JPH01158737A - Heat treatment furnace - Google Patents
Heat treatment furnaceInfo
- Publication number
- JPH01158737A JPH01158737A JP31612587A JP31612587A JPH01158737A JP H01158737 A JPH01158737 A JP H01158737A JP 31612587 A JP31612587 A JP 31612587A JP 31612587 A JP31612587 A JP 31612587A JP H01158737 A JPH01158737 A JP H01158737A
- Authority
- JP
- Japan
- Prior art keywords
- blanket
- furnace
- mold
- temperature
- electric heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims description 7
- 238000001816 cooling Methods 0.000 claims abstract description 22
- 229910000859 α-Fe Inorganic materials 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 3
- 210000002268 wool Anatomy 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 5
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 12
- 238000002791 soaking Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000009413 insulation Methods 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000007665 sagging Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910017060 Fe Cr Inorganic materials 0.000 description 1
- 229910002544 Fe-Cr Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000012494 Quartz wool Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 210000003734 kidney Anatomy 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Abstract
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、熱処理炉に関する。[Detailed description of the invention] Industrial applications The present invention relates to a heat treatment furnace.
従来の技術
半導体ウェハー、たとえば、シリコンウェハーに酸化膜
を形成するために、一般には電気ヒータを利用した処理
炉が用いられる。このｉ理炉は、基本的には、耐熱金属
材からなる外筒内に、石英等からなる内筒即ち炉芯管を
配し、この炉芯管の外周部に均熱管と電気ヒータとを配
し、又、外筒の内壁には適当な厚さのセラミックウール
等の断熱層を張設する構成を有す。BACKGROUND OF THE INVENTION In order to form an oxide film on a semiconductor wafer, such as a silicon wafer, a processing furnace utilizing an electric heater is generally used. Basically, this i metal furnace has an inner cylinder made of quartz or the like, that is, a furnace core tube, placed inside an outer cylinder made of a heat-resistant metal material, and a soaking tube and an electric heater are installed around the outer periphery of the furnace core tube. Furthermore, the inner wall of the outer cylinder is provided with a heat insulating layer such as ceramic wool of an appropriate thickness.
一方、シリコンウェハー等の酸化膜の生成は、処理時間
、温度及び圧力に関係するので、これらの要素の制御に
は、充分な注意が払われる。温度について云えば、酸化
膜の生長率を考慮して、炉内温度を１０００〜１２００
°Ｃに保ってウェハーを処理し、処理済ウェハーを炉外
に取出す時には、約７００″Ｃに均一に腎温させて、次
に炉内へ搬入されるウェハーへの拡散処理に悪影響を与
えないように制御している。即ち、３００〜５００°Ｃ
位の温度範囲で、昇温・降温を短時間に繰り返し行なう
必要性から、炉内温度の急速な昇温・降温が望まれてい
る。On the other hand, since the formation of oxide films on silicon wafers and the like is related to processing time, temperature, and pressure, sufficient attention must be paid to controlling these factors. Regarding the temperature, considering the growth rate of the oxide film, the temperature inside the furnace is set at 1000 to 1200.
Wafers are processed while being maintained at °C, and when the processed wafers are taken out of the furnace, the kidney temperature is uniformly maintained at approximately 700"C, so as not to adversely affect the diffusion process on the next wafer carried into the furnace. The temperature is controlled at 300-500°C.
Because of the need to repeatedly raise and lower the temperature within a short period of time within a temperature range of about 100 lbs., rapid heating and cooling of the furnace temperature is desired.
このような要望を満たすため、高温タイプの電気ヒータ
を炉芯管まわりに配し、さらに、電気ヒータの外周側の
断熱層内に、保温促進用或いは冷却促進用のガスを供給
することが成される。この−例が、特開昭５９−１７６
５８６号公報に開示される。In order to meet these demands, we have succeeded in arranging a high-temperature electric heater around the furnace core tube and supplying gas to promote heat retention or cooling within the heat insulating layer on the outer periphery of the electric heater. be done. An example of this is JP-A-59-176
It is disclosed in Japanese Patent No. 586.
