JPH054358B2 - - Google Patents

Info

Publication number
JPH054358B2
JPH054358B2 JP62156263A JP15626387A JPH054358B2 JP H054358 B2 JPH054358 B2 JP H054358B2 JP 62156263 A JP62156263 A JP 62156263A JP 15626387 A JP15626387 A JP 15626387A JP H054358 B2 JPH054358 B2 JP H054358B2
Authority
JP
Japan
Prior art keywords
quartz crucible
silicon
single crystal
upper edge
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62156263A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63319288A (ja
Inventor
Hirotoshi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to JP15626387A priority Critical patent/JPS63319288A/ja
Publication of JPS63319288A publication Critical patent/JPS63319288A/ja
Publication of JPH054358B2 publication Critical patent/JPH054358B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP15626387A 1987-06-23 1987-06-23 鍔付石英るつぼ Granted JPS63319288A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15626387A JPS63319288A (ja) 1987-06-23 1987-06-23 鍔付石英るつぼ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15626387A JPS63319288A (ja) 1987-06-23 1987-06-23 鍔付石英るつぼ

Publications (2)

Publication Number Publication Date
JPS63319288A JPS63319288A (ja) 1988-12-27
JPH054358B2 true JPH054358B2 (en, 2012) 1993-01-19

Family

ID=15623981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15626387A Granted JPS63319288A (ja) 1987-06-23 1987-06-23 鍔付石英るつぼ

Country Status (1)

Country Link
JP (1) JPS63319288A (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730693Y2 (ja) * 1989-10-27 1995-07-12 三菱マテリアル株式会社 シリコン単結晶引上げ用石英ルツボ
JPH04236153A (ja) * 1991-01-11 1992-08-25 Nippon Densan Corp スピンドルモータ
JP2513641Y2 (ja) * 1991-02-18 1996-10-09 コマツ電子金属株式会社 半導体単結晶引上装置の黒鉛ルツボ
JP5289294B2 (ja) * 2009-12-14 2013-09-11 株式会社Ｓｕｍｃｏ シリコン単結晶引上げ用石英ルツボ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854114B2 (ja) * 1978-09-07 1983-12-02 三洋電機株式会社 ルツボの構造
JPS594125Y2 (ja) * 1979-08-07 1984-02-06 阪急鉄工株式会社 腕木取付装置
JPS6228880U (en, 2012) * 1985-08-02 1987-02-21

Also Published As

Publication number Publication date
JPS63319288A (ja) 1988-12-27

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