JPH0547440Y2 - - Google Patents

Info

Publication number
JPH0547440Y2
JPH0547440Y2 JP16941487U JP16941487U JPH0547440Y2 JP H0547440 Y2 JPH0547440 Y2 JP H0547440Y2 JP 16941487 U JP16941487 U JP 16941487U JP 16941487 U JP16941487 U JP 16941487U JP H0547440 Y2 JPH0547440 Y2 JP H0547440Y2
Authority
JP
Japan
Prior art keywords
air cylinder
end surface
outer end
target box
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16941487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0174600U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16941487U priority Critical patent/JPH0547440Y2/ja
Publication of JPH0174600U publication Critical patent/JPH0174600U/ja
Application granted granted Critical
Publication of JPH0547440Y2 publication Critical patent/JPH0547440Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
JP16941487U 1987-11-04 1987-11-04 Expired - Lifetime JPH0547440Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16941487U JPH0547440Y2 (enrdf_load_stackoverflow) 1987-11-04 1987-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16941487U JPH0547440Y2 (enrdf_load_stackoverflow) 1987-11-04 1987-11-04

Publications (2)

Publication Number Publication Date
JPH0174600U JPH0174600U (enrdf_load_stackoverflow) 1989-05-19
JPH0547440Y2 true JPH0547440Y2 (enrdf_load_stackoverflow) 1993-12-14

Family

ID=31459448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16941487U Expired - Lifetime JPH0547440Y2 (enrdf_load_stackoverflow) 1987-11-04 1987-11-04

Country Status (1)

Country Link
JP (1) JPH0547440Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0174600U (enrdf_load_stackoverflow) 1989-05-19

Similar Documents

Publication Publication Date Title
DE3587087T2 (de) Roentgenstrahlenquelle mit hoher intensitaet.
US3133227A (en) Linear particle accelerator apparatus for high energy particle beams provided with pulsing means for the control electrode
JPH0528944A (ja) 荷電粒子線装置
US5303281A (en) Mammography method and improved mammography X-ray tube
US4611121A (en) Magnet apparatus
JPH0547440Y2 (enrdf_load_stackoverflow)
JP2898658B2 (ja) 多段加速方式荷電粒子線加速装置
CN210287498U (zh) 一种绝缘管状工件的内镀装置
CN216982176U (zh) 一种交变相位聚焦漂移管加速器
US3984725A (en) Permanent magnet structure for crossed-field tubes
CN116590680B (zh) 一种用于磁控溅射的阴极装置
CN206147109U (zh) 一种离子源束流诊断用发射度仪
CN219907831U (zh) 一种用于磁控溅射的阴极装置
US3018944A (en) Electrical vacuum pump apparatus
US3379925A (en) Tunable magnetron having a capacitive transducer magnetically coupled to the tuning member
JPH0544800Y2 (enrdf_load_stackoverflow)
US3088657A (en) Glow discharge vacuum pump apparatus
JP3300497B2 (ja) ジャイロトロン装置
CN222233575U (zh) 带电粒子束发生器及离子束刻蚀设备
JP2009187678A (ja) 電力フィーダ
JPS636798A (ja) サイクロトロンの縦型イオン源
JP2879302B2 (ja) マグネトロンプラズマエッチング用磁場発生装置
JPH07211494A (ja) 小型電子銃
GB853668A (en) Electron tube apparatus
JP2514830Y2 (ja) マグネトロンスパッタ装置