本発明が解決しようとする問題点
前述した如き従来技術では、保温促進用の熱伝導率の小
さいガス及び冷却促進用の熱伝導率の大きいガスを、ウ
ェハー処理及び搬入・搬出時に合わせて、断熱層内で入
力換えする必要がある。しかしながら、実際には、たと
えば、炉内温度の降温中にも拘らず、断熱層内に保温促
進用のガスの一部が残り、降温に時間を多く必要とする
。このため、作業効率が悪い。又、炉の全長に亘り均一
な降温速度が得られ難く、製品の均一性が損われる難が
ある。Problems to be Solved by the Present Invention In the prior art as described above, a gas with a low thermal conductivity for promoting heat retention and a gas with a high thermal conductivity for promoting cooling are used for heat insulation during wafer processing and loading/unloading. It is necessary to change the input within the layer. However, in reality, for example, even though the temperature inside the furnace is being lowered, a portion of the gas for promoting heat retention remains in the heat insulating layer, and it takes a long time to lower the temperature. For this reason, work efficiency is poor. Furthermore, it is difficult to obtain a uniform temperature reduction rate over the entire length of the furnace, which may impair the uniformity of the product.
それ故に、本発明は、新規な炉構造を提供することで、
前述した従来技術の不具合を解消することを、解決すべ
き課題とする。Therefore, the present invention provides a novel furnace structure that
The problem to be solved is to eliminate the problems of the prior art described above.
問題点を解決するための手段
本発明は、前述した問題点を解決するために、基本的に
は、セパレータに支持されたフェライト系の電気ヒータ
に吊りピンを係合させ、この吊りピンの先端をモールド
の外周面に沿わせて延在させ、さらに、モールドの長手
方向は＼中央外側に位置するブランケット内に空気室を
配し、この空気室の側壁の孔より冷却空気をブランケッ
ト内に供給する技術的手段を用いる。Means for Solving the Problems In order to solve the above-mentioned problems, the present invention basically involves engaging a hanging pin with a ferrite electric heater supported by a separator, and extends along the outer peripheral surface of the mold, and furthermore, an air chamber is arranged inside the blanket located outside the center in the longitudinal direction of the mold, and cooling air is supplied into the blanket through holes in the side wall of this air chamber. use technical means to
作用
吊りピンは、電気ヒータの予熱及びその周辺の高温を外
筒側へと伝熱し、降温を容易にさせると共に、高温強度
の弱いフェライト系電気ヒータのダレを防止し、ヒータ
の破線を未然に防ぐ。さらに、空気室からブランケット
内に供給された冷却空気は、断熱層内を流通する間に該
断熱層を冷却する。The working suspension pin preheats the electric heater and transfers the high temperature around it to the outer cylinder side, making it easier to lower the temperature, and also prevents the ferrite electric heater, which has weak high temperature strength, from sagging, and prevents the broken line of the heater from forming. prevent. Furthermore, the cooling air supplied into the blanket from the air chamber cools the insulation layer while flowing within the insulation layer.
本発明では、断熱層の内層を構成するモールドの外側表
面に、電気ヒータに接触してこれを吊る吊りピンの端部
が露出している。In the present invention, the ends of the hanging pins that come into contact with and suspend the electric heater are exposed on the outer surface of the mold that constitutes the inner layer of the heat insulating layer.
それ故、吊りピンを介して炉内の熱がモールドの外に容
易に放散され、炉内温度の急速な降温を可能にする。炉
内を加熱中は、冷却空気の供給は中断される。この時、
空気室に残された空気は、ヒータの熱によって熱せられ
、断熱層の一部を形成することになって、昇温の妨げと
ならない。Therefore, the heat inside the furnace is easily dissipated to the outside of the mold via the hanging pins, making it possible to rapidly lower the temperature inside the furnace. While the furnace is being heated, the supply of cooling air is interrupted. At this time,
The air left in the air chamber is heated by the heat of the heater, forms part of the heat insulating layer, and does not interfere with temperature rise.
実施例
熱処理炉（１）は、耐熱金属材からなる外筒（２）を有
す。この外筒（２）はその長手方向を横にして配され、
この外筒（２）の内壁面−面には、セラミックウールか
らなる通気性を有するブランケット（３）が張られる。An example heat treatment furnace (1) has an outer cylinder (2) made of a heat-resistant metal material. This outer cylinder (2) is arranged with its longitudinal direction horizontal,
An air permeable blanket (3) made of ceramic wool is placed on the inner wall surface of the outer cylinder (2).
このブランケット（３）の内側には、セラミックスファ
イバーをバインダーで固着して一体成形した固形物から
なる円筒状のモールド（４）を配す。若干の通気性を有
するこのモールド（４）の内壁面には、半径方向内方に
開口する複数個の離間した溝（５）が長手方向に延在す
るよう設けられ、これらの溝（５）に、絶縁性のアルミ
ナよりなるセパレータ（６）を嵌挿する。セパレータ（
６）は、第２図に示すように、対向する側壁が約１５度
傾斜するようにして形成されている溝（７）を有し、こ
の溝（７）に螺旋状に巻いたフェライト系の電気ヒータ
（８）を挿入し、セパレータ（６）に電気ヒータ（８）
を保持させる。電気ヒータ（８）としては、Ｆｅ−Ｃｒ
−Ａｊ２系のパイロマックスＰＸＤＳ材（商品名）が好
ましい。Inside this blanket (3), a cylindrical mold (4) made of a solid material formed by integrally molding ceramic fibers fixed with a binder is placed. The inner wall surface of this slightly breathable mold (4) is provided with a plurality of longitudinally extending spaced apart grooves (5) opening radially inwardly. A separator (6) made of insulating alumina is inserted into the spacer. Separator (
6) has a groove (7) formed in such a way that the opposing side walls are inclined at an angle of about 15 degrees, and a ferrite-based material is spirally wound around this groove (7). Insert the electric heater (8) into the separator (6).
to hold. As the electric heater (8), Fe-Cr
-Aj2-based Pyromax PXDS material (trade name) is preferred.
電気ヒータ（８）の適所に吊りピン（９）を係合させる
。吊りピン（９）は熱伝導性の良い材料で作られ、略Ｕ
字状をなし、Ｕ字部の底で電気ヒータ（８）に係合させ
、ヒータ（８）を吊るようにする。吊りピン（９）の先
端を、モールド（４）の外周面に沿わせて延在させ、セ
パレータ（６）と共に電気ヒータ（８）を吊りピン（９
）と共に保持する。吊りピン（９）は、高温強度の弱い
フェライト系の電気ヒータ（８）の高温時のダレを未然
に防止し、又、ヒータの熱を外部方向に放熱する働きを
する。Engage the hanging pin (9) in the appropriate position of the electric heater (8). The hanging pin (9) is made of a material with good thermal conductivity and is approximately U
It is shaped like a letter U, and the bottom of the U-shaped portion engages with the electric heater (8) so that the heater (8) is suspended. The tip of the hanging pin (9) is extended along the outer peripheral surface of the mold (4), and the electric heater (8) is attached to the hanging pin (9) together with the separator (6).
). The hanging pin (9) serves to prevent the ferrite-based electric heater (8), which has low high-temperature strength, from sagging at high temperatures, and also serves to radiate heat from the heater to the outside.
螺旋状に巻回された電気ヒータ（８）の内側に均熱管（
１０）と炉芯管（１１）とを配す。均熱管（１０）は、
電気ヒータ（８）の発熱エネルギーを受けて、炉芯管（
１１）を均一に加熱する作用をし、シリコンカーバイト
系の材料で成形される。炉芯管（１１）は石英からなり
、別名反応管とも称せられ、この内部にうエバーが配さ
れる。A heat soaking tube (
10) and a furnace core tube (11). The soaking tube (10) is
The furnace core tube (
11) and is molded from silicon carbide material. The furnace core tube (11) is made of quartz, is also called a reaction tube, and has a hollow inside.
炉芯管には、ウェハーの搬入・搬出するための開口にキ
ャップ（図示なし）、及びその内部に酸素や水素の如き
反応ガスを供給・排出するためのいくつかのボート（図
示なし）が設けられる。The furnace core tube is provided with a cap (not shown) at the opening for loading and unloading wafers, and several boats (not shown) for supplying and discharging reactive gases such as oxygen and hydrogen. It will be done.
