JPH0534433B2 - - Google Patents
Info
- Publication number
- JPH0534433B2 JPH0534433B2 JP18270483A JP18270483A JPH0534433B2 JP H0534433 B2 JPH0534433 B2 JP H0534433B2 JP 18270483 A JP18270483 A JP 18270483A JP 18270483 A JP18270483 A JP 18270483A JP H0534433 B2 JPH0534433 B2 JP H0534433B2
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- anode
- cathode
- dry etching
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005530 etching Methods 0.000 claims description 37
- 238000001312 dry etching Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 2
- 229910052761 rare earth metal Inorganic materials 0.000 claims 1
- 150000002910 rare earth metals Chemical group 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 8
- 238000001816 cooling Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18270483A JPS6075589A (ja) | 1983-09-30 | 1983-09-30 | ドライエツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18270483A JPS6075589A (ja) | 1983-09-30 | 1983-09-30 | ドライエツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6075589A JPS6075589A (ja) | 1985-04-27 |
| JPH0534433B2 true JPH0534433B2 (de) | 1993-05-24 |
Family
ID=16122974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18270483A Granted JPS6075589A (ja) | 1983-09-30 | 1983-09-30 | ドライエツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6075589A (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62169418A (ja) * | 1986-01-22 | 1987-07-25 | Toshiba Corp | ドライエツチング装置 |
| JPH0831439B2 (ja) * | 1986-03-05 | 1996-03-27 | 株式会社東芝 | 反応性イオンエッチング方法 |
| US4738761A (en) * | 1986-10-06 | 1988-04-19 | Microelectronics Center Of North Carolina | Shared current loop, multiple field apparatus and process for plasma processing |
| JP2620553B2 (ja) * | 1988-02-29 | 1997-06-18 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| JP2826895B2 (ja) * | 1990-09-19 | 1998-11-18 | ティーディーケイ株式会社 | 永久磁石磁気回路 |
-
1983
- 1983-09-30 JP JP18270483A patent/JPS6075589A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6075589A (ja) | 1985-04-27 |
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