JP2516853B2 - Industrial synchrotron radiation generator - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The disclosed technology belongs to the technical field of the structure of a deflecting magnet for a charged beam, which is installed in an industrial synchrotron radiation generator.

[0002]

2. Description of the Related Art As is well known, the prosperity of industry depends largely on rapidly developing science and technology, especially on the basis of physics such as electronic engineering and quantum mechanics. Therefore, there are remarkable applications and applications of light and laser in advanced industries that extend to the micro world.

Recently, computer utilization technology has spread over all industries, and in lithography and the like used for integrated circuits such as IC parts, etc., optical technology is used to form a fine circuit pattern. In this case, , The shorter the wavelength of light, the more visible light can be used to draw a highly precise pattern, but now it is using ultraviolet light.
Recently, X-ray lithography using X-rays in the submicron unit, which exceeds the level of the electron beam, has come into use.

Synchrotron radiation (SR light) has been attracting attention of industry as the light source because of its intensity and parallelism, and an SR device for industrial use is being developed.

That is, as shown in FIG. 5, in an ordinary SR device (synchrotron radiation generator) 1, free electrons 3 are injected by an injection device 2 such as a septum magnet, and an orbit of a charged beam in a beam duct 4. Was formed and a circulating orbit was formed by a predetermined number of deflection electromagnets 5, 5, ..., And SR light was extracted from the extraction port in a predetermined manner and used.

In such an SR device (synchrotron radiation light generation device), the energy of the charged beam is high in an accelerator such as a so-called electron storage ring, and therefore the deflection electromagnet 5 is used.
Therefore, a high magnetic flux density must be generated on the equilibrium orbit of the charged beam.

Since the charged beam moves at a high speed on its equilibrium orbit, and because the input free electrons from the input device 2 also have a positional shift, the charged beam is free to move on the equilibrium orbit. Since the electrons may move while being displaced, it is basically necessary to form a magnetic field having a magnetic flux density as uniform as possible by the deflection electromagnet 5, but as described above, the balanced orbit Since the upper charged beam has fluctuations and the like, it is necessary to modify the magnetic field of each bending electromagnet 5 to correct the balanced orbit of the charged beam.

By the way, since the SR device (synchrotron radiation generator) at the early stage of development was used as a large-scale device for research and experiment for particle physics, as described above, various SR devices were practically used. As a matter of course, there is an increasing demand for a highly reliable and compact device as an industrial SR device (synchrotron radiation generator).

In such an industrial SR device (synchrotron radiation generator), it goes without saying that not only reliability but also operability and workability cannot be ignored.
It is difficult to manufacture and assemble the deflection electromagnet 5 as a partial structure of the apparatus with a high degree of uniform accuracy, and there is a potential for cost increase.

Therefore, in the structure of the SR device (synchrotron radiation light generation device), it is effective to reduce the number of the deflection electromagnets installed in view of the compactness of the device and cost merit, but the deflection is concerned. The suppression of the number of electromagnets competes with the fact that the trajectory of the charged beam cannot be adjusted, so that the beam duct must be set to a certain beam width, which has the disadvantage of affecting the amount of beam accumulation. become.

Since the deflection electromagnet is generally of the type in which a coil is wound around a yoke, a means for adjusting the magnetic field strength formed by the coil is disclosed in, for example, Japanese Patent Laid-Open No. 62-186500. As shown in the invention,
You can arrange magnetic materials above and below the beam duct,
Also, as disclosed in Japanese Patent Laid-Open No. 63-224230, an auxiliary coil is partially attached to a pole piece integrated with a yoke, and further, as disclosed in the invention of Japanese Utility Model Laid-Open No. 2-64200. A technique has also been developed in which magnetic blocks for adjusting the magnetic field distribution are attached to both end surfaces of the pole piece of the yoke in the charged beam traveling direction.

[0012]

However, the conventional magnetic field distribution adjusting means for the deflecting electromagnet that allows the charged beam to face the equilibrium orbit has the drawback that the structure is remarkably complicated, and the apparatus is installed in the field. This is used for industrially available SR devices (synchrotron radiation generators), which require extremely delicate adjustment work at times and the work becomes extremely complicated, resulting in high costs. There was a disadvantage that was hard to do.

[0013]

An object of the present invention is to solve the problem of adjusting the magnetic field distribution with respect to the equilibrium orbit of the charged beam of the deflecting electromagnet of the industrial SR device (synchrotron radiation generator) for practical use based on the above-mentioned prior art. As a technical issue to be solved, avoid complicated adjustment work etc. at the installation site, make sure basic adjustment work in advance at the factory production stage, and in actual operation, only adjust the input current to the deflection electromagnet. It is intended to provide an excellent industrial synchrotron radiation light generation device which can adjust the magnetic field distribution and benefit the fields of high energy technology application in various industries.

[0014]

In order to solve the above-mentioned problems, an industrial SR device (synchrotron radiation light generating device) is provided in order to solve the above-mentioned problems. ), The setting manner of the deflection electromagnets facing the equilibrium orbit of the charged beam is the same as the conventional one, and in each deflection electromagnet, a main coil is wound around the yoke, and a basic primary uniform magnetic field is mainly used. Therefore, in the pole piece portion integrally formed by the yoke of each bending electromagnet, a predetermined number of pole piece units are divided through slits in the traveling direction of the charged beam to divide the pole piece portion in advance. A predetermined number of units that have been set are integrated with the yoke, and an auxiliary coil is wound around each pole piece unit, The field distribution can be adjusted freely according to the state of the charged beam, the convergence of the charged beam can be achieved, and the focusing and shake of the charged beam can be adjusted, and the beam size can be kept constant. To increase the accumulation amount of the beam so that the optimum trajectory of the charged beam can be made constant, and
The pole piece unit etc. are integrally formed as designed in advance at the factory so that adjustments etc. at the installation site do not have to be performed, and the auxiliary coils of the pole piece unit in the deflection electromagnet are different power sources. The technical measures were taken so that the connection could be made and the magnetic field distribution could be adjusted efficiently to improve the reliability of the device and also reduce the manufacturing cost and running cost. .

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The following is a description of an embodiment of the invention of this application with reference to FIG. 5 based on FIGS. Note that parts that are the same as those in FIG. 5 are described using the same symbols.

In the embodiment shown in FIG. 1, 5'denotes a deflecting electromagnet which forms the center of the gist of the invention of the present application, and a charged beam of the SR apparatus (synchrotron radiation generator) 1 of the general embodiment shown in FIG. It is designed to be exposed to an orbit, and is designed to cause a racetrack type storage ring to form a charged beam as an equilibrium orbit.

Therefore, the deflecting electromagnet 5'may have, for example, a semi-circular shape in plan view or a fan shape, and in the illustrated embodiment, it has a large deflection angle, for example, 120. It is a bending electromagnet of 180 degrees or 180 degrees, and its ferromagnetic material yoke is U-shaped in side view, and the side yoke 71, the upper yoke 72, and the lower yoke 73 are integrally formed in advance. In addition, the slits 10 and 10 having a difference within the magnetic field leakage range with respect to the traveling direction of the charged beam are divided into three in the traveling direction of the charged beam, and three fan-shaped pole piece units 11, 11 are provided.
Therefore, as shown in FIG. 3, the pole piece units 11, 11, 11 of the pole piece are formed such that their end face shapes are f along the radius of curvature of the arc of the cross section to form a kind of denture shape. Has been formed.

Therefore, in the mode of this embodiment, the facing surfaces of the slits 10 of each pole piece unit 11 are formed so as to be non-perpendicular to the traveling direction of the charged beam so that the magnetic field distribution can be easily adjusted. .

The formation of the magnetic field of the deflection electromagnet 5 is carried out as a whole by winding the main coil 12 around the side yoke 71 and by adjusting the auxiliary coil 13 for each pole piece unit 11. The main coils 12 of the respective bending electromagnets 5 are arranged in series with the power source, but the auxiliary coils 13 of the pole piece units 11 of the upper and lower yokes 72 and 73 of the respective bending electromagnets 5 are not arranged. The main coil 12 performs a predetermined common averaged magnetic field distribution for the charged beams that are respectively connected to different power sources and are independently energized and pass current.
As described above, the charging angle of the charged beam and the vibration of the charged beam in the equilibrium orbit are finely adjusted by the auxiliary coil 13 of each pole piece unit 11 so that the charged beam can be converged and the shake can be prevented. The charged beam trajectory is finely adjusted by giving a predetermined amount, the size of the load beam is corrected, and the beam accumulation amount can be increased.

Next, in the embodiment shown in FIG. 2, each pole piece unit 11 is integrally formed in advance with the yokes 72, 73 of the above-described embodiment by factory production, whereas each pole piece unit 11 'is formed integrally. Is a mode in which each unit is separately molded in advance and is integrally joined to the upper and lower yokes 72 'and 73' by appropriate welding or bolt fastening, and as shown in FIG. The structure is the same as that of the embodiment shown in FIG. 1, and the end faces of the pole piece units 11 'through the slits 10 are formed at right angles to the traveling direction of the charged beam.

Thus, in the above-mentioned respective embodiments, the fan-shaped array shape of the pole piece units 11 and 11 'is formed in the direction and angle where the end faces of the pole piece units 11 and 11' coincide with the arc center of the charged beam trajectory. In the embodiment shown in FIG. 4, the pole piece unit 11 ″ divided into three in the traveling direction of the charged beam, 1
The direction of the end face through the 1 '' slits 10 ', 10' is not directed toward the center of the radius of curvature of the charged beam orbit, and the central direction is defined by an angle as shown in f '. It is made non-rectangular so that the so-called edge effect can be achieved, the focusing force is more effectively given to the charged beam, the diaphragm for the charged beam is sufficiently given, and the swinging action can also be given. It is a mode that has been performed.

Of course, the side yoke 7 is also used in this embodiment.
The main coil 12 is wound around 1, and the auxiliary coil 13 is also wound around each pole piece unit 11 ″ so that the magnetic field distribution can be adjusted for each individual unit.

In the above-mentioned structure, the free electrons 3 are incident on the beam duct 4 by the injector 2 in a predetermined manner, and in the process of orbiting the equilibrium orbit of the charged beam at a high speed, the deflection electromagnets 5 and 5 ′ receive the magnetic force and Lorentz When it is bent by a force, it emits white light synchrotron radiation (SR light) with a continuous wavelength and is used for a predetermined period. It is performed by the main coil 12 of the side yoke 71. To adjust the influence of the vibration of the charged beam in the equilibrium orbit, each pole piece unit 11,
The auxiliary coils 13 of 11 'and 11''are controlled by individual currents to give a predetermined focusing force or shake to correct the trajectory.

In this way, the trajectory adjustment of the charged beam is surely performed, and the beam accumulation amount can be increased and high energy as designed can be imparted while the existing size of the beam duct 4 is adopted.

Of course, the embodiment of the invention of this application is not limited to each of the above-described embodiments. For example, the number of divisions of the pole piece is not limited to the three modes of each of the above-described embodiments, but two. Various modes can be adopted, such as an appropriate design example such as four or more.

As a matter of course, the trajectory of the charged beam in the storage ring may be triangular instead of racetrack type.

[0027]

As described above, according to the invention of this application, in an SR device (synchrotron radiation generation device) which basically takes out synchrotron radiation (SR light) having a continuous wavelength of white, a balanced orbit of a charged beam is obtained. The negative point of unadjustable charged beam trajectories by reducing the number of deflection electromagnets is avoided, and it is not necessary to make the beam duct large in size, and the beam accumulation amount can be increased to ensure a reliable balanced trajectory. The excellent effect that it can be obtained is exhibited.

