JPH0543642B2 - - Google Patents

Info

Publication number
JPH0543642B2
JPH0543642B2 JP61285536A JP28553686A JPH0543642B2 JP H0543642 B2 JPH0543642 B2 JP H0543642B2 JP 61285536 A JP61285536 A JP 61285536A JP 28553686 A JP28553686 A JP 28553686A JP H0543642 B2 JPH0543642 B2 JP H0543642B2
Authority
JP
Japan
Prior art keywords
carbon
present
energy
reactive gas
carbide gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61285536A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62171910A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP61285536A priority Critical patent/JPS62171910A/ja
Publication of JPS62171910A publication Critical patent/JPS62171910A/ja
Publication of JPH0543642B2 publication Critical patent/JPH0543642B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Inorganic Fibers (AREA)
JP61285536A 1986-11-29 1986-11-29 炭素 Granted JPS62171910A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61285536A JPS62171910A (ja) 1986-11-29 1986-11-29 炭素

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61285536A JPS62171910A (ja) 1986-11-29 1986-11-29 炭素

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56146929A Division JPS5849609A (ja) 1981-09-17 1981-09-17 炭素およびその作製方法

Publications (2)

Publication Number Publication Date
JPS62171910A JPS62171910A (ja) 1987-07-28
JPH0543642B2 true JPH0543642B2 (enrdf_load_stackoverflow) 1993-07-02

Family

ID=17692804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61285536A Granted JPS62171910A (ja) 1986-11-29 1986-11-29 炭素

Country Status (1)

Country Link
JP (1) JPS62171910A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS62171910A (ja) 1987-07-28

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