JPH0538051Y2 - - Google Patents
Info
- Publication number
- JPH0538051Y2 JPH0538051Y2 JP17182586U JP17182586U JPH0538051Y2 JP H0538051 Y2 JPH0538051 Y2 JP H0538051Y2 JP 17182586 U JP17182586 U JP 17182586U JP 17182586 U JP17182586 U JP 17182586U JP H0538051 Y2 JPH0538051 Y2 JP H0538051Y2
- Authority
- JP
- Japan
- Prior art keywords
- film
- ring
- holding
- tension
- inner ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 description 60
- 230000007246 mechanism Effects 0.000 description 12
- 239000010409 thin film Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17182586U JPH0538051Y2 (xx) | 1986-11-08 | 1986-11-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17182586U JPH0538051Y2 (xx) | 1986-11-08 | 1986-11-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6378066U JPS6378066U (xx) | 1988-05-24 |
JPH0538051Y2 true JPH0538051Y2 (xx) | 1993-09-27 |
Family
ID=31107812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17182586U Expired - Lifetime JPH0538051Y2 (xx) | 1986-11-08 | 1986-11-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0538051Y2 (xx) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050016464A1 (en) * | 2003-07-24 | 2005-01-27 | General Electric Company | Methods and fixtures for facilitating handling of thin films |
-
1986
- 1986-11-08 JP JP17182586U patent/JPH0538051Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6378066U (xx) | 1988-05-24 |
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