JPH0551173B2 - - Google Patents
Info
- Publication number
- JPH0551173B2 JPH0551173B2 JP61267601A JP26760186A JPH0551173B2 JP H0551173 B2 JPH0551173 B2 JP H0551173B2 JP 61267601 A JP61267601 A JP 61267601A JP 26760186 A JP26760186 A JP 26760186A JP H0551173 B2 JPH0551173 B2 JP H0551173B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge tube
- microwave
- plasma
- microwaves
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 claims description 19
- 238000009832 plasma treatment Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 description 14
- 239000007789 gas Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000004380 ashing Methods 0.000 description 2
- 239000000112 cooling gas Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26760186A JPS63122123A (ja) | 1986-11-12 | 1986-11-12 | マイクロ波プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26760186A JPS63122123A (ja) | 1986-11-12 | 1986-11-12 | マイクロ波プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63122123A JPS63122123A (ja) | 1988-05-26 |
| JPH0551173B2 true JPH0551173B2 (US06650917-20031118-M00005.png) | 1993-07-30 |
Family
ID=17446996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26760186A Granted JPS63122123A (ja) | 1986-11-12 | 1986-11-12 | マイクロ波プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63122123A (US06650917-20031118-M00005.png) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0612764B2 (ja) * | 1987-07-08 | 1994-02-16 | 日電アネルバ株式会社 | マイクロ波プラズマ処理装置 |
| JPH0567586A (ja) * | 1991-09-09 | 1993-03-19 | Nec Corp | Ｅｃｒプラズマエツチング装置 |
| JPH06267910A (ja) * | 1993-03-17 | 1994-09-22 | Hitachi Ltd | マイクロ波プラズマ処理装置 |
| KR940023322A (ko) * | 1993-03-17 | 1994-10-22 | 가나이 쯔도무 | 마이크로파 플라즈마 처리장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103340A (ja) * | 1983-09-21 | 1984-06-14 | Hitachi Ltd | プラズマ処理装置 |
-
1986
- 1986-11-12 JP JP26760186A patent/JPS63122123A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103340A (ja) * | 1983-09-21 | 1984-06-14 | Hitachi Ltd | プラズマ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63122123A (ja) | 1988-05-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |