JPH0547627B2 - - Google Patents

Info

Publication number
JPH0547627B2
JPH0547627B2 JP7345785A JP7345785A JPH0547627B2 JP H0547627 B2 JPH0547627 B2 JP H0547627B2 JP 7345785 A JP7345785 A JP 7345785A JP 7345785 A JP7345785 A JP 7345785A JP H0547627 B2 JPH0547627 B2 JP H0547627B2
Authority
JP
Japan
Prior art keywords
bath
evaporation
coating material
vapor pressure
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7345785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61235556A (ja
Inventor
Masumi Atsukawa
Toshihiko Odohira
Shigeo Itano
Tetsuyoshi Wada
Yoshikyo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP7345785A priority Critical patent/JPS61235556A/ja
Publication of JPS61235556A publication Critical patent/JPS61235556A/ja
Publication of JPH0547627B2 publication Critical patent/JPH0547627B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7345785A 1985-04-09 1985-04-09 蒸発方法 Granted JPS61235556A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7345785A JPS61235556A (ja) 1985-04-09 1985-04-09 蒸発方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7345785A JPS61235556A (ja) 1985-04-09 1985-04-09 蒸発方法

Publications (2)

Publication Number Publication Date
JPS61235556A JPS61235556A (ja) 1986-10-20
JPH0547627B2 true JPH0547627B2 (cs) 1993-07-19

Family

ID=13518791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7345785A Granted JPS61235556A (ja) 1985-04-09 1985-04-09 蒸発方法

Country Status (1)

Country Link
JP (1) JPS61235556A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109072413B (zh) * 2016-05-18 2020-07-14 株式会社爱发科 金属蒸发材料
JPWO2024209755A1 (cs) * 2023-04-05 2024-10-10

Also Published As

Publication number Publication date
JPS61235556A (ja) 1986-10-20

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