JPH0542481B2 - - Google Patents
Info
- Publication number
- JPH0542481B2 JPH0542481B2 JP59048328A JP4832884A JPH0542481B2 JP H0542481 B2 JPH0542481 B2 JP H0542481B2 JP 59048328 A JP59048328 A JP 59048328A JP 4832884 A JP4832884 A JP 4832884A JP H0542481 B2 JPH0542481 B2 JP H0542481B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- furnace
- hearth
- hollow passage
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 22
- 239000011261 inert gas Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 description 5
- 238000009413 insulation Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- -1 quenching Chemical class 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、焼入、焼戻、ろう付、焼結等の金属
の熱処理を行う真空熱処理炉に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a vacuum heat treatment furnace for heat treating metals such as quenching, tempering, brazing, and sintering.
真空下特に高温域真空下においては処理品の蒸
発を防止する為、不活性ガス（N2又はＡ）のパ
ーシヤルガス（分圧ガス）を導入し、又は熱処理
中主として処理品から処理品に有害なガスが出る
が、このガスを真空排気と同時に炉内へ処理品に
有害でない不活性ガスを炉内に導入し置換効果を
促進することがある。
In order to prevent evaporation of the processed product under vacuum, especially in high-temperature vacuum, partial gas (partial pressure gas) of inert gas (N 2 or A) is introduced, or during heat treatment, a gas that is harmful to the processed product is mainly removed from the processed product. Gas is emitted, but when this gas is evacuated, an inert gas that is not harmful to the processed product may be introduced into the furnace to promote the replacement effect.
従来炉内に不活性ガスを導入する方式としては
第１図に示す様なものがある。 As a conventional method for introducing inert gas into a furnace, there is a method as shown in FIG.
先ず炉構造について略述する。 First, the furnace structure will be briefly described.
炉体鉄皮１内に断熱壁２が設けられ、断熱壁２
の内面に沿つてヒータ３が設けられて炉床４に載
置される処理物５を加熱する様になつている。 A heat insulating wall 2 is provided within the furnace shell 1, and the heat insulating wall 2
A heater 3 is provided along the inner surface of the hearth 4 to heat the object 5 placed on the hearth 4 .
尚、６は上部ドア、７は下部ドアを示す。 Note that 6 indicates an upper door and 7 indicates a lower door.
不活性ガスの供給口８は鉄皮に設けられ、該供
給口８より不活性ガス９が送給される。送給され
たガスは各ドアの開口部の隙間より断熱壁２内部
に流込み、一部は排気筒１０から排出される。然
し、内部は高温に加熱されているので、内部のガ
ス温度が高く、断熱壁２の外部の温度がかなり低
い。従つて、断熱壁２の内外間のガスの流れは殆
どなく、断熱壁内部のガスの置換は期待できな
い。 An inert gas supply port 8 is provided in the iron shell, and an inert gas 9 is supplied from the supply port 8. The supplied gas flows into the inside of the heat insulating wall 2 through the gaps between the openings of each door, and a portion is exhausted from the exhaust stack 10. However, since the inside is heated to a high temperature, the gas temperature inside is high and the temperature outside the heat insulating wall 2 is quite low. Therefore, there is almost no gas flow between the inside and outside of the heat insulating wall 2, and replacement of gas inside the heat insulating wall cannot be expected.
前記したように断熱壁内部で処理物、炉床、断
熱材が高温に加熱されるに従い、これから多量の
ガス放出が起きる。この放出されたガスが処理物
を汚染し処理物の表面に生成物を作り、処理物の
表面処理作業が必要となる。 As described above, as the processed material, hearth, and insulation material are heated to a high temperature inside the heat insulating wall, a large amount of gas is released. This released gas contaminates the object to be treated and creates products on the surface of the object, necessitating surface treatment of the object.
断熱壁内部のガスの置換を効果的に行う為、不
活性ガスの送給管を断熱壁内部に迄導き、不活性
ガスを直接断熱壁の内部に送給することも考えら
れるが、真空炉では要求される温度誤差が±３℃
という厳しさの為、冷い不活性ガスを直接内部に
送給することは問題がある。 In order to effectively replace the gas inside the insulation wall, it is possible to lead an inert gas supply pipe inside the insulation wall and feed the inert gas directly to the inside of the insulation wall. Then the required temperature error is ±3℃
Due to these strict conditions, it is problematic to directly feed cold inert gas into the interior.
本発明は、上記実情に鑑みてなしたものであつ
て、断熱壁内部即ち炉中心部へ直接送給してガス
の置換が効果的に行われる様にすると共にガスの
送給により温度分布の均一性が損われることがな
い様にした真空熱処理炉を提供することを目的と
するものである。
The present invention has been made in view of the above-mentioned circumstances, and is designed to effectively replace gas by directly feeding the inside of the heat insulating wall, that is, to the center of the furnace, and to improve the temperature distribution by feeding the gas. The object of the present invention is to provide a vacuum heat treatment furnace in which uniformity is not impaired.
本発明は、炉床を構成する炉床ビーム内に中空
路を形成すると共に、前記炉床ビームの側面に前
記中空路に連通する給気孔を所要数穿設し、不活
性ガスを供給するガス導入管を炉外部より導いて
前記中空路に接続し、前記炉床ビーム側面の給気
孔より不活性ガスを炉中心部へ直接送給し、ガス
の置換を効果的に行うと共に温度分布の均一性を
保持する様にしたものである。
In the present invention, a hollow passage is formed in a hearth beam constituting a hearth, and a required number of air supply holes communicating with the hollow passage are bored on a side surface of the hearth beam, and an inert gas is supplied. An inlet pipe is led from outside the furnace and connected to the hollow passage, and inert gas is directly delivered to the center of the furnace from the air supply hole on the side of the hearth beam, thereby effectively replacing the gas and achieving uniform temperature distribution. It is designed to maintain its gender.
以下図面を参照しつつ本発明の実施例を説明す
る。
Embodiments of the present invention will be described below with reference to the drawings.
第２図は真空熱処理炉の要部を示すものであ
り、第２図中第１図で示したものと同一のものに
は同符号を付してある。 FIG. 2 shows the main parts of the vacuum heat treatment furnace, and the same parts in FIG. 2 as those shown in FIG. 1 are given the same reference numerals.
炉床４を構成する炉床ビーム１１に中立軸（曲
げ変形に対する中立軸）と合致する中空路１２を
形成し、中空路の両端は閉塞する。又、炉床ビー
ム１１の側面には給気孔１３を所要数穿設し、給
気孔１３と中空路１２とを連通させる。 A hollow passage 12 that coincides with the neutral axis (neutral axis with respect to bending deformation) is formed in the hearth beam 11 constituting the hearth 4, and both ends of the hollow passage are closed. Further, a required number of air supply holes 13 are bored in the side surface of the hearth beam 11, and the air supply holes 13 and the hollow passage 12 are communicated with each other.
断熱壁２で囲繞される炉中心部には、炉外部よ
り導かれたガス導入管１４が断熱壁２を貫通して
到達しており、その先端は分岐管１５を介して前
記中空路１２に接続されている。 A gas introduction pipe 14 led from outside the furnace passes through the heat insulating wall 2 and reaches the center of the furnace surrounded by the heat insulating wall 2, and its tip is connected to the hollow passage 12 via a branch pipe 15. It is connected.
而して、外部の不活性ガス源よりガス導入管１
４を通して不活性ガスを送給すれば図示の如く給
気孔１３から炉中心部に不活性ガスが給気され
る。 Therefore, the gas introduction pipe 1 is connected from an external inert gas source.
4, the inert gas is supplied to the center of the furnace from the air supply hole 13 as shown in the figure.
ここで、炉床ビーム１１はヒータ３により充分
加熱されており、送給された不活性ガスは中空路
１２を通過する過程で予熱される。従つて、炉中
心部に流入した不活性ガスが炉内の温度分布の均
一性を損うことはない。又、炉中心部より流入す
るのでガスの置換作用は極めてよい。 Here, the hearth beam 11 is sufficiently heated by the heater 3, and the supplied inert gas is preheated in the process of passing through the hollow passage 12. Therefore, the inert gas flowing into the center of the furnace does not impair the uniformity of temperature distribution within the furnace. Also, since the gas flows in from the center of the furnace, the gas replacement effect is extremely good.
更に、前記した如く中空路１２は炉床ビーム１
１の中立軸に合致させて設けているので、強度的
に殆ど影響がなく、中空路１２を形成した為に部
材が著しく大きくなるということはない。尚、強
度的に十分余裕がある場合、中空路は特に中空軸
と合致させなくてもよい。 Further, as described above, the hollow passage 12 is connected to the hearth beam 1.
Since the hollow passage 12 is provided so as to coincide with the neutral axis of the hollow passage 12, it has almost no effect on the strength, and the formation of the hollow passage 12 does not significantly increase the size of the member. Note that, if there is sufficient strength, the hollow passage does not need to be aligned with the hollow shaft.
尚、本発明は上記実施例に限定されるものでは
なく、本発明の要旨を逸脱しない範囲内において
種々変更を加え得ることは勿論である。 It should be noted that the present invention is not limited to the above embodiments, and it goes without saying that various changes can be made without departing from the gist of the present invention.
以上述べた如く本発明によれば以下の優れた効
果を発揮し得る。
As described above, according to the present invention, the following excellent effects can be exhibited.
(i) 炉内温度分布の均一化が図れる。(i) Uniform temperature distribution in the furnace can be achieved.
(ii) 発生する有害ガスを効果的に置換し得る。(ii) Emitted harmful gases can be effectively replaced.
