JPH0549355B2 - - Google Patents
Info
- Publication number
- JPH0549355B2 JPH0549355B2 JP16630489A JP16630489A JPH0549355B2 JP H0549355 B2 JPH0549355 B2 JP H0549355B2 JP 16630489 A JP16630489 A JP 16630489A JP 16630489 A JP16630489 A JP 16630489A JP H0549355 B2 JPH0549355 B2 JP H0549355B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- processing chamber
- solvent
- communication port
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 claims description 79
- 238000012545 processing Methods 0.000 claims description 59
- 239000002904 solvent Substances 0.000 claims description 58
- 238000004891 communication Methods 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 20
- 238000005406 washing Methods 0.000 claims description 17
- 238000001816 cooling Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 35
- OKTJSMMVPCPJKN-NJFSPNSNSA-N Carbon-14 Chemical class [14C] OKTJSMMVPCPJKN-NJFSPNSNSA-N 0.000 description 9
- 239000007788 liquid Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000013020 steam cleaning Methods 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16630489A JPH0330881A (ja) | 1989-06-28 | 1989-06-28 | 洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16630489A JPH0330881A (ja) | 1989-06-28 | 1989-06-28 | 洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0330881A JPH0330881A (ja) | 1991-02-08 |
| JPH0549355B2 true JPH0549355B2 (enExample) | 1993-07-26 |
Family
ID=15828860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16630489A Granted JPH0330881A (ja) | 1989-06-28 | 1989-06-28 | 洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330881A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10321580A (ja) * | 1997-05-15 | 1998-12-04 | Tokyo Electron Ltd | 基板の洗浄ユニット及び洗浄システム |
| JP2017170425A (ja) * | 2016-03-18 | 2017-09-28 | 株式会社クリンビー | ワーク洗浄方法およびワーク洗浄装置 |
-
1989
- 1989-06-28 JP JP16630489A patent/JPH0330881A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0330881A (ja) | 1991-02-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4983223A (en) | Apparatus and method for reducing solvent vapor losses | |
| US4865061A (en) | Decontamination apparatus for chemically and/or radioactively contaminated tools and equipment | |
| AU673663B2 (en) | Vacuum air lock for a closed perimeter solvent conservation system | |
| US5180438A (en) | Cleaning and drying system | |
| US5702535A (en) | Dry cleaning and degreasing system | |
| EP0611332A4 (en) | IMPROVED CLEANING SYSTEM AND METHOD. | |
| GB2174720A (en) | Method of and apparatus for cleaning garments and soft goods contaminated with nuclear, chemical and/or biological contaminants | |
| US4264299A (en) | Process and apparatus for controlling losses in volatile working fluid systems | |
| JPH0549355B2 (enExample) | ||
| JPH0549357B2 (enExample) | ||
| CA1237378A (en) | Tool decontamination unit for the removal of radioactive, chemical and biological contaminants | |
| US4772357A (en) | System for automatically etching pieces | |
| RU2221614C2 (ru) | Способ обеззараживания без сжигания материалов, содержащих опасные вещества (варианты) | |
| US5311891A (en) | Solvent recovering system for a cleaning machine | |
| EP0879313B1 (en) | Filter regeneration and dry cleaning system | |
| JPH0542316B2 (enExample) | ||
| US7638060B2 (en) | Process for removing contaminants from silicone-based solvents | |
| JPS61152020A (ja) | 処理装置 | |
| JP2001176731A (ja) | 変圧器の再生方法 | |
| JPS6311680Y2 (enExample) | ||
| JPS5841399A (ja) | 放射能汚染物の洗浄方法 | |
| JP3436426B2 (ja) | 蒸気洗浄方法 | |
| JPS5933996Y2 (ja) | 脱水装置 | |
| JPH0432689B2 (enExample) | ||
| JPH08200951A (ja) | 物品の水切り乾燥方法及びその装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |