JPH0547499A - Industrial synchrotron radiation generator - Google Patents

Abstract

PURPOSE:To ensure local correction adjustment of a charged beam orbit through a deflection electromagnet of SR device (synchrotron radiation generator) by a simple structure of the deflection electromagnet. CONSTITUTION:A main coil 12 is wound around a side part yoke 71 of a deflection electromagnet 5' to be faced to a charged beam orbit of an SR device, and a pole piece 8 provided in opposition to an upper yoke 72 and a lower yoke 73 of the side part yoke 71, is divided into a fixed number of pole piece units 11, 11... through slits 10 of the size in a leakage range of a magnetic field, vertically to the incidence of the charged beam, or at a fixed angle. An auxiliary coil 13 is wound around each pole piece unit 11, 11, and a mean magnetic field is given by the main coil 12 on the whole, while correction and adjustment of a balance orbit through the angle, vibration and so on of the charged beam are carried out by the auxiliary coil 13 of each pole piece unit. Convergence characteristic or vibration is given to the orbit of the charged beam thereby, and the correction and adjustment are thus ensured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The disclosed technology belongs to the technical field of the structure of a deflecting electromagnet for a charged beam provided in an industrial synchrotron radiation generator.

[0002]

2. Description of the Related Art As is well known, the rise of industry depends largely on rapidly developing science and technology, and especially on the basis of physics such as electronic engineering and quantum mechanics. Therefore, the application and use of light and laser are remarkable in the advanced industries that extend to the micro world.

Recently, computer utilization technology has spread over all industries, and in lithography and the like used for integrated circuits such as IC parts, etc., optical technology is utilized to form a fine circuit pattern. In this case, , The shorter the wavelength of light, the more visible light can be used to draw a highly precise pattern.
Recently, X-ray lithography using X-rays in submicron units in addition to electron beams has come into use.

Synchrotron radiation (SR light) has been attracting attention of industry as the light source because of its intensity and parallelism, and SR devices for industrial use are being developed.

That is, as shown in FIG. 5, in an ordinary SR device (synchrotron radiation generator) 1, free electrons 3 are injected by an injection device 2 such as a septum magnet and a charged beam orbit is introduced into a beam duct 4. Let it form
A predetermined number of deflection electromagnets 5, 5, ... Formed an orbit of equilibrium, and SR light was extracted from the extraction port in a predetermined manner and used.

In such an SR device (synchrotron radiation generating device), the energy of the charged beam is high in an accelerator such as a so-called electron storage ring, and therefore the deflection electromagnet 5 is used.
A high magnetic flux density due to must be generated on the equilibrium orbit of the charged beam.

Since the charged beam moves at a high speed on its equilibrium orbit, and because the input free electrons from the input device 2 have a positional deviation, etc., the free electrons on the equilibrium orbit. May be displaced and move. Therefore, although it is basically necessary to form a magnetic field having a magnetic flux density as uniform as possible by the deflection electromagnet 5, as described above, on a balanced orbit. Since there are fluctuations in the charged beam, it is necessary to modify the magnetic field of each bending electromagnet 5 to correct the balanced orbit of the charged beam.

By the way, since the initial SR device (synchrotron radiation generator) shared a large-scale research and experimental device for particle physics, as described above.
Needless to say, when various practical demands come out, there is an increasing demand for a highly reliable small-sized device as an industrial SR device (synchrotron radiation generator).

In such an industrial SR device (synchrotron radiation generator), it goes without saying that reliability and workability cannot be ignored, and a bending electromagnet as a partial structure of the device. It is difficult to manufacture and assemble the same with a high degree of uniform accuracy, and there is a potential for cost increase.

Therefore, in the structure of the SR device (synchrotron radiation light generation device), although it is effective to reduce the number of the deflection electromagnets installed, it is effective in terms of size reduction and cost merit of the device, but the deflection is concerned. The suppression of the number of electromagnets competes with the fact that the trajectory of the charged beam cannot be adjusted, and therefore the beam width must be set to some extent in the beam duct, which has the disadvantage of affecting the amount of beam accumulation. become.

Since the deflection electromagnet is generally of the type in which a coil is wound around a yoke, a means for adjusting the magnetic field strength formed by the coil is disclosed in, for example, Japanese Patent Laid-Open No. 62-186500. As shown in, it is possible to arrange magnetic materials above and below the beam duct,
Further, as disclosed in Japanese Patent Laid-Open No. 63-224230, an auxiliary coil is partially attached to a pole piece integrated with a yoke, and further, as disclosed in the invention of Japanese Utility Model Laid-Open No. 2-64200. A technique has been developed in which magnetic blocks for adjusting the magnetic field distribution are attached to both end surfaces of the pole piece of the yoke in the charged beam traveling direction.

[0012]

However, the magnetic field distribution adjusting means of the deflection electromagnet which faces the equilibrium orbit of free electrons of the prior art has a drawback that the structure is remarkably complicated, and the apparatus is installed on site. Adopted for industrially usable SR devices (synchrotron radiation generators), which require extremely delicate adjustment work at times and the work becomes extremely complicated, resulting in high costs. There was a problem that was difficult to make.

[0013]

An object of the present invention is to solve the problem of adjusting the magnetic field distribution with respect to the equilibrium orbit of the charged beam of the deflecting electromagnet of the industrial SR device (synchrotron radiation generator) for actual operation based on the above-mentioned prior art. As a technical issue to be solved, avoid complicated adjustment work at the installation site, make sure basic adjustment work in advance at the factory production stage, and only adjust the input current to the deflection electromagnet during actual operation. It is intended to provide an excellent industrial synchrotron radiation light generation device that can adjust the magnetic field distribution and benefit the field of high energy technology application in various industries.

[0014]

In order to solve the above-mentioned problems, an industrial SR device (synchrotron radiation generating device) has ), The setting manner of the deflecting electromagnets facing the equilibrium orbit of the charged beam is made the same as the future aspect, and the main coil is wound around the yoke of each deflecting electromagnet, and mainly the basic primary uniform magnetic field distribution is obtained. Therefore, in the pole piece portions facing each other in the yoke of each deflection electromagnet, a predetermined number of pole piece units are divided by slits or the like in the traveling direction of the charged beam, or preset. A predetermined number of units are integrated with the yoke, and an auxiliary coil is wound around each pole piece unit, and the magnetic force between the pole pieces in each bending electromagnet is set. The distribution can be adjusted freely according to the state of the charged beam, the convergence of the charged beam can be achieved, and the focusing and shake of the charged beam can be adjusted, and the beam size is made constant. In order to increase the amount of beam accumulation and to keep the optimum trajectory of the charged beam constant, the pole piece unit etc. is integrally formed in the factory as designed in advance, and is installed at the installation site. The auxiliary coil of the pole piece unit in the deflection electromagnet is connected to different power sources so that the adjustment of the magnetic field distribution can be performed efficiently and the reliability of the device is improved. The technical measures are taken so as to improve the productivity and reduce the manufacturing cost and the running cost.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The following is a description of an embodiment of the invention of this application with reference to FIG. 5 based on FIGS. The same parts as in FIG. 4 will be described using the same reference numerals.

In the embodiment shown in FIG. 1, 5'denotes a deflecting electromagnet which forms the center of the gist of the invention of this application, and a charged beam of the SR apparatus (synchrotron radiation generator) 1 of the general embodiment shown in FIG. Is in orbit,
By design, a charged beam is formed as a balanced orbit on a racetrack type storage ring.

Therefore, the deflection electromagnet 5'may be, for example, a semicircular shape or a fan shape, and in the illustrated mode, the deflection angle is large, for example, 120 degrees, or. , 180 degrees or the like, and the yoke made of a ferromagnetic material is U-shaped in a side view. The side yoke 71, the upper yoke 72, and the lower yoke 7 are formed.
3 is integrally formed in advance, and the slit 1 has a difference within the magnetic field leakage range with respect to the traveling direction of the charged beam.
It is divided into three by 0 and 10 in the traveling direction of the charged beam.
It is formed in one fan-shaped pole piece unit 11, 11, 11. Therefore, as shown in FIG. 3, the pole piece units 11, 11, 11 of the pole piece have their end faces along the radius of curvature of the arc of the cross section. It is formed in f and is formed in a kind of denture shape.

Therefore, in the mode of this embodiment, the facing surface of the slit 10 of each pole piece unit 11 is made perpendicular to the traveling direction of the charged beam so that the magnetic field distribution can be easily adjusted.

The magnetic field of the deflection electromagnet 5 is entirely wound by winding the main coil 12 around the side yoke 71, and the auxiliary coil 1 around the pole piece unit 11.
3, the main coils 12 of the plurality of deflection electromagnets 5 are arranged in series with the power source, but the pole piece units 11 of the upper and lower yokes 72 and 73 of the deflection electromagnets 5 are arranged in series. In this case, the main coil 12 performs a predetermined common average magnetic field distribution for the charged beams which are connected to different power sources and pass currents independently of each other. With respect to the vibration of the charged beam in the above, fine adjustment is performed by the auxiliary coil 13 of each pole piece unit 11 so that the charged beam is converged and also shaken to finely adjust the trajectory of the charged beam. The size of the beam can be corrected and the beam accumulation amount can be increased.

Next, in the embodiment shown in FIG. 2, each pole piece unit 11 is integrally formed in advance with the yokes 72, 73 of the above-described embodiment by factory production, while each pole piece unit 11 'is formed. Is a mode in which each unit is separately molded in advance and is integrally joined to the upper and lower yokes 72 ′ and 73 ′ by appropriate welding or bolt fastening, and as shown in FIG. This structure is similar to that of the embodiment shown in FIG. 1, and the end surface of each pole piece unit 11 'is formed at a right angle to the traveling direction of the charged beam.

Thus, in the above-mentioned respective embodiments, the fan-shaped shapes of the pole piece units 11 and 11 'are formed such that their end faces are oriented in the direction and angle which coincide with the arc center of the charged beam trajectory. In the embodiment shown in FIG. 4, the pole piece units 11 ″ and 11 ″ are divided into three in the traveling direction of the charged beam.
The slits 10 ', 10' between them are not oriented so that their end faces are directed toward the center of the radius of curvature of the charged beam orbit, and their angles are made non-perpendicular as shown by f '. So that the so-called edge effect can be achieved, and the focusing force is more effectively imparted to the charged beam,
This is a mode in which the diaphragm for the charged beam is sufficiently given and the shake action can be given.

Of course, also in this embodiment, the side yoke 7 is
A main coil 12 is wound around 1, and an auxiliary coil 13 is also wound around each pole piece unit 11 ″ so that the magnetic field distribution can be adjusted for each individual piece.

In the above-mentioned structure, the free electrons 3 are incident on the beam duct 4 by the injector 2 in a predetermined manner, and in the process of orbiting the equilibrium orbit of the charged beam at a high speed, the deflection electromagnets 5 and 5'receive magnetic force, and Lorentz. When it is bent by a force, it emits white light synchrotron radiation (SR light) of a continuous wavelength, etc., and is used for a predetermined period. It is performed by the main coil 12 of the yoke 71, but in order to adjust the influence of the vibration of the charged beam in the equilibrium orbit, the pole piece units 11, 11 ′, 1
The auxiliary coil 13 of 1 ″ is operated by individual current control, and a predetermined focusing force or shake is applied to correct the trajectory.

In this way, the trajectory adjustment of the charged beam is surely performed, and the beam accumulation amount can be increased and the high energy as designed can be imparted while the existing size of the beam duct 4 is adopted.

Of course, the embodiment of the invention of this application is not limited to each of the above-described embodiments. For example, the number of divisions of the pole piece is not limited to the three modes of each of the above-mentioned embodiments, but two. Various modes can be adopted, such as an appropriate design example such as four or more.

As a matter of course, the orbit of the charged beam in the storage ring can be formed in a triangular shape other than the racetrack type.

