JPH0535537B2 - - Google Patents

Info

Publication number
JPH0535537B2
JPH0535537B2 JP60115085A JP11508585A JPH0535537B2 JP H0535537 B2 JPH0535537 B2 JP H0535537B2 JP 60115085 A JP60115085 A JP 60115085A JP 11508585 A JP11508585 A JP 11508585A JP H0535537 B2 JPH0535537 B2 JP H0535537B2
Authority
JP
Japan
Prior art keywords
ion
ions
cathode
region
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60115085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61273840A (ja
Inventor
Tamio Hara
Manabu Hamagaki
Katsunobu Aoyanagi
Susumu Nanba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP60115085A priority Critical patent/JPS61273840A/ja
Priority to CA000510112A priority patent/CA1252581A/fr
Priority to DE86107195T priority patent/DE3688860T2/de
Priority to EP86107195A priority patent/EP0203573B1/fr
Priority to US06/868,350 priority patent/US4749910A/en
Publication of JPS61273840A publication Critical patent/JPS61273840A/ja
Publication of JPH0535537B2 publication Critical patent/JPH0535537B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP60115085A 1985-05-28 1985-05-28 電子ビ−ム励起イオン照射装置 Granted JPS61273840A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60115085A JPS61273840A (ja) 1985-05-28 1985-05-28 電子ビ−ム励起イオン照射装置
CA000510112A CA1252581A (fr) 1985-05-28 1986-05-27 Source de rayonnement d'ions par excitation au rayon d'electrons
DE86107195T DE3688860T2 (de) 1985-05-28 1986-05-27 Mittels Elektronenstrahl angeregte Ionenstrahlquelle.
EP86107195A EP0203573B1 (fr) 1985-05-28 1986-05-27 Source d'ions excitée par faisceau d'électrons
US06/868,350 US4749910A (en) 1985-05-28 1986-05-28 Electron beam-excited ion beam source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60115085A JPS61273840A (ja) 1985-05-28 1985-05-28 電子ビ−ム励起イオン照射装置

Publications (2)

Publication Number Publication Date
JPS61273840A JPS61273840A (ja) 1986-12-04
JPH0535537B2 true JPH0535537B2 (fr) 1993-05-26

Family

ID=14653819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60115085A Granted JPS61273840A (ja) 1985-05-28 1985-05-28 電子ビ−ム励起イオン照射装置

Country Status (1)

Country Link
JP (1) JPS61273840A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2526228B2 (ja) * 1987-01-31 1996-08-21 東京エレクトロン株式会社 電子ビ―ム式プラズマ装置
JPH0646559B2 (ja) * 1987-06-05 1994-06-15 理化学研究所 スパッタ中性粒子質量分析装置
JP2655146B2 (ja) * 1987-07-22 1997-09-17 理化学研究所 イオン照射装置
JPH0626197B2 (ja) * 1987-08-24 1994-04-06 東京エレクトロン株式会社 ドライエッチング装置
GB8905073D0 (en) * 1989-03-06 1989-04-19 Nordiko Ltd Ion gun

Also Published As

Publication number Publication date
JPS61273840A (ja) 1986-12-04

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