JPH0548932B2 - - Google Patents

Info

Publication number
JPH0548932B2
JPH0548932B2 JP62221405A JP22140587A JPH0548932B2 JP H0548932 B2 JPH0548932 B2 JP H0548932B2 JP 62221405 A JP62221405 A JP 62221405A JP 22140587 A JP22140587 A JP 22140587A JP H0548932 B2 JPH0548932 B2 JP H0548932B2
Authority
JP
Japan
Prior art keywords
mask
wafer
light
diffraction grating
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62221405A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6464319A (en
Inventor
Akira Ono
Tomoji Sekya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP62221405A priority Critical patent/JPS6464319A/ja
Publication of JPS6464319A publication Critical patent/JPS6464319A/ja
Publication of JPH0548932B2 publication Critical patent/JPH0548932B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP62221405A 1987-09-04 1987-09-04 Aligning device Granted JPS6464319A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62221405A JPS6464319A (en) 1987-09-04 1987-09-04 Aligning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62221405A JPS6464319A (en) 1987-09-04 1987-09-04 Aligning device

Publications (2)

Publication Number Publication Date
JPS6464319A JPS6464319A (en) 1989-03-10
JPH0548932B2 true JPH0548932B2 (enExample) 1993-07-22

Family

ID=16766234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62221405A Granted JPS6464319A (en) 1987-09-04 1987-09-04 Aligning device

Country Status (1)

Country Link
JP (1) JPS6464319A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69222673T2 (de) * 1991-04-03 1998-04-09 Sharp Kk Vorrichtung zur Montage optischer Geräte
JP4827344B2 (ja) * 2001-06-22 2011-11-30 株式会社トプコン 光学測定装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258627A (ja) * 1985-09-09 1987-03-14 Toshiba Corp パタ−ン転写方法
JPH0685387B2 (ja) * 1986-02-14 1994-10-26 株式会社東芝 位置合わせ方法

Also Published As

Publication number Publication date
JPS6464319A (en) 1989-03-10

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