JPH0554692B2 - - Google Patents

Info

Publication number
JPH0554692B2
JPH0554692B2 JP61113344A JP11334486A JPH0554692B2 JP H0554692 B2 JPH0554692 B2 JP H0554692B2 JP 61113344 A JP61113344 A JP 61113344A JP 11334486 A JP11334486 A JP 11334486A JP H0554692 B2 JPH0554692 B2 JP H0554692B2
Authority
JP
Japan
Prior art keywords
film
gas
silicon carbide
microcrystalline silicon
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61113344A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62268128A (ja
Inventor
Akitsugu Hatano
Yoshihisa Fujii
Akira Suzuki
Masaru Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP61113344A priority Critical patent/JPS62268128A/ja
Publication of JPS62268128A publication Critical patent/JPS62268128A/ja
Publication of JPH0554692B2 publication Critical patent/JPH0554692B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP61113344A 1986-05-15 1986-05-15 微結晶炭化珪素膜の製造方法 Granted JPS62268128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61113344A JPS62268128A (ja) 1986-05-15 1986-05-15 微結晶炭化珪素膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61113344A JPS62268128A (ja) 1986-05-15 1986-05-15 微結晶炭化珪素膜の製造方法

Publications (2)

Publication Number Publication Date
JPS62268128A JPS62268128A (ja) 1987-11-20
JPH0554692B2 true JPH0554692B2 (enrdf_load_stackoverflow) 1993-08-13

Family

ID=14609865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61113344A Granted JPS62268128A (ja) 1986-05-15 1986-05-15 微結晶炭化珪素膜の製造方法

Country Status (1)

Country Link
JP (1) JPS62268128A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2616929B2 (ja) * 1987-08-22 1997-06-04 株式会社日本自動車部品総合研究所 微結晶炭化ケイ素半導体膜の製造方法
JP2692091B2 (ja) * 1987-10-31 1997-12-17 株式会社日本自動車部品総合研究所 炭化ケイ素半導体膜およびその製造方法
JPH02185972A (ja) * 1989-01-11 1990-07-20 Kobe Steel Ltd 炭化ケイ素膜の合成法
US5796116A (en) 1994-07-27 1998-08-18 Sharp Kabushiki Kaisha Thin-film semiconductor device including a semiconductor film with high field-effect mobility

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795677A (en) * 1980-12-03 1982-06-14 Kanegafuchi Chem Ind Co Ltd Amorphous silicon type photoelectric tranducer
JPS58194732A (ja) * 1982-05-06 1983-11-12 Konishiroku Photo Ind Co Ltd アモルフアス炭化シリコン層の形成方法
JPS58190810A (ja) * 1983-03-16 1983-11-07 Yoshihiro Hamakawa Ｐ型アモルフアスシリコンカ−バイドの製造方法

Also Published As

Publication number Publication date
JPS62268128A (ja) 1987-11-20

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