JPH0558567B2 - - Google Patents

Info

Publication number
JPH0558567B2
JPH0558567B2 JP12569085A JP12569085A JPH0558567B2 JP H0558567 B2 JPH0558567 B2 JP H0558567B2 JP 12569085 A JP12569085 A JP 12569085A JP 12569085 A JP12569085 A JP 12569085A JP H0558567 B2 JPH0558567 B2 JP H0558567B2
Authority
JP
Japan
Prior art keywords
heater block
main body
recess
inert gas
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12569085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61284933A (ja
Inventor
Teruo Kusakari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP12569085A priority Critical patent/JPS61284933A/ja
Publication of JPS61284933A publication Critical patent/JPS61284933A/ja
Publication of JPH0558567B2 publication Critical patent/JPH0558567B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
JP12569085A 1985-06-10 1985-06-10 ヒ−タブロツク Granted JPS61284933A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12569085A JPS61284933A (ja) 1985-06-10 1985-06-10 ヒ−タブロツク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12569085A JPS61284933A (ja) 1985-06-10 1985-06-10 ヒ−タブロツク

Publications (2)

Publication Number Publication Date
JPS61284933A JPS61284933A (ja) 1986-12-15
JPH0558567B2 true JPH0558567B2 (enExample) 1993-08-26

Family

ID=14916277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12569085A Granted JPS61284933A (ja) 1985-06-10 1985-06-10 ヒ−タブロツク

Country Status (1)

Country Link
JP (1) JPS61284933A (enExample)

Also Published As

Publication number Publication date
JPS61284933A (ja) 1986-12-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term