Therefore, the trajectory of the charged beam incident on the magnetic field space formed by the deflecting electromagnet can be adjusted reliably, and the SR apparatus (synchrotron radiation light generator) for industrial use can be made compact. There is an excellent effect that the cost can be surely reduced.

Further, by dividing the pole piece in the traveling direction of the charged beam through the slit, the delicate adjustment of the adjusting magnetic field for adjusting the trajectory of the charged beam can be performed as designed. It

Moreover, dividing the pole piece of the deflecting electromagnet into a plurality of slits in the direction of travel of the charged beam through slits can itself be processed and adjusted at the factory in advance, which makes it difficult to adjust the functions in the field installation. Therefore, there is an advantage that the installation work is easy and the initial cost can be reduced.

Therefore, also from this fact, it is possible to promote the compactness and cost reduction of the deflection electromagnet, resulting in the improvement of the reliability of the apparatus and the utilization efficiency of the continuous wave synchrotron radiation (SR light). It also has the excellent effect of increasing.

Further, in dividing each pole piece through a predetermined number of slits intersecting in the traveling direction of the charged beam, the manufacturing processing accuracy is improved by making the division plane perpendicular to the traveling direction of the charged beam trajectory. Also, it has the effect of facilitating the adjustment of the magnetic field distribution, and by making the dividing surface non-perpendicular to the traveling direction of the charged beam, it is possible to create an edge effect, improve the convergence to the charged beam, and easily reduce shake and the like. There is also an advantage that the charged beam can be narrowed down effectively.

By doing so, in the invention of this application, by adjusting the strength of the magnetic field of the deflection electromagnet, all the magnetic fields within the range of the magnetic field of the deflection electromagnet are uniform, so that the local charging is performed. The excellent effect of overcoming the point that the deviation of the beam from the trajectory cannot be corrected and enabling fine adjustment of the trajectory of the charged beam is achieved.

Therefore, the entire deflection electromagnet has an excellent effect that it can be locally and delicately adjusted in accordance with the charge beam traveling on the trajectory of the charge beam passing through the deflection electromagnet.

BRIEF DESCRIPTION OF THE DRAWINGS FIGS. 1 to 4 are explanatory views of an embodiment of the invention of this application.

FIG. 1 is an overall schematic perspective view of an embodiment.

FIG. 2 is a front view of another embodiment.

FIG. 3 is a partial cross-sectional plan view of the lower half of the embodiment of FIGS. 1 and 2.

FIG. 4 is a partial cross-sectional plan view of the lower half of another embodiment.

FIG. 5 is a schematic plan view of an SR device (synchrotron radiation generator) of a general mode.

[Explanation of symbols]

 3 Charged beam 4 Beam duct (orbit) 5 Bending electromagnet 13 Auxiliary coil 1 Synchrotron radiation generator (SR device) 71 Yoke 8 Pole piece 10, 10 'Slit 11, 11', 11 '' Pole piece unit f Pole piece Unit end face direction

 ─────────────────────────────────────────────────── ─── Continuation of front page Examiner Masahiro Etsuka (56) References JP-A-63-266800 (JP, A)

Claims (3)

(57) [Claims] 1. A synchrotron radiation generator for industrial use, wherein an auxiliary coil for adjusting a magnetic field distribution is attached to a deflection electromagnet facing a balanced orbit of a charged beam, the deflection electromagnet being provided integrally with a yoke of the deflection electromagnet. The pole pieces are multi-divided pole piece units through slits in the orbital traveling direction of the charged beam, and an auxiliary coil is wound around each divided pole piece unit. Industrial synchrotron radiation generator. 2. Each of the divided pole piece units
End <br/> face synchro industrial patent claims paragraph 1, wherein the being non-right angle formed in the traveling direction of the charged beam through the slit in the track traveling direction of the charged particle beam Tron radiation generator. 3. An auxiliary coil for each of the pole piece units.
2. The industrial synchrotron radiation light generator according to claim 1, wherein each of the input power supplies is separate .