JPH0542977Y2 - - Google Patents
Info
- Publication number
- JPH0542977Y2 JPH0542977Y2 JP1985089623U JP8962385U JPH0542977Y2 JP H0542977 Y2 JPH0542977 Y2 JP H0542977Y2 JP 1985089623 U JP1985089623 U JP 1985089623U JP 8962385 U JP8962385 U JP 8962385U JP H0542977 Y2 JPH0542977 Y2 JP H0542977Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chuck
- receiving surface
- guide
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 210000000078 claw Anatomy 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 77
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000945 filler Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985089623U JPH0542977Y2 (fr) | 1985-06-14 | 1985-06-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985089623U JPH0542977Y2 (fr) | 1985-06-14 | 1985-06-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61206537U JPS61206537U (fr) | 1986-12-26 |
JPH0542977Y2 true JPH0542977Y2 (fr) | 1993-10-28 |
Family
ID=30643874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985089623U Expired - Lifetime JPH0542977Y2 (fr) | 1985-06-14 | 1985-06-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0542977Y2 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6298364B2 (ja) * | 2014-06-09 | 2018-03-20 | 株式会社ディスコ | 加工装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5338291Y2 (fr) * | 1973-08-14 | 1978-09-16 | ||
JPS6018310Y2 (ja) * | 1980-01-21 | 1985-06-03 | シ−ケ−デイ株式会社 | 半軟質シ−ト用保持装置 |
-
1985
- 1985-06-14 JP JP1985089623U patent/JPH0542977Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS61206537U (fr) | 1986-12-26 |
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