JPH0537471Y2 - - Google Patents

Info

Publication number

JPH0537471Y2

JPH0537471Y2 JP15912288U JP15912288U JPH0537471Y2 JP H0537471 Y2 JPH0537471 Y2 JP H0537471Y2 JP 15912288 U JP15912288 U JP 15912288U JP 15912288 U JP15912288 U JP 15912288U JP H0537471 Y2 JPH0537471 Y2 JP H0537471Y2

Authority

JP

Japan

Prior art keywords

attached

chamber

etching

rotating shaft

magnetic plate

Prior art date

1988-12-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

Links

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• 238000005530 etching Methods 0.000 claims description 54
• 238000010992 reflux Methods 0.000 claims description 17
• 238000005192 partition Methods 0.000 claims description 16
• 239000000498 cooling water Substances 0.000 claims description 15
• 238000001816 cooling Methods 0.000 claims description 8
• 230000008878 coupling Effects 0.000 claims description 4
• 238000010168 coupling process Methods 0.000 claims description 4
• 238000005859 coupling reaction Methods 0.000 claims description 4
• 239000007788 liquid Substances 0.000 description 17
• 238000010586 diagram Methods 0.000 description 6
• 230000007797 corrosion Effects 0.000 description 4
• 238000005260 corrosion Methods 0.000 description 4
• 238000003756 stirring Methods 0.000 description 3
• 239000004615 ingredient Substances 0.000 description 2
• VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
• 239000005977 Ethylene Substances 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 125000006850 spacer group Chemical group 0.000 description 1
• 238000004078 waterproofing Methods 0.000 description 1