JPH053896B2 - - Google Patents

Info

Publication number
JPH053896B2
JPH053896B2 JP4120785A JP4120785A JPH053896B2 JP H053896 B2 JPH053896 B2 JP H053896B2 JP 4120785 A JP4120785 A JP 4120785A JP 4120785 A JP4120785 A JP 4120785A JP H053896 B2 JPH053896 B2 JP H053896B2
Authority
JP
Japan
Prior art keywords
heating element
support structure
substrate
recess
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4120785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61201148A (ja
Inventor
Junji Manaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Seiki Co Ltd
Original Assignee
Ricoh Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Seiki Co Ltd filed Critical Ricoh Seiki Co Ltd
Priority to JP4120785A priority Critical patent/JPS61201148A/ja
Publication of JPS61201148A publication Critical patent/JPS61201148A/ja
Publication of JPH053896B2 publication Critical patent/JPH053896B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Surface Heating Bodies (AREA)
  • Control Of Resistance Heating (AREA)
JP4120785A 1985-03-04 1985-03-04 発熱体支持構造 Granted JPS61201148A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4120785A JPS61201148A (ja) 1985-03-04 1985-03-04 発熱体支持構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4120785A JPS61201148A (ja) 1985-03-04 1985-03-04 発熱体支持構造

Publications (2)

Publication Number Publication Date
JPS61201148A JPS61201148A (ja) 1986-09-05
JPH053896B2 true JPH053896B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-18

Family

ID=12601961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4120785A Granted JPS61201148A (ja) 1985-03-04 1985-03-04 発熱体支持構造

Country Status (1)

Country Link
JP (1) JPS61201148A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016536766A (ja) * 2013-09-19 2016-11-24 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ マイクロヒータプレート装置、及び、マイクロヒータプレート装置を備えたセンサ

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06103287B2 (ja) * 1987-10-07 1994-12-14 シャープ株式会社 センサ素子
DE68928739T2 (de) * 1988-12-29 1999-02-11 Sharp K.K., Osaka Detecteur d'humidite
JP6321767B1 (ja) * 2016-12-14 2018-05-09 日本特殊陶業株式会社 呼気センサ
DE102017205985A1 (de) * 2017-04-07 2018-10-11 Siemens Aktiengesellschaft Substrataufbau für einen Gassensor oder eine Infrarot-Lichtquelle
JP7277875B2 (ja) * 2019-05-24 2023-05-19 国立大学法人大阪大学 物性測定装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016536766A (ja) * 2013-09-19 2016-11-24 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ マイクロヒータプレート装置、及び、マイクロヒータプレート装置を備えたセンサ
US10383177B2 (en) 2013-09-19 2019-08-13 Robert Bosch Gmbh Micro heating plate device and sensor having a micro heating plate device

Also Published As

Publication number Publication date
JPS61201148A (ja) 1986-09-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees