JPH0540095A - Micro-fluorometer - Google Patents

Micro-fluorometer

Info

Publication number
JPH0540095A
JPH0540095A JP19961591A JP19961591A JPH0540095A JP H0540095 A JPH0540095 A JP H0540095A JP 19961591 A JP19961591 A JP 19961591A JP 19961591 A JP19961591 A JP 19961591A JP H0540095 A JPH0540095 A JP H0540095A
Authority
JP
Japan
Prior art keywords
sample
light
fluorescence
power meter
excitation light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19961591A
Other languages
Japanese (ja)
Inventor
Hiroto Takemi
浩人 武未
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19961591A priority Critical patent/JPH0540095A/en
Publication of JPH0540095A publication Critical patent/JPH0540095A/en
Pending legal-status Critical Current

Links

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  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

PURPOSE:To perform highly reliable quantitative evaluation by simultaneously measuring the fluorescence from a sample and the absoption of a sample at the time of micro-fluorometry. CONSTITUTION:A light source 1, a microscope, a stage 13 and a fluorescence detector 4 are provided and a power meter 7 for monitoring the intensity of exciting light is arranged to the stage 13 and a window 12 for simultaneously performing fluorometry and absorptiometry is formed to the light detecting part protecting cover 11 of the power meter 7. The protecting cover 11 is removed and the intensity of the exciting light 9 applied to the light detecting part 10 is monitored. Next, the protecting cover 11 is applied and a sample 14 is arranged on the axis of the exciting light. The sample is irradiated with the exciting light and the transmitted exciting light is detected by the power meter 7 and the fluorescence from the sample is detected by the detector 4. By simultaneously monitoring the absorption and light emission of the sample, highly reliable quantitative evaluation can be performed by one measurement.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は顕微蛍光分析装置に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscopic fluorescence analyzer.

【0002】[0002]

【従来の技術】微小領域における化学種の識別、同定、
及び定量の手法として、顕微蛍光スペクトル法による測
定結果を用いた評価がなされている。化学種の定量は蛍
光強度により評価されるが、その際、励起光強度のモニ
ターが必要となる。さらに、蛍光強度の励起光強度依存
性を調べることにより、検出効率が最適となる測定条件
が決定される。一方、試料の吸光度を測定することによ
り、濃度、膜厚等の評価が行われている。
2. Description of the Related Art Identification and identification of chemical species in a minute area,
As a quantification method, evaluation using the measurement result by the microscopic fluorescence spectrum method is performed. The quantitative determination of the chemical species is evaluated by the fluorescence intensity, in which case it is necessary to monitor the excitation light intensity. Further, by examining the dependence of the fluorescence intensity on the excitation light intensity, the measurement condition that optimizes the detection efficiency is determined. On the other hand, the concentration, film thickness, etc. are evaluated by measuring the absorbance of the sample.

【0003】[0003]

【発明が解決しようとする課題】蛍光強度による発光種
の定量において、励起光強度のモニターは不可欠なデー
タであると共に、測定の頻度も高いため、より簡便な手
順による正確なモニターが要求される。また、発光種の
定量に際しては、蛍光強度と共に試料に対する励起光の
透過率をモニターすることも重要なパラメータである。
本発明の目的は、このような問題点に鑑み、励起光強度
を簡便且つ正確に測定できるとともに、試料の発光と吸
収を同時にモニターできる顕微蛍光測定装置を提供する
ことにある。
In the quantification of luminescent species by fluorescence intensity, monitoring of excitation light intensity is indispensable data, and since the frequency of measurement is high, accurate monitoring by a simpler procedure is required. .. Further, when quantifying the luminescent species, it is an important parameter to monitor the transmittance of the excitation light with respect to the sample as well as the fluorescence intensity.
In view of such problems, an object of the present invention is to provide a microfluorescence measuring device capable of easily and accurately measuring the intensity of excitation light and simultaneously monitoring the emission and absorption of a sample.

【0004】[0004]

【課題を解決するための手段】本発明の顕微蛍光測定装
置は、光源と試料設置用ステージと検出器とデータ処理
制御装置とから構成され、顕微鏡部分の試料設置用ステ
ージの中心またはその一部に励起光強度モニター用パワ
ーメータを具備していることを特徴とする。あるいは、
更にパワーメータの受光部保護カバーに、励起光に対し
て透明な窓を有していることを特徴としている。
A microfluorescence measuring apparatus according to the present invention comprises a light source, a sample setting stage, a detector and a data processing control unit, and the center or a part of the sample setting stage in the microscope section. And a power meter for monitoring the excitation light intensity. Alternatively,
Further, it is characterized in that the protective cover for the light receiving portion of the power meter has a window transparent to the excitation light.

【0005】[0005]

【作用】本発明においては、励起光強度モニター用パワ
ーメータを、試料設置用ステージと一体化させることに
より、励起光強度を簡便且つ正確にモニターすることが
可能である。また、受光部の上方に保護カバーを介して
試料を設置し、発光(蛍光)と吸収を同時にモニターす
ることにより、定量評価の信頼性が向上する。
In the present invention, the excitation light intensity can be easily and accurately monitored by integrating the excitation light intensity monitoring power meter with the sample setting stage. In addition, the reliability of the quantitative evaluation is improved by placing the sample above the light receiving portion via the protective cover and simultaneously monitoring the emission (fluorescence) and the absorption.

【0006】[0006]

【実施例】以下、図面を参照して、本発明の実施例を詳
細に説明する。
Embodiments of the present invention will now be described in detail with reference to the drawings.

【0007】図1は本発明の一実施例である顕微蛍光測
定装置のブロック図である。図2は、本実施例である顕
微蛍光測定装置の試料設置用ステージに励起光強度モニ
ター用パワーメータを装備させた状態の装置の構成図で
ある。
FIG. 1 is a block diagram of a microfluorescence measuring apparatus which is an embodiment of the present invention. FIG. 2 is a configuration diagram of an apparatus in which a stage for installing a sample of the microscopic fluorescence measuring apparatus according to the present embodiment is equipped with a power meter for exciting light intensity monitoring.

【0008】図1に示した顕微蛍光測定装置のブロック
図は、光源1と、顕微鏡2と、分光器3と、蛍光検出器
4と、透過光検出器5と、データ処理制御装置6からな
り、光源1はレーザ等の単色光である方がよいが、白色
光を分光器あるいはバンドパスフィルターで波長選択し
たものであってもよい。但し、顕微鏡2がダイクロイッ
クミラー等の波長選択性を有している場合は、水銀ラン
プ等の白色光でよい。顕微鏡2のステージは、励起光の
照射軸に対して垂直な平面上で互いに直交する二軸方向
への移動制御が可能であることが望ましい。検出器4
は、分光器3により分光された光を検出するためのもの
であるが、この検出器はマルチチャンネル検出器であっ
ても、通常の検出器であってもよい。検出器5は、励起
光及び試料透過光モニター用パワーメータを示す。
The block diagram of the microscopic fluorescence measuring apparatus shown in FIG. 1 comprises a light source 1, a microscope 2, a spectroscope 3, a fluorescence detector 4, a transmitted light detector 5, and a data processing controller 6. The light source 1 is preferably monochromatic light such as a laser, but may be white light whose wavelength is selected by a spectroscope or a bandpass filter. However, when the microscope 2 has wavelength selectivity such as a dichroic mirror, white light such as a mercury lamp may be used. It is desirable that the stage of the microscope 2 can be controlled to move in two axial directions orthogonal to each other on a plane perpendicular to the irradiation axis of the excitation light. Detector 4
Is for detecting the light dispersed by the spectroscope 3. The detector may be a multi-channel detector or a normal detector. The detector 5 is a power meter for monitoring excitation light and sample transmitted light.

【0009】図2において、励起光モニター用パワーメ
ータ7は、試料設置用ステージ13の中心またはその一
部に内蔵されており、ステージを移動させることによ
り、対物レンズ8を通過した励起光9は、受光部10の
受光面に対して鉛直方向から入射する。受光部保護カバ
ー11を装着することにより、ステージの凹凸は解消さ
れる。吸光測定では、受光部保護カバーとして、励起光
照射領域に、励起光に対して透明な窓12が取り付けら
れているものを使用する。
In FIG. 2, the excitation light monitoring power meter 7 is built in the center of the sample setting stage 13 or a part thereof, and by moving the stage, the excitation light 9 passing through the objective lens 8 is , Is incident on the light receiving surface of the light receiving unit 10 from the vertical direction. By mounting the light receiving section protection cover 11, the unevenness of the stage is eliminated. In the absorption measurement, as the light-receiving part protective cover, one having a window 12 transparent to the excitation light attached to the excitation light irradiation region is used.

【0010】次に、この実施例の装置の動作を説明す
る。
Next, the operation of the apparatus of this embodiment will be described.

【0011】まず、保護カバー11を取り外し、励起光
9が受光部10の中心で結像するように試料設置用ステ
ージ13の位置を調節する。光源1が安定した後、励起
光強度をモニターする。次に、保護カバー11を設置
し、その上に試料14を設置して蛍光測定を行う。蛍光
強度の励起光強度依存性を調べる際は、試料を設置した
状態で保護カバーの脱着を繰り返しながら、励起光強度
及び蛍光強度のモニターを行うことにより、同一部位の
蛍光強度を各励起光強度に対して簡便に測定できる。蛍
光強度と共に、励起光の試料吸収を同時モニターする場
合、保護カバーとしてその励起光照射領域に、励起光に
対して透明な窓を取り付けたものを使用する。
First, the protective cover 11 is removed, and the position of the sample setting stage 13 is adjusted so that the excitation light 9 forms an image at the center of the light receiving portion 10. After the light source 1 is stabilized, the excitation light intensity is monitored. Next, the protective cover 11 is installed, the sample 14 is installed thereon, and the fluorescence measurement is performed. When investigating the dependence of fluorescence intensity on excitation light intensity, the fluorescence intensity at the same site can be measured by monitoring the excitation light intensity and fluorescence intensity while repeatedly attaching and detaching the protective cover with the sample installed. Can be measured easily. When simultaneously monitoring the fluorescence intensity and the absorption of the excitation light in the sample, a protective cover provided with a window transparent to the excitation light is used in the excitation light irradiation region.

