JPH054358B2 - - Google Patents
Info
- Publication number
- JPH054358B2 JPH054358B2 JP62156263A JP15626387A JPH054358B2 JP H054358 B2 JPH054358 B2 JP H054358B2 JP 62156263 A JP62156263 A JP 62156263A JP 15626387 A JP15626387 A JP 15626387A JP H054358 B2 JPH054358 B2 JP H054358B2
- Authority
- JP
- Japan
- Prior art keywords
- quartz crucible
- silicon
- single crystal
- upper edge
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010453 quartz Substances 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 10
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 15
- 229910052799 carbon Inorganic materials 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 239000013078 crystal Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 229910002090 carbon oxide Inorganic materials 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007770 graphite material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15626387A JPS63319288A (ja) | 1987-06-23 | 1987-06-23 | 鍔付石英るつぼ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15626387A JPS63319288A (ja) | 1987-06-23 | 1987-06-23 | 鍔付石英るつぼ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63319288A JPS63319288A (ja) | 1988-12-27 |
| JPH054358B2 true JPH054358B2 (zh) | 1993-01-19 |
Family
ID=15623981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15626387A Granted JPS63319288A (ja) | 1987-06-23 | 1987-06-23 | 鍔付石英るつぼ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63319288A (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0730693Y2 (ja) * | 1989-10-27 | 1995-07-12 | 三菱マテリアル株式会社 | シリコン単結晶引上げ用石英ルツボ |
| JPH04236153A (ja) * | 1991-01-11 | 1992-08-25 | Nippon Densan Corp | スピンドルモータ |
| JP2513641Y2 (ja) * | 1991-02-18 | 1996-10-09 | コマツ電子金属株式会社 | 半導体単結晶引上装置の黒鉛ルツボ |
| JP5289294B2 (ja) * | 2009-12-14 | 2013-09-11 | 株式会社Ｓｕｍｃｏ | シリコン単結晶引上げ用石英ルツボ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5537460A (en) * | 1978-09-07 | 1980-03-15 | Sanyo Electric Co Ltd | Structure of crucible |
| JPS5627244U (zh) * | 1979-08-07 | 1981-03-13 | ||
| JPS6228880B2 (zh) * | 1979-08-20 | 1987-06-23 | Toshiba Kk |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6228880U (zh) * | 1985-08-02 | 1987-02-21 |
-
1987
- 1987-06-23 JP JP15626387A patent/JPS63319288A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5537460A (en) * | 1978-09-07 | 1980-03-15 | Sanyo Electric Co Ltd | Structure of crucible |
| JPS5627244U (zh) * | 1979-08-07 | 1981-03-13 | ||
| JPS6228880B2 (zh) * | 1979-08-20 | 1987-06-23 | Toshiba Kk |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63319288A (ja) | 1988-12-27 |
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