JPH054483U - Ring carrier - Google Patents

Abstract

(57) [Summary] [Purpose] To provide a ring transfer device that can transfer even rings having different outer diameters by suction using a ring suction pad of an arm. [Arrangement] Arms 2 are rotatably attached to four sides of a disc-shaped support body 1 via fixing means 3, respectively.
A ring suction pad 4 is provided at the tip of each arm 2. The fixing means 3 is composed of, for example, a threaded support shaft 31 that is inserted into each insertion hole 11 of the support body 1, a nut 32 that is screwed into the support shaft 31, and a knob 33 at the tip. The combined nut 32 is located on the support body 1, and the lower end of the support shaft 31 and one end of the arm 2 are fixed to each other. By moving the knob 33 up and down, the arm 2 moves up and down, and by rotating it, the arm 2 becomes rotatable.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a ring carrier device that can carry a ring having different outer diameters.

[0002]

[Prior Art]

 In the semiconductor manufacturing process, there is a process in which a semiconductor wafer is attached to a sheet and diced, then an aluminum ring is conveyed to this sheet, and the sheet is stretched using this ring to widen the intervals between the diced semiconductor pellets. . As a ring transport device for transporting the ring used at this time to the sheet, for example, as shown in FIG. 5, the suction pads 101 are attached to the respective tips of four arms 100 arranged in a cross shape. There is one in which the peripheral edge of the ring 102 is attached by suction.

In this case, the ring that is transported to increase the distance between the diced semiconductor wafers is replaced with a ring having a different outer diameter when the size of the semiconductor wafer changes.

[0004]

[Problems to be solved by the device]

 Therefore, when the size of the semiconductor wafer is changed and the rings having different outer diameters are correspondingly transferred, since the arm 100 has a constant length in the ring transfer device shown in FIG. After exchanging with a ring transport device that matches the outer diameter of the ring to be transported, each suction pad was used to suction and transport the peripheral edge of the ring. Therefore, if the size of the semiconductor wafer is changed frequently, it is troublesome that the ring transfer device itself is frequently replaced, and in consideration of the size of the semiconductor wafer, rings of various outer diameters are required. There was a problem that it was necessary to prepare a ring transfer device that can adsorb.

[0005]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, the ring carrier of the present invention is characterized in that an arm having a ring suction pad at its tip is rotatably provided on the periphery of a support body via fixing means.

[0006]

[Action]

 In the ring carrier having the above structure, the arms provided on the periphery of the support body are rotatably provided via the fixing means. Therefore, when each arm is rotated with respect to the support body, the support body is rotated. The distance from the center to the ring suction pad at the tip of each arm gradually changes. As a result, the diameter of the circle formed by the distance from the tip of each arm to the ring suction pad can be changed, and each arm can be pivotally fixed according to the outer diameter of the ring to be transported. . Therefore, even if the outer diameter of the ring is changed, the angle of each arm can be easily adjusted and the ring can be sucked by the ring suction pad at the tip of the arm for transport.

[0007]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic plan view of a ring carrier according to an embodiment of the present invention, and FIGS. 2 and 3 are schematic sectional views taken along the line AA of FIG. In the ring conveying device shown in the figure, for example, arms 2 are rotatably attached to the four sides of a disk-shaped support body 1 via fixing means 3, and the tips of the arms 2 are respectively attached. A ring suction pad 4 is provided.

The support body 1 is made of synthetic resin or light metal, and insertion holes 11 of a support shaft 31 of the fixing means 3 to be described later are formed in the four circumferential edges arranged in an orthogonal state, and the support body 1 is provided on the back surface side. The positioning recesses 12 of the arm 2 are concentrically formed around the insertion hole 11 at three positions with an angular interval of 45 degrees.

The arm 2 is a long member made of synthetic resin or light metal. One end of the arm 2 is connected and fixed to the supporting shaft 31 of the fixing means 3 as shown in FIG. A protrusion 21 is provided so as to be fitted into a positioning recess 12 formed on the back surface of 1. On the other hand, a ring suction pad 4 is attached below the tip of the arm and is connected to an external vacuum suction means or the like (not shown) so that the upper surface side of the ring 5 can be vacuum suctioned.

The fixing means 3 is composed of a threaded spindle 31 that is inserted into each insertion hole 11 of the support body 1, a nut 32 that is screwed together, and a knob 33 at the tip. The nut 32 screwed to the support shaft 31 is located on the support body 1, and the lower end of the support shaft 31 and one end of the arm 2 are fixed to each other, and the arm 2 moves up and down as the knob 33 moves up and down. Also, the arm 2 is rotatable by turning.

To fix the arm 2 by the fixing means 3, as shown in FIG. 2, the nut 32 is rotated to lower the support shaft 31 to slightly lower the arm 2 and then to the back surface of the support body 1. The protrusion 21 of the arm 2 is positioned in the positioning recessed portion 12 provided in the position, and the nut 32 is rotated to raise the knob 33. When the knob 33 is raised, as shown in FIG. 3, the protrusion 21 of the arm 2 is fitted into the corresponding desired positioning recess 12 and the arm 2 is fixed at a predetermined angle.

In this fixing means 3, since the positioning recesses 12 recessed in the support body 1 are provided in three concentric circles with the insertion hole 11 as the center, the arm 2 is angled about the support shaft 31. Can be fixed by changing in three directions. Therefore, when the arms 2 are positioned and fixed while being rotated about the support shaft 31 of the fixing means 3 as shown by the solid line in FIG. 4, an outer diameter smaller than the outer diameter D1 of the ring 5 shown by the chain line is shown. The ring 5a having the diameter D2 can be adsorbed and conveyed. Further, when each arm 2 is rotated to the position shown by the chain double-dashed line in FIG. 4 and positioned and fixed, the ring 5b having a smaller outer diameter D3 can be adsorbed and conveyed.

In the above embodiment, the fixing means 3 fixes the arm 2 at three positions so that the arm 2 can be adjusted to the outer diameter of the ring to be conveyed. The adjustment can be made finely, and the arm 2 can be rotated and fixed at an arbitrary angle.

[0015]

[Effect of the device]

 As is clear from the above description, in the ring transfer device of the present invention, each arm is rotatably arranged on the periphery of the support body through the fixing means, so that the ring suction pad can be adjusted depending on the fixed angle of each arm. Since the outer diameter of the circle formed by fluctuates, each arm can be pivotally fixed according to the outer diameter of the ring to be transported, and this one ring transport device can transport rings with various outer diameters. It has the effect of being possible.

[Brief description of drawings]

FIG. 1 is a schematic plan view of a ring carrier according to an embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view taken along the line AA in FIG. 1 showing the arm before being fixed.

FIG. 3 is a schematic cross-sectional view taken along the line AA of FIG. 1 showing an arm fixed state.

FIG. 4 is a schematic plan view showing a change in outer diameter of a ring that can be conveyed by rotating an arm.

FIG. 5 is a schematic plan view of a conventional ring transport device.

[Explanation of symbols]

 1 support body 2 arm 3 fixing means 4 ring suction pad 5 ring

Claims (1)

Claims for utility model registration: Claims: 1. A ring transfer device characterized in that an arm having a ring suction pad at its tip is rotatably provided on the peripheral edge of a support body through fixing means.