JPH0559763B2 - - Google Patents

Info

Publication number
JPH0559763B2
JPH0559763B2 JP61067249A JP6724986A JPH0559763B2 JP H0559763 B2 JPH0559763 B2 JP H0559763B2 JP 61067249 A JP61067249 A JP 61067249A JP 6724986 A JP6724986 A JP 6724986A JP H0559763 B2 JPH0559763 B2 JP H0559763B2
Authority
JP
Japan
Prior art keywords
rotor
vacuum container
stock solution
evaporation surface
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61067249A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62225201A (ja
Inventor
Muneharu Komya
Naoki Nagashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP6724986A priority Critical patent/JPS62225201A/ja
Publication of JPS62225201A publication Critical patent/JPS62225201A/ja
Publication of JPH0559763B2 publication Critical patent/JPH0559763B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • B01D1/222—In rotating vessels; vessels with movable parts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP6724986A 1986-03-27 1986-03-27 遠心蒸発装置 Granted JPS62225201A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6724986A JPS62225201A (ja) 1986-03-27 1986-03-27 遠心蒸発装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6724986A JPS62225201A (ja) 1986-03-27 1986-03-27 遠心蒸発装置

Publications (2)

Publication Number Publication Date
JPS62225201A JPS62225201A (ja) 1987-10-03
JPH0559763B2 true JPH0559763B2 (OSRAM) 1993-08-31

Family

ID=13339460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6724986A Granted JPS62225201A (ja) 1986-03-27 1986-03-27 遠心蒸発装置

Country Status (1)

Country Link
JP (1) JPS62225201A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0746321Y2 (ja) * 1989-10-24 1995-10-25 日本真空技術株式会社 遠心式真空蒸発装置
JPH0796081B2 (ja) * 1991-07-06 1995-10-18 株式会社水戸理化ガラス 回転バンド式分留装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH619150A5 (OSRAM) * 1976-01-30 1980-09-15 Vaclav Feres
JPS6111054U (ja) * 1984-06-27 1986-01-22 株式会社日立製作所 回転導入機

Also Published As

Publication number Publication date
JPS62225201A (ja) 1987-10-03

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