JPS6464319A - Aligning device - Google Patents
Aligning deviceInfo
- Publication number
- JPS6464319A JPS6464319A JP62221405A JP22140587A JPS6464319A JP S6464319 A JPS6464319 A JP S6464319A JP 62221405 A JP62221405 A JP 62221405A JP 22140587 A JP22140587 A JP 22140587A JP S6464319 A JPS6464319 A JP S6464319A
- Authority
- JP
- Japan
- Prior art keywords
- grating
- foire
- wafer
- mask
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To accurately align by detecting the optical intensity of moire fringes presented by the operation of an interference foire formed by positive primary and negative primary diffracted lights and a first diffraction grating, and relatively moving the first and second diffraction gratings in response to the optical intensity. CONSTITUTION:A first diffraction grating 27 is formed on the side of a mask 22, and a second diffraction grating 28 is provided at a position facing the first grating 27 of the face opposite to the mask 22 of a wafer 21. A laser light 30 oscillated from a laser oscillator 29 is reflected on a mirror 31 to be irradiated to the grating 28 through an objective lens 26. Optical parallel glasses 32, 33 superpose the optical paths of positive and negative primary diffracted lights 34, 35 from the grating 28 on a wafer 22. A photosensor 36 detects the intensities of moire fringes due to the operations of an interference foire formed of the lights 34, 35 and the operation of the grating 27, and transmits it to a servo controller 37. The controller 37 aligns the mask 22 and the wafer 21 at predetermined positions on the basis of the intensity of the moire foire.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62221405A JPS6464319A (en) | 1987-09-04 | 1987-09-04 | Aligning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62221405A JPS6464319A (en) | 1987-09-04 | 1987-09-04 | Aligning device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6464319A true JPS6464319A (en) | 1989-03-10 |
JPH0548932B2 JPH0548932B2 (en) | 1993-07-22 |
Family
ID=16766234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62221405A Granted JPS6464319A (en) | 1987-09-04 | 1987-09-04 | Aligning device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6464319A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5554251A (en) * | 1991-04-03 | 1996-09-10 | Sharp Kabushiki Kaisha | Optical device assemble apparatus |
JP2003075122A (en) * | 2001-06-22 | 2003-03-12 | Topcon Corp | Optical measuring device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6258627A (en) * | 1985-09-09 | 1987-03-14 | Toshiba Corp | Pattern transfer process |
JPS62188317A (en) * | 1986-02-14 | 1987-08-17 | Toshiba Corp | Positioning method |
-
1987
- 1987-09-04 JP JP62221405A patent/JPS6464319A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6258627A (en) * | 1985-09-09 | 1987-03-14 | Toshiba Corp | Pattern transfer process |
JPS62188317A (en) * | 1986-02-14 | 1987-08-17 | Toshiba Corp | Positioning method |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5554251A (en) * | 1991-04-03 | 1996-09-10 | Sharp Kabushiki Kaisha | Optical device assemble apparatus |
JP2003075122A (en) * | 2001-06-22 | 2003-03-12 | Topcon Corp | Optical measuring device |
Also Published As
Publication number | Publication date |
---|---|
JPH0548932B2 (en) | 1993-07-22 |
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