JPH054956B2 - - Google Patents

Info

Publication number
JPH054956B2
JPH054956B2 JP62234826A JP23482687A JPH054956B2 JP H054956 B2 JPH054956 B2 JP H054956B2 JP 62234826 A JP62234826 A JP 62234826A JP 23482687 A JP23482687 A JP 23482687A JP H054956 B2 JPH054956 B2 JP H054956B2
Authority
JP
Japan
Prior art keywords
heater
case
flange
crucible
molecular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62234826A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6479094A (en
Inventor
Yoshifumi Ogawa
Naoyuki Tamura
Norio Kanai
Kunihiro Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP23482687A priority Critical patent/JPS6479094A/ja
Publication of JPS6479094A publication Critical patent/JPS6479094A/ja
Publication of JPH054956B2 publication Critical patent/JPH054956B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP23482687A 1987-09-21 1987-09-21 Molecular ray source Granted JPS6479094A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23482687A JPS6479094A (en) 1987-09-21 1987-09-21 Molecular ray source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23482687A JPS6479094A (en) 1987-09-21 1987-09-21 Molecular ray source

Publications (2)

Publication Number Publication Date
JPS6479094A JPS6479094A (en) 1989-03-24
JPH054956B2 true JPH054956B2 (OSRAM) 1993-01-21

Family

ID=16976991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23482687A Granted JPS6479094A (en) 1987-09-21 1987-09-21 Molecular ray source

Country Status (1)

Country Link
JP (1) JPS6479094A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101942697B (zh) * 2010-08-23 2012-11-14 清华大学 光伏多晶硅铸锭炉测温热电偶套管抽真空装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59152296A (ja) * 1983-02-17 1984-08-30 Agency Of Ind Science & Technol 分子線エピタキシヤル成長における分子線強度制御方法

Also Published As

Publication number Publication date
JPS6479094A (en) 1989-03-24

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