（１２）はヒートシール、（１３）は炉口スリーブを示
す。(12) shows the heat seal, and (13) shows the furnace opening sleeve.
モールド（４）の長手方向のはヌ中央部の外側に位置す
るブランケット内に、断面矩形の半円形の空気室（１４
）を埋込む。この空気室（１４）の側壁には多数の孔（
１５）が穿設され、中央ボー１〜（１６）から室内に供
給された冷却空気は、孔（１５）を介してブランケット
（３）及びモールド（１４）内に供給され、断熱層を冷
却すると共に吊りピン（９）を介して炉内を冷却し、炉
芯管（１１）内の急速な冷却を可能にする。第４図に示
す如く、炉体が長い時には前記空気室とは別にブランケ
ット（３）内に補助空気導入用のパイプ（１７）を周方
向に埋込み、これに冷却空気を送り、パイプ（１７）の
小孔より冷却空気をブランケット（３）内に供給し、断
熱層の−様な冷却を可能にする。パイプ（１７）には図
示しないボートを付設する。外筒（１）の適所に空気排
出孔（１８）を上向きに複数個穿ける。A semicircular air chamber (14) with a rectangular cross section is located in the blanket located outside the central part of the mold (4) in the longitudinal direction.
). The side wall of this air chamber (14) has many holes (
15) are bored, and the cooling air supplied into the room from the central bows 1 to (16) is supplied through the holes (15) into the blanket (3) and the mold (14) to cool the heat insulating layer. At the same time, the inside of the furnace is cooled through the hanging pin (9), thereby enabling rapid cooling of the inside of the furnace core tube (11). As shown in Fig. 4, when the furnace body is long, a pipe (17) for introducing auxiliary air is embedded in the blanket (3) in the circumferential direction separately from the air chamber, and cooling air is sent to the pipe (17). Cooling air is supplied into the blanket (3) through the small holes to enable cooling of the heat insulating layer. A boat (not shown) is attached to the pipe (17). A plurality of air exhaust holes (18) can be bored upward at appropriate locations in the outer cylinder (1).
炉内温度を１０００〜１２００°Ｃに保ってウェハー処
理した後、冷却空気を室（１４）に供給して、ブランケ
ット（３）、モールド（４）及び吊りピン（９）を冷却
して放熱し、炉内温度を約７００°Ｃに降温させる。こ
の温度下で、処理済ウェハーの搬出並びに未処理ウェハ
ーの炉内への搬入を行なう。未処理ウェハーを炉内へ搬
入後、冷却空気の室（１４）への供給を中断し、空気の
断熱層を作る。次いで、電気ヒータ（８）に通電し、電
気ヒータ（８）を発熱させて均熱管（１０）を加熱する
。均熱管（１０）の輻射熱で炉芯管（１１）を加熱し、
炉芯管（１１）内を１０００〜１２００°Ｃに昇温させ
る。勿論、このウエノ＼−の拡散処理中、外筒（２）及
び炉芯管（１１）のキャップを閉めてそれらの内部を外
部から遮断する。After processing wafers while maintaining the furnace temperature at 1000 to 1200°C, cooling air is supplied to the chamber (14) to cool the blanket (3), mold (4), and hanging pins (9) to radiate heat. , the temperature inside the furnace is lowered to about 700°C. Under this temperature, processed wafers are carried out and unprocessed wafers are carried into the furnace. After carrying the unprocessed wafer into the furnace, the supply of cooling air to the chamber (14) is interrupted to create a heat insulating layer of air. Next, the electric heater (8) is energized to generate heat and heat the soaking tube (10). Heating the furnace core tube (11) with the radiant heat of the soaking tube (10),
The temperature inside the furnace core tube (11) is raised to 1000 to 1200°C. Of course, during this Ueno diffusion process, the caps of the outer cylinder (2) and the furnace core tube (11) are closed to shut off their interiors from the outside.
均熱管（１０）は、電気ヒータ（８）に対して直交する
ようにその長手方向に延在するパイプ（１９）で支え、
さらに、その両端で石英ウールの断熱材（２０）を介し
てスリーブ（２１）に保持される。The soaking tube (10) is supported by a pipe (19) extending in the longitudinal direction perpendicularly to the electric heater (8),
Furthermore, it is held in a sleeve (21) via a quartz wool insulation material (20) at both ends thereof.
