JPH0543422B2 - - Google Patents
Info
- Publication number
- JPH0543422B2 JPH0543422B2 JP61242893A JP24289386A JPH0543422B2 JP H0543422 B2 JPH0543422 B2 JP H0543422B2 JP 61242893 A JP61242893 A JP 61242893A JP 24289386 A JP24289386 A JP 24289386A JP H0543422 B2 JPH0543422 B2 JP H0543422B2
- Authority
- JP
- Japan
- Prior art keywords
- support
- ion exchange
- ion
- gas
- ion exchanger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Filtering Materials (AREA)
- Electrostatic Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61242893A JPS6397246A (ja) | 1986-10-15 | 1986-10-15 | 気体の清浄方法及びその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61242893A JPS6397246A (ja) | 1986-10-15 | 1986-10-15 | 気体の清浄方法及びその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6397246A JPS6397246A (ja) | 1988-04-27 |
| JPH0543422B2 true JPH0543422B2 (cs) | 1993-07-01 |
Family
ID=17095787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61242893A Granted JPS6397246A (ja) | 1986-10-15 | 1986-10-15 | 気体の清浄方法及びその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6397246A (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02142633U (cs) * | 1989-05-08 | 1990-12-04 | ||
| EP0672445B1 (en) * | 1992-12-02 | 1998-03-25 | Ebara Corporation | Method and apparatus for preventing contamination of substrate or substrate surface |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56118937A (en) * | 1980-02-18 | 1981-09-18 | Kanegafuchi Chemical Ind | Nonwoven fabric and molded body thereof |
| JPS57119719U (cs) * | 1981-01-14 | 1982-07-24 | ||
| JPS6079551U (ja) * | 1983-11-02 | 1985-06-03 | 株式会社日立製作所 | 空気清浄装置 |
| JPS62241519A (ja) * | 1986-04-10 | 1987-10-22 | Toray Ind Inc | フイルタ |
-
1986
- 1986-10-15 JP JP61242893A patent/JPS6397246A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6397246A (ja) | 1988-04-27 |
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