JPH0548623B2 - - Google Patents
Info
- Publication number
- JPH0548623B2 JPH0548623B2 JP59245770A JP24577084A JPH0548623B2 JP H0548623 B2 JPH0548623 B2 JP H0548623B2 JP 59245770 A JP59245770 A JP 59245770A JP 24577084 A JP24577084 A JP 24577084A JP H0548623 B2 JPH0548623 B2 JP H0548623B2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- circuit
- integrated circuit
- signal
- under test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59245770A JPS61124148A (ja) | 1984-11-20 | 1984-11-20 | 電子ビ−ム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59245770A JPS61124148A (ja) | 1984-11-20 | 1984-11-20 | 電子ビ−ム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61124148A JPS61124148A (ja) | 1986-06-11 |
| JPH0548623B2 true JPH0548623B2 (enrdf_load_stackoverflow) | 1993-07-22 |
Family
ID=17138549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59245770A Granted JPS61124148A (ja) | 1984-11-20 | 1984-11-20 | 電子ビ−ム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61124148A (enrdf_load_stackoverflow) |
-
1984
- 1984-11-20 JP JP59245770A patent/JPS61124148A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61124148A (ja) | 1986-06-11 |
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