JPH0559010B2 - - Google Patents

Info

Publication number
JPH0559010B2
JPH0559010B2 JP1017881A JP1788189A JPH0559010B2 JP H0559010 B2 JPH0559010 B2 JP H0559010B2 JP 1017881 A JP1017881 A JP 1017881A JP 1788189 A JP1788189 A JP 1788189A JP H0559010 B2 JPH0559010 B2 JP H0559010B2
Authority
JP
Japan
Prior art keywords
guide rail
vacuum
stator
vacuum chamber
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1017881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02198920A (ja
Inventor
Kuniaki Miura
Masanori Nozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sukegawa Electric Co Ltd
Original Assignee
Sukegawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sukegawa Electric Co Ltd filed Critical Sukegawa Electric Co Ltd
Priority to JP1788189A priority Critical patent/JPH02198920A/ja
Publication of JPH02198920A publication Critical patent/JPH02198920A/ja
Publication of JPH0559010B2 publication Critical patent/JPH0559010B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
JP1788189A 1989-01-28 1989-01-28 磁気浮上形真空内搬送装置 Granted JPH02198920A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1788189A JPH02198920A (ja) 1989-01-28 1989-01-28 磁気浮上形真空内搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1788189A JPH02198920A (ja) 1989-01-28 1989-01-28 磁気浮上形真空内搬送装置

Publications (2)

Publication Number Publication Date
JPH02198920A JPH02198920A (ja) 1990-08-07
JPH0559010B2 true JPH0559010B2 (cs) 1993-08-30

Family

ID=11956042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1788189A Granted JPH02198920A (ja) 1989-01-28 1989-01-28 磁気浮上形真空内搬送装置

Country Status (1)

Country Link
JP (1) JPH02198920A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5925956A (en) * 1995-06-30 1999-07-20 Nikon Corporation Stage construction incorporating magnetically levitated movable stage
JP5176097B2 (ja) * 2005-08-25 2013-04-03 国立大学法人富山大学 磁気浮上装置並びに磁気浮上方法
JP5419384B2 (ja) 2008-05-20 2014-02-19 東京エレクトロン株式会社 真空処理装置
JP5687049B2 (ja) * 2010-12-27 2015-03-18 キヤノンアネルバ株式会社 搬送装置及び真空処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125862U (cs) * 1979-03-01 1980-09-05
JPS60261302A (ja) * 1984-06-06 1985-12-24 Irie Koken Kk 高真空中の物品搬送装置

Also Published As

Publication number Publication date
JPH02198920A (ja) 1990-08-07

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