JPH055162B2 - - Google Patents

Info

Publication number
JPH055162B2
JPH055162B2 JP59238274A JP23827484A JPH055162B2 JP H055162 B2 JPH055162 B2 JP H055162B2 JP 59238274 A JP59238274 A JP 59238274A JP 23827484 A JP23827484 A JP 23827484A JP H055162 B2 JPH055162 B2 JP H055162B2
Authority
JP
Japan
Prior art keywords
mask
sample
mounting table
ratio
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59238274A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61117830A (ja
Inventor
Satoshi Ido
Toyoki Kitayama
Toa Hayasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP59238274A priority Critical patent/JPS61117830A/ja
Publication of JPS61117830A publication Critical patent/JPS61117830A/ja
Publication of JPH055162B2 publication Critical patent/JPH055162B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP59238274A 1984-11-14 1984-11-14 露光装置 Granted JPS61117830A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59238274A JPS61117830A (ja) 1984-11-14 1984-11-14 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59238274A JPS61117830A (ja) 1984-11-14 1984-11-14 露光装置

Publications (2)

Publication Number Publication Date
JPS61117830A JPS61117830A (ja) 1986-06-05
JPH055162B2 true JPH055162B2 (pm) 1993-01-21

Family

ID=17027745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59238274A Granted JPS61117830A (ja) 1984-11-14 1984-11-14 露光装置

Country Status (1)

Country Link
JP (1) JPS61117830A (pm)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629632A (ja) * 1985-07-06 1987-01-17 Agency Of Ind Science & Technol 投影露光装置
JPH0789537B2 (ja) * 1986-09-02 1995-09-27 日本電信電話株式会社 Ｘ線縮小投影露光装置

Also Published As

Publication number Publication date
JPS61117830A (ja) 1986-06-05

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