2 JP H0560562B2 JP 22612085 A JP22612085 A JP 22612085A JP 22612085 A JP22612085 A JP 22612085A JP H0560562 B2 JPH0560562 B2 JP H0560562B2
Authority
JP
Japan
Prior art keywords
semiconductor laser
automatic focusing
photomask
amplifier
chrome
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP22612085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6285211A (ja
Inventor
Makoto Tani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60226120A priority Critical patent/JPS6285211A/ja
Publication of JPS6285211A publication Critical patent/JPS6285211A/ja
Publication of JPH0560562B2 publication Critical patent/JPH0560562B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Automatic Focus Adjustment (AREA)
JP60226120A 1985-10-09 1985-10-09 ホトマスク顕微鏡自動焦点装置 Granted JPS6285211A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60226120A JPS6285211A (ja) 1985-10-09 1985-10-09 ホトマスク顕微鏡自動焦点装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60226120A JPS6285211A (ja) 1985-10-09 1985-10-09 ホトマスク顕微鏡自動焦点装置

Publications (2)

Publication Number Publication Date
JPS6285211A JPS6285211A (ja) 1987-04-18
JPH0560562B2 true JPH0560562B2 (en:Method) 1993-09-02

Family

ID=16840150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60226120A Granted JPS6285211A (ja) 1985-10-09 1985-10-09 ホトマスク顕微鏡自動焦点装置

Country Status (1)

Country Link
JP (1) JPS6285211A (en:Method)

Also Published As

Publication number Publication date
JPS6285211A (ja) 1987-04-18

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