JPH0543422B2 - - Google Patents

Info

Publication number
JPH0543422B2
JPH0543422B2 JP24289386A JP24289386A JPH0543422B2 JP H0543422 B2 JPH0543422 B2 JP H0543422B2 JP 24289386 A JP24289386 A JP 24289386A JP 24289386 A JP24289386 A JP 24289386A JP H0543422 B2 JPH0543422 B2 JP H0543422B2
Authority
JP
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP24289386A
Other versions
JPS6397246A (en )
Inventor
Toshiaki Fujii
Original Assignee
Ebara Sogo Kenkyusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

JP24289386A 1986-10-15 1986-10-15 Expired - Lifetime JPH0543422B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24289386A JPH0543422B2 (en) 1986-10-15 1986-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24289386A JPH0543422B2 (en) 1986-10-15 1986-10-15

Publications (2)

Publication Number Publication Date
JPS6397246A true JPS6397246A (en) 1988-04-27
JPH0543422B2 true JPH0543422B2 (en) 1993-07-01

Family

ID=17095787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24289386A Expired - Lifetime JPH0543422B2 (en) 1986-10-15 1986-10-15

Country Status (1)

Country Link
JP (1) JPH0543422B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02142633U (en) * 1989-05-08 1990-12-04
EP0672445B1 (en) * 1992-12-02 1998-03-25 Ebara Corporation Method and apparatus for preventing contamination of substrate or substrate surface

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118937A (en) * 1980-02-18 1981-09-18 Kanegafuchi Chemical Ind Nonwoven fabric and molded body thereof
JPS62241519A (en) * 1986-04-10 1987-10-22 Toray Ind Inc Filter

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57119719U (en) * 1981-01-14 1982-07-24
JPS6079551U (en) * 1983-11-02 1985-06-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118937A (en) * 1980-02-18 1981-09-18 Kanegafuchi Chemical Ind Nonwoven fabric and molded body thereof
JPS62241519A (en) * 1986-04-10 1987-10-22 Toray Ind Inc Filter

Also Published As

Publication number Publication date Type
JPS6397246A (en) 1988-04-27 application
JP1831421C (en) grant

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