JPH05340580A - Dust removing device for entering semiconductor manufacturing factory - Google Patents

Abstract

PURPOSE:To increase dust removing effect by eliminating the dead angle of cleaning air, blown against a body, from which dust is to be removed, in a dust removing device used upon entering a semiconductor manufacturing factory. CONSTITUTION:A clean air outlet port 6 is provided on the ceiling of a dust removing chamber 5 other than at the other clean air outlet ports 1 provided at both side surfaces (or one side surface) of the dust removing chamber 5 to provide the device with a function to blow clean air against the top surfaces of the head and the like of a body 4, from which dust is to be removed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dust removing device for entering a semiconductor factory, and more particularly to a mounting position of a normal air outlet.

[0002]

2. Description of the Related Art Conventionally, in this type of dust removing apparatus, as shown in the longitudinal sectional view of FIG.
It was attached to both side surfaces (or one side surface) of the above, and the air blown by the blower 3 passed through the filter 5 and was normalized to the dust-removed object 4 which was a worn article or a carry-on item. And
The exhaust gas is exhausted from the floor of the dust removing chamber 5.

[0003]

At the mounting position of the conventional normal air outlet 1 described above, there is a dust removing effect on the side surface of the dust-excluded object 4, but the upper surface of the dust-excluded object 4 does not have the dust-extracted object 4. Depending on the shape and size, there is a blind spot, and there is a problem that dust cannot be removed sufficiently.

[0004]

The dust removing apparatus for entering the semiconductor manufacturing plant of the present invention is provided with the normal air blowout port on both sides (or one side) of the dust removing chamber as well as on the ceiling portion.

[0005]

The present invention will be described below with reference to the drawings. 1 is a vertical sectional view of a first embodiment of the present invention. The air pressure-fed by the blower 3 is cleaned by the filter 2, is blown out from the clean air blowing ports 1 and 6 into the dust removing chamber 5, and is blown to the dust-removed body 4. Here, the air blown out from the clean air blowout port 1 is blown to the side surface of the object to be removed 4, but at the same time, in the present embodiment, the clean air blowout port 6 is provided in the central portion of the ceiling, and the filter is passed via the duct 7. The clean air that has passed through 2 is blown from directly above the dust-removed body 4 to remove dust centering on the upper surface of the dust-removed body 4.

FIG. 2 is a vertical sectional view of the second embodiment of the present invention. The air pressure-fed by the blower 3 is cleaned by the filter 2, blown out from the clean air blowing ports 1 and 6 into the dust removing chamber, and blown to the dust-removed body 4. here,
The air blown out from the clean air blowout port 1 is blown to the side surface of the dust-removed body 4 as in the first embodiment, but at the same time in the second embodiment, the clean air blowout ports 6 are provided on both sides of the ceiling portion and pass through the filter 2. The clean air is blown obliquely from above to remove dust centering on the upper surface of the object to be removed 4. Example 2
Has an advantage that the duct 7 can be omitted and the structure for guiding the clean air to the clean air outlet 6 can be simplified as compared with the first embodiment.

[0007]

As described above, according to the present invention, the clean air blowing port is also provided in the ceiling of the dust removing chamber, so that the blowing of clean air only from the side surface of the upper surface of the dust-removed portion causes a blind spot. There is an effect that dust removal is also efficiently performed.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a first embodiment of the present invention.

FIG. 2 is a vertical sectional view of a second embodiment of the present invention.

FIG. 3 is a vertical sectional view of a conventional dust removing device.

[Explanation of symbols]

 1 Clean air blowout port (side) 2 Filter 3 Blower 4 Dust removal object 5 Dust removal chamber 6 Clean air blowout port (ceiling part) 7 Duct

Claims (1)

[Claims] 1. A dust removal device for entering a semiconductor manufacturing factory, which removes dust adhering by blowing normal air onto an object to be removed at the time of entering the semiconductor manufacturing factory. A dust removing device for entering a semiconductor manufacturing plant, which is mounted on the ceiling as well as on the side of the chamber.