(iii) 処理物の品質が向上すると共に不活性ガス消
費量が軽減する。(iii) The quality of processed materials is improved and inert gas consumption is reduced.
第１図は従来の熱処理炉の概略説明図、第２図
は本発明の一実施例の要部斜視図である。
２は断熱壁、３はヒータ、４は炉床、９は不活
性ガス、１１は炉床ビーム、１２は中空路、１３
は給気孔、１４はガス導入管を示す。
FIG. 1 is a schematic explanatory diagram of a conventional heat treatment furnace, and FIG. 2 is a perspective view of essential parts of an embodiment of the present invention. 2 is a heat insulating wall, 3 is a heater, 4 is a hearth, 9 is an inert gas, 11 is a hearth beam, 12 is a hollow passage, 13
14 indicates an air supply hole, and 14 indicates a gas introduction pipe.
Claims (1)
すると共に、前記炉床ビームの側面に前記中空路
に連通する給気孔を所要数穿設し、不活性ガスを
供給するガス導入管を炉外部より導いて前記中空
路に接続したことを特徴とする真空熱処理炉。1. A hollow passage is formed in the hearth beam constituting the hearth, and a required number of air supply holes communicating with the hollow passage are bored on the side surface of the hearth beam, and a gas introduction pipe for supplying inert gas is provided. A vacuum heat treatment furnace characterized in that the furnace is led from outside and connected to the hollow passage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4832884A JPS60194013A (en) | 1984-03-14 | 1984-03-14 | Heat treating furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4832884A JPS60194013A (en) | 1984-03-14 | 1984-03-14 | Heat treating furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60194013A JPS60194013A (en) | 1985-10-02 |
| JPH0542481B2 true JPH0542481B2 (en) | 1993-06-28 |
Family
ID=12800347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4832884A Granted JPS60194013A (en) | 1984-03-14 | 1984-03-14 | Heat treating furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60194013A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0730390B2 (en) * | 1987-11-20 | 1995-04-05 | 川崎製鉄株式会社 | Vertical induction heating device |
| JP4878950B2 (en) * | 2006-07-28 | 2012-02-15 | 旭化成ホームズ株式会社 | Airtight insulation structure of beams |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5213287U (en) * | 1975-07-14 | 1977-01-29 | ||
| JPS56146819A (en) * | 1980-04-16 | 1981-11-14 | Nippon Steel Corp | Heat treatment furnace |
| JPS6133517U (en) * | 1984-07-30 | 1986-02-28 | 日本電気ホームエレクトロニクス株式会社 | Muting circuit |
-
1984
- 1984-03-14 JP JP4832884A patent/JPS60194013A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5213287U (en) * | 1975-07-14 | 1977-01-29 | ||
| JPS56146819A (en) * | 1980-04-16 | 1981-11-14 | Nippon Steel Corp | Heat treatment furnace |
| JPS6133517U (en) * | 1984-07-30 | 1986-02-28 | 日本電気ホームエレクトロニクス株式会社 | Muting circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60194013A (en) | 1985-10-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2590182B2 (en) | Blackening furnace and method of manufacturing shadow mask using this blackening furnace | |
| JPH0542481B2 (en) | ||
| KR960016161B1 (en) | Process & device for the disposal of dust in a cupola by combustion/slag production | |
| JPS59500063A (en) | Preheating furnace for long materials | |
| JP2586480B2 (en) | Vacuum heat treatment furnace | |
| JPS61247624A (en) | Raw material batch heat treatment equipment for glass manufacture | |
| US3279774A (en) | Annealing furnace | |
| JP2022042560A (en) | Heat treatment furnace and method for producing inorganic material using heat treatment furnace | |
| CA1080774A (en) | Glass furnace | |
| JP2002294521A (en) | Carbonization oven | |
| JPS63266019A (en) | Method of non-oxidizing induction heat treatment for metal material | |
| JP3839910B2 (en) | Copper product heat treatment equipment | |
| JPH07270079A (en) | Belt type continuous heat treating furnace | |
| JPH10227572A (en) | Heat treatment furnace | |
| JPH06257949A (en) | Atmosphere supply to continuous furnace | |
| JPH03116929A (en) | Heat treatment device for semiconductor substrate | |
| JPH0763059B2 (en) | Semiconductor manufacturing equipment | |
| JPS61268025A (en) | Heat treatment device for wafer | |
| JP2725008B2 (en) | Vacuum heat treatment furnace | |
| KR100390880B1 (en) | Cavity of heat treatment apparatus | |
| JP3379136B2 (en) | Furnace cooling structure in continuous furnace | |
| JPS63299230A (en) | Heat treatment furnace | |
| JP3085080B2 (en) | Gas supply nozzle for furnace atmosphere adjustment | |
| JPS60152615A (en) | Supporting member in industrial furnace | |
| JPH01158737A (en) | Heat treatment furnace |