JPH0560562B2 - - Google Patents
Info
- Publication number
- JPH0560562B2 JPH0560562B2 JP22612085A JP22612085A JPH0560562B2 JP H0560562 B2 JPH0560562 B2 JP H0560562B2 JP 22612085 A JP22612085 A JP 22612085A JP 22612085 A JP22612085 A JP 22612085A JP H0560562 B2 JPH0560562 B2 JP H0560562B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor laser
- automatic focusing
- photomask
- amplifier
- chrome
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 18
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 16
- 239000011521 glass Substances 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60226120A JPS6285211A (ja) | 1985-10-09 | 1985-10-09 | ホトマスク顕微鏡自動焦点装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60226120A JPS6285211A (ja) | 1985-10-09 | 1985-10-09 | ホトマスク顕微鏡自動焦点装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6285211A JPS6285211A (ja) | 1987-04-18 |
| JPH0560562B2 true JPH0560562B2 (OSRAM) | 1993-09-02 |
Family
ID=16840150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60226120A Granted JPS6285211A (ja) | 1985-10-09 | 1985-10-09 | ホトマスク顕微鏡自動焦点装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6285211A (OSRAM) |
-
1985
- 1985-10-09 JP JP60226120A patent/JPS6285211A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6285211A (ja) | 1987-04-18 |
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