【0012】この実験系を用いて実際に蛍光測定を行っ
たところ、試料への照射光強度モニターが簡便且つ正確
になった。また、蛍光強度の励起光強度依存性を測定す
る際に、これまでの測定に比べ、測定時間が短縮され、
よい再現性を示した。吸収との同時測定では、試料の相
対量と蛍光強度の相関が得られるため、膜厚もしくは濃
度等のパラメータが未知の試料に対しても、一回の測定
で信頼性の高い評価が可能となった。
When fluorescence measurement was actually carried out using this experimental system, the intensity of the irradiation light on the sample was easily and accurately monitored. Also, when measuring the excitation light intensity dependence of the fluorescence intensity, the measurement time is shortened compared to the conventional measurements,
It showed good reproducibility. Simultaneous measurement with absorption can obtain the correlation between the relative amount of the sample and the fluorescence intensity, so even if the parameter such as film thickness or concentration is unknown, highly reliable evaluation is possible with one measurement. became.

【0013】[0013]

【発明の効果】以上説明したように、本発明の顕微蛍光
測定装置は、励起光強度及び吸光度のモニターに効果を
有するものである。本発明により試料ステージが励起光
強度モニター用パワーメータと一体化され、励起光強度
及び試料の吸光度を簡便且つ正確にモニターすることが
可能となり、定量測定の再現性および信頼性が高まっ
た。
As described above, the microfluorescence measuring apparatus of the present invention has an effect of monitoring excitation light intensity and absorbance. According to the present invention, the sample stage is integrated with the power meter for monitoring the excitation light intensity, the excitation light intensity and the absorbance of the sample can be easily and accurately monitored, and the reproducibility and reliability of quantitative measurement are improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の顕微蛍光測定装置を説明す
るためのブロック図である。
FIG. 1 is a block diagram for explaining a microfluorescence measuring apparatus according to an embodiment of the present invention.

【図2】本発明の一実施例の顕微蛍光測定装置を説明す
るための図である。
FIG. 2 is a diagram for explaining a microfluorescence measuring apparatus according to an embodiment of the present invention.

【符号の説明】 1 光源 2 顕微鏡 3 分光器 4 蛍光検出器 5 透過光検出器 6 データ処理制御装置 7 パワーメータ 8 対物レンズ 9 励起光 10 受光部 11 保護カバー 12 窓 13 ステージ 14 試料[Explanation of reference numerals] 1 light source 2 microscope 3 spectroscope 4 fluorescence detector 5 transmitted light detector 6 data processing control device 7 power meter 8 objective lens 9 excitation light 10 light receiving portion 11 protective cover 12 window 13 stage 14 sample

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 光源と顕微鏡と試料設置用ステージと検
出器とデータ処理制御装置とから構成され、該試料設置
用ステージ上に励起光強度モニター用パワーメータを装
備していることを特徴とする顕微蛍光測定装置。
1. A light source, a microscope, a sample setting stage, a detector, and a data processing control unit, and a power meter for exciting light intensity monitor is mounted on the sample setting stage. Microfluorescence measuring device.
【請求項2】 請求項1記載の顕微蛍光測定装置におい
て、該パワーメータの受光部保護カバーに試料の蛍光及
び吸光測定を同時に行うための、励起光に対して透明な
窓を設けたことを特徴とする顕微蛍光測定装置。
2. The microfluorescence measuring apparatus according to claim 1, wherein a protective cover for the light receiving section of the power meter is provided with a window transparent to excitation light for simultaneously measuring fluorescence and absorption of the sample. The characteristic microscopic fluorescence measurement device.
JP19961591A 1991-08-08 1991-08-08 Micro-fluorometer Pending JPH0540095A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19961591A JPH0540095A (en) 1991-08-08 1991-08-08 Micro-fluorometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19961591A JPH0540095A (en) 1991-08-08 1991-08-08 Micro-fluorometer

Publications (1)

Publication Number Publication Date
JPH0540095A true JPH0540095A (en) 1993-02-19

Family

ID=16410804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19961591A Pending JPH0540095A (en) 1991-08-08 1991-08-08 Micro-fluorometer

Country Status (1)

Country Link
JP (1) JPH0540095A (en)

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