JPH01236566A - 電子線装置 - Google Patents

電子線装置

Info

Publication number
JPH01236566A
JPH01236566A JP63335202A JP33520288A JPH01236566A JP H01236566 A JPH01236566 A JP H01236566A JP 63335202 A JP63335202 A JP 63335202A JP 33520288 A JP33520288 A JP 33520288A JP H01236566 A JPH01236566 A JP H01236566A
Authority
JP
Japan
Prior art keywords
sample
magnetic pole
sample holder
objective lens
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63335202A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0534769B2 (enrdf_load_html_response
Inventor
Takashi Yanaka
谷中　隆志
Kazuo Osawa
大沢　一夫
Kosuke Kyogoku
京極　光祐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP63335202A priority Critical patent/JPH01236566A/ja
Publication of JPH01236566A publication Critical patent/JPH01236566A/ja
Publication of JPH0534769B2 publication Critical patent/JPH0534769B2/ja
Granted legal-status Critical Current

Links

JP63335202A 1988-12-29 1988-12-29 電子線装置 Granted JPH01236566A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63335202A JPH01236566A (ja) 1988-12-29 1988-12-29 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63335202A JPH01236566A (ja) 1988-12-29 1988-12-29 電子線装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57050019A Division JPS58169762A (ja) 1982-03-30 1982-03-30 電子線装置

Publications (2)

Publication Number Publication Date
JPH01236566A true JPH01236566A (ja) 1989-09-21
JPH0534769B2 JPH0534769B2 (enrdf_load_html_response) 1993-05-24

Family

ID=18285902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63335202A Granted JPH01236566A (ja) 1988-12-29 1988-12-29 電子線装置

Country Status (1)

Country Link
JP (1) JPH01236566A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004333405A (ja) * 2003-05-12 2004-11-25 Jeol Ltd 試料保持具及び観察装置並びに試料回転方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826469A (ja) * 1981-07-23 1983-02-16 アンプ・インコ−ポレ−テツド 電気コネクタ
JPH0211976A (ja) * 1988-04-28 1990-01-17 Tektronix Inc 流体圧力制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826469A (ja) * 1981-07-23 1983-02-16 アンプ・インコ−ポレ−テツド 電気コネクタ
JPH0211976A (ja) * 1988-04-28 1990-01-17 Tektronix Inc 流体圧力制御装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004333405A (ja) * 2003-05-12 2004-11-25 Jeol Ltd 試料保持具及び観察装置並びに試料回転方法

Also Published As

Publication number Publication date
JPH0534769B2 (enrdf_load_html_response) 1993-05-24

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