JPH0557004B2 - - Google Patents
Info
- Publication number
- JPH0557004B2 JPH0557004B2 JP58048656A JP4865683A JPH0557004B2 JP H0557004 B2 JPH0557004 B2 JP H0557004B2 JP 58048656 A JP58048656 A JP 58048656A JP 4865683 A JP4865683 A JP 4865683A JP H0557004 B2 JPH0557004 B2 JP H0557004B2
- Authority
- JP
- Japan
- Prior art keywords
- sublimable substance
- flow rate
- heating
- pressure
- sublimable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 claims description 56
- 238000010438 heat treatment Methods 0.000 claims description 42
- 238000001514 detection method Methods 0.000 claims description 4
- 230000007423 decrease Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 12
- 238000000859 sublimation Methods 0.000 description 12
- 230000008022 sublimation Effects 0.000 description 12
- 230000001105 regulatory effect Effects 0.000 description 5
- 239000012071 phase Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000010187 selection method Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4865683A JPS59177101A (ja) | 1983-03-25 | 1983-03-25 | 昇華性物質の供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4865683A JPS59177101A (ja) | 1983-03-25 | 1983-03-25 | 昇華性物質の供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59177101A JPS59177101A (ja) | 1984-10-06 |
| JPH0557004B2 true JPH0557004B2 (fr) | 1993-08-23 |
Family
ID=12809388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4865683A Granted JPS59177101A (ja) | 1983-03-25 | 1983-03-25 | 昇華性物質の供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59177101A (fr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5653843U (fr) * | 1979-09-29 | 1981-05-12 | ||
| JPS5743045A (en) * | 1980-06-28 | 1982-03-10 | Fichtel & Sachs Ag | Chain replacing type outer mounted speed changing device |
-
1983
- 1983-03-25 JP JP4865683A patent/JPS59177101A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5653843U (fr) * | 1979-09-29 | 1981-05-12 | ||
| JPS5743045A (en) * | 1980-06-28 | 1982-03-10 | Fichtel & Sachs Ag | Chain replacing type outer mounted speed changing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59177101A (ja) | 1984-10-06 |
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