JPH0545377Y2 - - Google Patents
Info
- Publication number
- JPH0545377Y2 JPH0545377Y2 JP1988094638U JP9463888U JPH0545377Y2 JP H0545377 Y2 JPH0545377 Y2 JP H0545377Y2 JP 1988094638 U JP1988094638 U JP 1988094638U JP 9463888 U JP9463888 U JP 9463888U JP H0545377 Y2 JPH0545377 Y2 JP H0545377Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter unit
- casing
- fan
- clean room
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 claims description 20
- 210000000078 claw Anatomy 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 238000012423 maintenance Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988094638U JPH0545377Y2 (tr) | 1988-07-19 | 1988-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988094638U JPH0545377Y2 (tr) | 1988-07-19 | 1988-07-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0217220U JPH0217220U (tr) | 1990-02-05 |
| JPH0545377Y2 true JPH0545377Y2 (tr) | 1993-11-19 |
Family
ID=31319199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988094638U Expired - Lifetime JPH0545377Y2 (tr) | 1988-07-19 | 1988-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0545377Y2 (tr) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0113545Y2 (tr) * | 1985-12-17 | 1989-04-20 | ||
| JPH043615Y2 (tr) * | 1985-12-25 | 1992-02-04 |
-
1988
- 1988-07-19 JP JP1988094638U patent/JPH0545377Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0217220U (tr) | 1990-02-05 |
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