JPH0554627B2 - - Google Patents

Info

Publication number
JPH0554627B2
JPH0554627B2 JP60165242A JP16524285A JPH0554627B2 JP H0554627 B2 JPH0554627 B2 JP H0554627B2 JP 60165242 A JP60165242 A JP 60165242A JP 16524285 A JP16524285 A JP 16524285A JP H0554627 B2 JPH0554627 B2 JP H0554627B2
Authority
JP
Japan
Prior art keywords
boron trichloride
gas
adsorption
adsorbent
adsorption device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60165242A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227039A (ja
Inventor
Hisayuki Mizuno
Masao Miura
Hiroyuki Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP60165242A priority Critical patent/JPS6227039A/ja
Publication of JPS6227039A publication Critical patent/JPS6227039A/ja
Priority to US07/082,932 priority patent/US4820316A/en
Publication of JPH0554627B2 publication Critical patent/JPH0554627B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
JP60165242A 1984-09-11 1985-07-26 三塩化ホウ素吸着装置 Granted JPS6227039A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60165242A JPS6227039A (ja) 1985-07-26 1985-07-26 三塩化ホウ素吸着装置
US07/082,932 US4820316A (en) 1984-09-11 1987-08-05 Method of foreseeing break-through in gas adsorbing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60165242A JPS6227039A (ja) 1985-07-26 1985-07-26 三塩化ホウ素吸着装置

Publications (2)

Publication Number Publication Date
JPS6227039A JPS6227039A (ja) 1987-02-05
JPH0554627B2 true JPH0554627B2 (OSRAM) 1993-08-13

Family

ID=15808572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60165242A Granted JPS6227039A (ja) 1984-09-11 1985-07-26 三塩化ホウ素吸着装置

Country Status (1)

Country Link
JP (1) JPS6227039A (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0829999B2 (ja) * 1987-12-19 1996-03-27 富士通株式会社 ダイヤモンド膜の合成方法
EP0588449B1 (en) * 1988-12-27 1997-08-06 Canon Kabushiki Kaisha Electric field light-emitting device
EP0428759B1 (en) * 1989-06-15 1994-11-02 Idemitsu Petrochemical Co. Ltd. Diamond-coated member
JPH0382156U (OSRAM) * 1989-12-08 1991-08-21
JP2003226512A (ja) * 2001-11-28 2003-08-12 Ueda Shikimono Kojo:Kk 光触媒活性炭、着色光触媒活性炭、呈色活性炭及びこれらを用いた消臭・吸着製品並びに土壌浄化方法
CN109289488B (zh) * 2018-11-02 2021-06-29 辽宁新瑞碳材料科技有限公司 一种高温炉含氯、氩尾气的处理系统
CN109289487B (zh) * 2018-11-02 2021-06-29 辽宁新瑞碳材料科技有限公司 一种高温炉含氯、氩尾气的处理方法
CN109289485B (zh) * 2018-11-02 2021-06-29 辽宁新瑞碳材料科技有限公司 一种含氯高温炉尾气的回收处理方法

Also Published As

Publication number Publication date
JPS6227039A (ja) 1987-02-05

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