JPS6464319A - Aligning device - Google Patents

Aligning device

Info

Publication number
JPS6464319A
JPS6464319A JP62221405A JP22140587A JPS6464319A JP S6464319 A JPS6464319 A JP S6464319A JP 62221405 A JP62221405 A JP 62221405A JP 22140587 A JP22140587 A JP 22140587A JP S6464319 A JPS6464319 A JP S6464319A
Authority
JP
Japan
Prior art keywords
grating
foire
wafer
mask
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62221405A
Other languages
Japanese (ja)
Other versions
JPH0548932B2 (en
Inventor
Akira Ono
Tomoji Sekiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62221405A priority Critical patent/JPS6464319A/en
Publication of JPS6464319A publication Critical patent/JPS6464319A/en
Publication of JPH0548932B2 publication Critical patent/JPH0548932B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To accurately align by detecting the optical intensity of moire fringes presented by the operation of an interference foire formed by positive primary and negative primary diffracted lights and a first diffraction grating, and relatively moving the first and second diffraction gratings in response to the optical intensity. CONSTITUTION:A first diffraction grating 27 is formed on the side of a mask 22, and a second diffraction grating 28 is provided at a position facing the first grating 27 of the face opposite to the mask 22 of a wafer 21. A laser light 30 oscillated from a laser oscillator 29 is reflected on a mirror 31 to be irradiated to the grating 28 through an objective lens 26. Optical parallel glasses 32, 33 superpose the optical paths of positive and negative primary diffracted lights 34, 35 from the grating 28 on a wafer 22. A photosensor 36 detects the intensities of moire fringes due to the operations of an interference foire formed of the lights 34, 35 and the operation of the grating 27, and transmits it to a servo controller 37. The controller 37 aligns the mask 22 and the wafer 21 at predetermined positions on the basis of the intensity of the moire foire.
JP62221405A 1987-09-04 1987-09-04 Aligning device Granted JPS6464319A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62221405A JPS6464319A (en) 1987-09-04 1987-09-04 Aligning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62221405A JPS6464319A (en) 1987-09-04 1987-09-04 Aligning device

Publications (2)

Publication Number Publication Date
JPS6464319A true JPS6464319A (en) 1989-03-10
JPH0548932B2 JPH0548932B2 (en) 1993-07-22

Family

ID=16766234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62221405A Granted JPS6464319A (en) 1987-09-04 1987-09-04 Aligning device

Country Status (1)

Country Link
JP (1) JPS6464319A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5554251A (en) * 1991-04-03 1996-09-10 Sharp Kabushiki Kaisha Optical device assemble apparatus
JP2003075122A (en) * 2001-06-22 2003-03-12 Topcon Corp Optical measuring device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258627A (en) * 1985-09-09 1987-03-14 Toshiba Corp Pattern transfer process
JPS62188317A (en) * 1986-02-14 1987-08-17 Toshiba Corp Positioning method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258627A (en) * 1985-09-09 1987-03-14 Toshiba Corp Pattern transfer process
JPS62188317A (en) * 1986-02-14 1987-08-17 Toshiba Corp Positioning method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5554251A (en) * 1991-04-03 1996-09-10 Sharp Kabushiki Kaisha Optical device assemble apparatus
JP2003075122A (en) * 2001-06-22 2003-03-12 Topcon Corp Optical measuring device

Also Published As

Publication number Publication date
JPH0548932B2 (en) 1993-07-22

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