JPH0548358Y2 - - Google Patents
Info
- Publication number
- JPH0548358Y2 JPH0548358Y2 JP11829187U JP11829187U JPH0548358Y2 JP H0548358 Y2 JPH0548358 Y2 JP H0548358Y2 JP 11829187 U JP11829187 U JP 11829187U JP 11829187 U JP11829187 U JP 11829187U JP H0548358 Y2 JPH0548358 Y2 JP H0548358Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- vacuum
- moisture
- preliminary
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 14
- 238000005211 surface analysis Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 238000004458 analytical method Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000717 retained effect Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000002309 gasification Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11829187U JPH0548358Y2 (zh) | 1987-07-31 | 1987-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11829187U JPH0548358Y2 (zh) | 1987-07-31 | 1987-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6423864U JPS6423864U (zh) | 1989-02-08 |
| JPH0548358Y2 true JPH0548358Y2 (zh) | 1993-12-24 |
Family
ID=31362516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11829187U Expired - Lifetime JPH0548358Y2 (zh) | 1987-07-31 | 1987-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0548358Y2 (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3529063B2 (ja) * | 1995-07-28 | 2004-05-24 | 日本電子株式会社 | プラズマエッチング装置を備えた表面分析装置 |
| DE102014110724B4 (de) * | 2014-07-29 | 2016-09-01 | European Molecular Biology Laboratory | Manipulationsbehälter für die Kryo-Mikroskopie |
| JP6807393B2 (ja) * | 2016-07-29 | 2021-01-06 | 株式会社日立ハイテク | 荷電粒子線装置 |
-
1987
- 1987-07-31 JP JP11829187U patent/JPH0548358Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6423864U (zh) | 1989-02-08 |
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