効果
本発明は、吊りピンと冷却室とを採用しているので、象
、速な降温が可能となり、作業効率を高め得る。又、冷
却室は炉の中央部に周方向に設けられているので、炉内
の−様な降温を可能とし、均一な熱処理がなされる。Effects Since the present invention employs hanging pins and a cooling chamber, it is possible to lower the temperature quickly and improve work efficiency. Further, since the cooling chamber is provided in the circumferential direction in the center of the furnace, it is possible to lower the temperature in the furnace in a uniform manner, and uniform heat treatment can be performed.
第１図は本発明の一例の縦断面図、第２図は第１図の矢
視■−■よりみた横断面図、第３図は冷却室の斜視図、
第４図はブランケットの平面図、第５図は吊りピンを示
す部分拡大図である。
図中：２・・・外筒、３・・・ブランケット、４・・・
モールド、６・・・セパレータ、訃・・電気ヒータ、９
・・・吊りピン、１４・・・冷却室、１７・・・パイプ
。FIG. 1 is a longitudinal cross-sectional view of an example of the present invention, FIG. 2 is a cross-sectional view taken from the arrow direction ■-■ in FIG. 1, and FIG. 3 is a perspective view of the cooling chamber.
FIG. 4 is a plan view of the blanket, and FIG. 5 is a partially enlarged view showing the hanging pins. In the diagram: 2...outer cylinder, 3...blanket, 4...
Mold, 6...Separator, Death...Electric heater, 9
...Hanging pin, 14...Cooling chamber, 17...Pipe.
Claims (1)
ランケット、このブランケットの内側に配したセラミッ
クウールからなるモールド、該モールドの内壁に離間し
て形成された溝に嵌合させられたセパレータ、このセパ
レータに対して螺旋状に巻かれたフェライト系の電気ヒ
ータ、電気ヒータに係合し且つその先端がモールドの外
周面に沿って延びた部分を有する複数個の吊りピン、モ
ールドの長手方向のほゞ中央部外側に位置するブランケ
ット内に周方向に埋込まれ空気室とを有し、該空気室に
供給された冷却空気が空気室の側壁の孔を介してブラン
ケット及びモールド内に流入可能としたことを特徴とす
る熱処理炉。An outer cylinder made of a heat-resistant metal material, a blanket stretched over the inner wall of the outer cylinder, a mold made of ceramic wool placed inside the blanket, and fitted into grooves formed at intervals on the inner wall of the mold. A separator, a ferrite electric heater spirally wound around the separator, a plurality of hanging pins that engage with the electric heater and whose tips extend along the outer circumferential surface of the mold, and a longitudinal axis of the mold. It has an air chamber embedded in the circumferential direction within the blanket located at the outer center of the direction, and the cooling air supplied to the air chamber flows into the blanket and mold through the hole in the side wall of the air chamber. A heat treatment furnace characterized by being able to flow into the furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31612587A JP2590351B2 (en) | 1987-12-16 | 1987-12-16 | Heat treatment furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31612587A JP2590351B2 (en) | 1987-12-16 | 1987-12-16 | Heat treatment furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01158737A true JPH01158737A (en) | 1989-06-21 |
| JP2590351B2 JP2590351B2 (en) | 1997-03-12 |
Family
ID=18073527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31612587A Expired - Lifetime JP2590351B2 (en) | 1987-12-16 | 1987-12-16 | Heat treatment furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2590351B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03278522A (en) * | 1990-03-28 | 1991-12-10 | Nec Corp | Diffusion treatment apparatus |
| JP2013004904A (en) * | 2011-06-21 | 2013-01-07 | Nichias Corp | Heat treatment furnace and heat treatment apparatus |
-
1987
- 1987-12-16 JP JP31612587A patent/JP2590351B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03278522A (en) * | 1990-03-28 | 1991-12-10 | Nec Corp | Diffusion treatment apparatus |
| JP2013004904A (en) * | 2011-06-21 | 2013-01-07 | Nichias Corp | Heat treatment furnace and heat treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2590351B2 (en) | 1997-03-12 |
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