JPH0542608Y2 - - Google Patents
Info
- Publication number
- JPH0542608Y2 JPH0542608Y2 JP10132687U JP10132687U JPH0542608Y2 JP H0542608 Y2 JPH0542608 Y2 JP H0542608Y2 JP 10132687 U JP10132687 U JP 10132687U JP 10132687 U JP10132687 U JP 10132687U JP H0542608 Y2 JPH0542608 Y2 JP H0542608Y2
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- mass spectrometry
- jig
- insulating cone
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 16
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 16
- 229910052799 carbon Inorganic materials 0.000 claims description 14
- 238000001036 glow-discharge mass spectrometry Methods 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000010432 diamond Substances 0.000 claims description 5
- 229910003460 diamond Inorganic materials 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 19
- 238000004458 analytical method Methods 0.000 description 14
- 239000007789 gas Substances 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000011109 contamination Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004454 trace mineral analysis Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001793 charged compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10132687U JPH0542608Y2 (enrdf_load_html_response) | 1987-03-04 | 1987-06-29 | |
| US07/213,199 US4918307A (en) | 1987-06-29 | 1988-06-29 | Sample holder for glow discharge mass spectrometer |
| CA000570744A CA1299775C (en) | 1987-06-29 | 1988-06-29 | Sample holder for glow discharge mass spectrometer |
| DE3889777T DE3889777T2 (de) | 1987-06-29 | 1988-06-29 | Probenhalter für Glimmentladungs-Massenspektrometer. |
| EP88110387A EP0297548B1 (en) | 1987-06-29 | 1988-06-29 | Sample holder for glow discharge mass spectrometer |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3151387 | 1987-03-04 | ||
| JP10132687U JPH0542608Y2 (enrdf_load_html_response) | 1987-03-04 | 1987-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6438756U JPS6438756U (enrdf_load_html_response) | 1989-03-08 |
| JPH0542608Y2 true JPH0542608Y2 (enrdf_load_html_response) | 1993-10-27 |
Family
ID=31717670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10132687U Expired - Lifetime JPH0542608Y2 (enrdf_load_html_response) | 1987-03-04 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542608Y2 (enrdf_load_html_response) |
-
1987
- 1987-06-29 JP JP10132687U patent/JPH0542608Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6438756U (enrdf_load_html_response) | 1989-03-08 |
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