JPH0534769B2 - - Google Patents

Info

Publication number
JPH0534769B2
JPH0534769B2 JP63335202A JP33520288A JPH0534769B2 JP H0534769 B2 JPH0534769 B2 JP H0534769B2 JP 63335202 A JP63335202 A JP 63335202A JP 33520288 A JP33520288 A JP 33520288A JP H0534769 B2 JPH0534769 B2 JP H0534769B2
Authority
JP
Japan
Prior art keywords
sample
magnetic pole
electron beam
objective lens
sample holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63335202A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01236566A (ja
Inventor
Takashi Yanaka
Kazuo Oosawa
Kosuke Kyogoku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topcon Corp
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Priority to JP63335202A priority Critical patent/JPH01236566A/ja
Publication of JPH01236566A publication Critical patent/JPH01236566A/ja
Publication of JPH0534769B2 publication Critical patent/JPH0534769B2/ja
Granted legal-status Critical Current

Links

JP63335202A 1988-12-29 1988-12-29 電子線装置 Granted JPH01236566A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63335202A JPH01236566A (ja) 1988-12-29 1988-12-29 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63335202A JPH01236566A (ja) 1988-12-29 1988-12-29 電子線装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57050019A Division JPS58169762A (ja) 1982-03-30 1982-03-30 電子線装置

Publications (2)

Publication Number Publication Date
JPH01236566A JPH01236566A (ja) 1989-09-21
JPH0534769B2 true JPH0534769B2 (enrdf_load_html_response) 1993-05-24

Family

ID=18285902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63335202A Granted JPH01236566A (ja) 1988-12-29 1988-12-29 電子線装置

Country Status (1)

Country Link
JP (1) JPH01236566A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4087286B2 (ja) * 2003-05-12 2008-05-21 日本電子株式会社 試料保持具及び観察装置並びに試料回転方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3268266D1 (en) * 1981-07-23 1986-02-13 Amp Inc Sealed electrical connector
US4893646A (en) * 1988-04-28 1990-01-16 Tektronix, Inc. Fluid pressure regulator

Also Published As

Publication number Publication date
JPH01236566A (ja) 1989-09-21

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