[0027]

As described above, according to the invention of this application, in an SR device (synchrotron radiation generation device) which basically extracts synchrotron radiation (SR light) having a continuous wavelength of white, a balanced orbit of a charged beam is obtained. Avoid the negative point that the charged beam trajectory cannot be adjusted by reducing the number of deflection electromagnets, and it is not necessary to make the beam duct large in size, and the beam accumulation amount can be increased to achieve a reliable balanced trajectory. The excellent effect of being able to do is exhibited.

Therefore, it is possible to surely adjust the trajectory with respect to the angle and the vibration of the charged beam incident on the deflection magnetic field space.
An excellent effect that the SR device (synchrotron radiation generation device) can be made compact and the cost can be surely achieved is exhibited.

Moreover, since the deflecting electromagnet is divided into a plurality of pole pieces in the incident direction of the charged beam, the machining itself can be adjusted in advance at the factory, so that it is necessary to perform complicated function adjustments in the field installation. Therefore, there is an advantage that the installation work is easy and the initial cost can be reduced.

Therefore, also from this fact, it is possible to promote the compactness and cost reduction of the bending electromagnet, resulting in the improvement of the reliability of the apparatus and the utilization efficiency of the continuous wave synchrotron radiation (SR light). It also has an excellent effect of increasing.

Further, in a predetermined number of divisions intersecting in the traveling direction of the charged beam in each pole piece, by making the incident surface of the division perpendicular to the ideal charged beam trajectory, the manufacturing processing accuracy is improved and the magnetic field distribution is adjusted. It also has the effect of ease,
By making the incident surface non-perpendicular, an edge effect can be produced, the convergence with respect to the charged beam can be enhanced, and shake and the like can be easily reduced, and the charged beam can be effectively narrowed down.

By doing so, in the invention of this application, by adjusting the strength of the magnetic field of the deflection electromagnet, all the magnetic fields within the range of the magnetic field of the deflection electromagnet are uniform, so that local charging is performed. This has an excellent effect of overcoming the point that the deviation of the beam from the trajectory cannot be corrected and enabling the fine adjustment of the trajectory of the charged beam.

Therefore, the deflection electromagnet as a whole has an excellent effect that the trajectory of the charged beam passing through the deflected electromagnet can be locally and delicately adjusted according to the correspondence of the incident charged beam.

[Brief description of drawings]

1 to 4 are explanatory views of an embodiment of the invention of this application.

FIG. 1 is an overall schematic perspective view of an embodiment.

FIG. 2 is a front view of another embodiment.

3 is a partial cross-sectional plan view of the lower half of the embodiment of FIGS. 1 and 2. FIG.

FIG. 4 is a partial cross-sectional plan view of the lower half of another embodiment.

FIG. 5 is a schematic plan view of an SR device (synchrotron radiation generator) of a general mode.

[Explanation of symbols]

 3 Charged beam 4 Beam duct (orbit) 5 Bending electromagnet 13 Auxiliary coil 1 Synchrotron radiation generator (SR device) 71 Yoke 8 Pole piece 11, 11 ', 11' 'Pole piece unit f Direction of end face of pole piece unit

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kiyoshi Aizawa 1-1 Kawasaki-cho, Akashi-shi, Hyogo Kawasaki Heavy Industries Ltd. Akashi Plant

Claims (4)

[Claims] 1. A synchrotron radiation generator for industrial use, wherein an auxiliary coil for adjusting magnetic field distribution is attached to a deflection electromagnet facing a balanced orbit of a charged beam, the deflection electromagnet being provided integrally with a yoke of the deflection electromagnet. An industrial synchrotron radiation light generation device characterized in that a plurality of pole pieces are divided in the orbital direction of the charged beam, and an auxiliary coil is wound around each divided pole piece unit. 2. The industrial synchrotron radiation according to claim 1, characterized in that the end faces of the divided pole piece units in the orbital direction are formed at right angles to the incident direction of the charged beam. Generator. 3. The industrial synchrotron radiation according to claim 1, wherein the end faces in the orbital direction of the divided pole piece units are formed at a right angle to the incident direction of the charged beam. Light generator. 4. The industrial synchrotron radiation generator according to claim 1, wherein the auxiliary coils of each of the pole piece units have separate input power sources.