JPH0548306B2 - - Google Patents

Info

Publication number
JPH0548306B2
JPH0548306B2 JP27381985A JP27381985A JPH0548306B2 JP H0548306 B2 JPH0548306 B2 JP H0548306B2 JP 27381985 A JP27381985 A JP 27381985A JP 27381985 A JP27381985 A JP 27381985A JP H0548306 B2 JPH0548306 B2 JP H0548306B2
Authority
JP
Japan
Prior art keywords
purge gas
substrate
vacuum container
heating
heating chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP27381985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62133073A (ja
Inventor
Isamu Morisako
Yoichi Ino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP27381985A priority Critical patent/JPS62133073A/ja
Publication of JPS62133073A publication Critical patent/JPS62133073A/ja
Publication of JPH0548306B2 publication Critical patent/JPH0548306B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP27381985A 1985-12-05 1985-12-05 減圧気相成長装置 Granted JPS62133073A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27381985A JPS62133073A (ja) 1985-12-05 1985-12-05 減圧気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27381985A JPS62133073A (ja) 1985-12-05 1985-12-05 減圧気相成長装置

Publications (2)

Publication Number Publication Date
JPS62133073A JPS62133073A (ja) 1987-06-16
JPH0548306B2 true JPH0548306B2 (enrdf_load_stackoverflow) 1993-07-21

Family

ID=17533000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27381985A Granted JPS62133073A (ja) 1985-12-05 1985-12-05 減圧気相成長装置

Country Status (1)

Country Link
JP (1) JPS62133073A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6153260A (en) 1997-04-11 2000-11-28 Applied Materials, Inc. Method for heating exhaust gas in a substrate reactor
JP2954143B2 (ja) * 1998-03-02 1999-09-27 九州日本電気株式会社 Ｃｖｄ装置とガスの制御方法
JP2001050598A (ja) 2001-02-21 2001-02-23 Mitsubishi Heavy Ind Ltd 自立調整弁及びこれを有する圧縮式冷凍機

Also Published As

Publication number Publication date
JPS62133073A (ja) 1987-06-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term