JPH0546889B2 - - Google Patents
Info
- Publication number
- JPH0546889B2 JPH0546889B2 JP60125246A JP12524685A JPH0546889B2 JP H0546889 B2 JPH0546889 B2 JP H0546889B2 JP 60125246 A JP60125246 A JP 60125246A JP 12524685 A JP12524685 A JP 12524685A JP H0546889 B2 JPH0546889 B2 JP H0546889B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensitive
- sensitive cell
- hole
- cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 6
- 238000003754 machining Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Manipulator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60125246A JPS61284630A (ja) | 1985-06-11 | 1985-06-11 | 圧覚センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60125246A JPS61284630A (ja) | 1985-06-11 | 1985-06-11 | 圧覚センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61284630A JPS61284630A (ja) | 1986-12-15 |
| JPH0546889B2 true JPH0546889B2 (cs) | 1993-07-15 |
Family
ID=14905384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60125246A Granted JPS61284630A (ja) | 1985-06-11 | 1985-06-11 | 圧覚センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61284630A (cs) |
-
1985
- 1985-06-11 JP JP60125246A patent/JPS61284630A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61284630A (ja) | 1986-12-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |