JPH05337422A - Method for coating circuit board and transporting device for coating circuit board - Google Patents

Abstract

PURPOSE:To improve the quality of a circuit board by uniformly coating the circuit board, transporting the circuit board to a circuit part of the already coated rear surface without contact and coating the circuit board at the time of coating the front surface of the circuit board with a liquid coating material by a curtain coater. CONSTITUTION:The printed circuit board is held horizontally by gripping devices 12 and while the tensile force in a horizontal direction is applied to the circuit board from both ends thereof by side approaching mechanisms for a transfer unit, the circuit board is passed through the inside of the curtain coater 11 and the front surface of the printed circuit board is coated with the coating material. As a result, the circuit board is uniformly coated and since the circuit board is transported to the circuit part of the already coated rear surface without contact, the quality of the circuit board is improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate coating method and a substrate coating transporting device, and more particularly, to a substrate coating method and a substrate coating method for curtain-coating a printed circuit board such as a single-sided or double-sided or multi-layered board with a resin or the like. The present invention relates to a carrier device.

[0002]

2. Description of the Related Art Conventionally, as a method of applying a resin or the like to a thin plate such as a printed circuit board, there are mainly spray coating, screen coating and curtain coating. Although spray coating is a method of applying by spraying, it has drawbacks such that the resin is scattered and thus harms the human body, and the resin is wasteful. Also,
Screen coating is a method of applying resin mainly by using a squeegee by hand, but it requires craftsmanship to apply the resin evenly to a thin plate, and there are drawbacks such as waste of resin. ..

As described below, curtain coating is a method in which coating is performed by flowing resin in a curtain shape onto the surface of a thin plate that is being conveyed at high speed and is moving, so that the coating operation can be automated. In addition, there are advantages that uniform coating is possible and that no waste resin is generated.

A so-called curtain coater for performing this work is roughly constituted by a coating means 210 and a conveying means 220 for the printed circuit board P, as shown in FIG.
The coating means 210 is a storage tank 21 for storing the resin R1 and the like.
1, a discharge portion 212 for discharging resin or the like in a curtain shape on the printed circuit board P, a pump 213 for supplying resin or the like from the storage tank 211 to the discharge portion 212, and a storage tank for receiving excess resin R2 discharged from the discharge portion 212 A discharge port 212 is provided on the surface of the printed circuit board P during high speed movement in the coating means 210 by the transporting means 220 having a receiving port 214 for returning to 211, and the surface of the printed circuit board P is coated with the resin or the like. ..

Further, as shown in FIG. 13, a V-shaped belt 221 is generally adopted as the above-mentioned conveying means 220. It is guided more accurately than flat belts,
Further, since the contact portion is only the end portion, there is an advantage that stains are reduced particularly in the case of double-sided coating by one discharging portion.

[0006]

However, in the case of the V-shaped belt, since the substrate is simply placed, the substrate is not exactly parallel to the traveling direction, and there is a deviation. There were problems such as coating failure. Also, in the case of thinner thin plates, there is a problem that warping occurs due to its own weight and uniform coating cannot be performed, and, moreover, the substrate does not follow the high-speed belt during each operation because it is light, and it becomes a so-called flying state. was there. Further, there is a problem that the circuit portion on the back surface, which has already been applied to the conveyor belt, comes into contact with the conveyor belt.

Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to enable uniform coating by reliably and accurately transporting a printed circuit board or the like at a high speed. Further, it is intended to carry and apply the non-contact transfer coating to the already-applied back side circuit portion.

[0008]

In order to achieve the above-mentioned object, in the invention of the method in the present invention, in a method of coating a liquid paint on the surface of a substrate by curtain coating, the substrate is held horizontally. In addition, the composition is characterized in that it is passed through the liquid paint flowing down like a curtain while applying a horizontal tensile force from both ends thereof. Further, the substrate coating transporting device of the present invention comprises a transporting path that extends in one direction and a coating device that is provided in a direction traversing the transporting path and that causes the liquid coating material to flow down in a curtain shape. The transport path is provided with a pair of parallel rails, and grip means for gripping both ends of the substrate are slidably attached to the rails, respectively, and at least one grip means is movably attached in a direction crossing the rails. And Further, in the above-mentioned carrying device, at least one of the grip means is provided with a pulling device for applying a resilient pulling force in a direction traversing the rail.

[0009]

With the above-mentioned structure, the substrate is held horizontally and both sides with respect to the traveling direction are gripped by the grip means, and at this time, the horizontal pulling force is applied to the substrate while being supplied to the coating apparatus. Since the coating is applied to the surface of the substrate, the surface of the substrate is kept horizontal, and accurate and uniform coating can be performed. Further, it is possible to carry and apply the non-contact transfer coating to the already-applied back side circuit portion.

[0010]

An embodiment of the present invention will be described below with reference to the accompanying drawings. 1 to 3, a substrate coating transfer device 10 includes a curtain coater 11, a transfer unit 12 that carries a substrate in and out of the curtain coater 11, a loader unit 13 that delivers a substrate that has undergone a previous process to the transfer unit 12, and a curtain. It is roughly configured by an unloader unit 14 that transfers the substrate coated by the coater 11 from the transfer unit 13 to the next step, and is provided on a pedestal 15 formed in a rectangular shape in a top view.

First, the transfer unit 12 will be described. In FIGS. 1 and 2, a transfer unit drive motor 16 is attached near the left end of the pedestal 15. Further, a movable side rail 17 and a reference side rail 18 are arranged in parallel along the longitudinal direction of the gantry 15, and both rails 1
Pulleys 19, 20, 21, 22 are attached to both ends of 7, 18 via mounting members. The pulleys 19 and 20 are connected by a drive shaft 23, and the tip of the drive shaft 23 extending through the pulley 19 has a transfer unit drive motor.
It is connected to a speed reducer 24 that reduces the rotational speed of 16.

The speed reducer 24 has a large pulley 25, a small pulley 26 concentrically connected to the large pulley 25, and an intermediate pulley 27 connected to the tip of the drive shaft 23 described above.
The belt 29 is wound around a pulley 28 and a large pulley 25 provided on 16 rotary shafts, and the belt 30 is wound around a small pulley 26 and an intermediate pulley 27.

On the other hand, timing belts 31, 32 are wound around the pulleys 19 and 21, and pulleys 20 and 22, respectively, and a transfer grip device 33, which will be described later, is connected in series between the timing belts 31 and 32. It is provided.

The operation of the transfer unit 12 configured as above will be described. The rotation of the transfer unit drive motor 16 is decelerated to a suitable rotational speed by the speed reducer 24 and transmitted to the drive shaft 23. Further, the rotational force is transmitted to the pulleys 19 and 20 via the drive shaft 23, and the timing belts 31 and 32 are rotated. Specifically, the drive motor 16 is A
It is a C servo motor and can be rotated normally and reversely. By this rotation, the transfer grip device 33 is
The curtain coater 11 reciprocates between the loader unit 13 and the unloader unit 14, which are located in front of and behind the curtain coater 11, while controlling the moving speed thereof. In addition,
The printed circuit board is conveyed in the direction of arrow a in FIG.

Next, in the transfer unit 12, a distance between grips described later, in other words, a movable side rail 17 and a reference side rail 18 is determined according to the size of a substrate to be conveyed.
The transfer unit width adjusting mechanism for adjusting the distance between the transfer unit and the transfer unit will be described. A transfer unit width direction driving motor 34 is attached near the right end of the gantry 15, and a pulley 35 is attached to the tip of the rotation shaft of the motor 34. Further, a conduction shaft 36 for widthwise movement is provided outside the pedestal 15 along the longitudinal direction thereof. A transmission shaft pulley 37 is attached to the tip of the transmission shaft 36 on the motor 34 side, and the transmission shaft pulley 37 and the pulley 35 are connected by a belt.

Ball screws 38 and 39 are arranged so as to be orthogonal to the pedestal 15 at substantially equal distances in both directions from the curtain coater 11 located at the center of the transfer device 10, and the end portions thereof are arranged. Are orthogonal shaft gears 40 and 4 respectively
It is connected to the transmission shaft 36 via 1. In addition, the ball screws 38 and 39 have movable elements that can move according to their rotation.
42 and 43 are fitted together. In addition, the ball screw 3
Linear slide 44,45 adjacent to and parallel to 8,39
Is provided. Further, slide members 46, 47 are slidably arranged on the linear slides 44, 45, and the slide members 46, 47 are connected to the movable side rail 18 via vertical members 48, 49.

The transfer unit width shifting mechanism configured as described above will be described. When the transfer unit width direction driving motor 34 rotates forward in the direction of arrow b, the transmission shaft pulley 37 also rotates in the same direction. This rotation is transmitted to the orthogonal shaft gear 41, whereby the transmission shaft 36 for widthwise movement is rotated in the direction opposite to the arrow b (arrow c), and at the same time, the ball screw 39 is rotated in the direction of the arrow d. Further, the rotation of the width direction moving transmission shaft 36 in the direction of arrow c is transmitted to the ball screw 38 via the orthogonal shaft gear 40, and the ball screw 38 is moved in the direction of arrow d, that is, in the same direction as the other ball screw 39. To be rotated.

By the rotation of the ball screws 38 and 39, the movers 42 and 43 move in the direction of arrow e. Therefore, since the slide members 46 and 47 are connected to the movers 42 and 43, and the movable rail 17 is connected to the slide members 46 and 47 through the vertical members 48 and 49, the movers 42 and 4
Along with the movement of 3 in the direction of arrow e, the movable side rail 17 moves in the direction of arrow e, that is, the direction of the reference side rail 18, together with the slide members 46 and 47 sliding on the slides 44 and 45. Further, by rotating the transfer unit width direction driving motor 34 in the reverse direction, each of the above rotation transmitting members rotates in the opposite direction, and the movable side rail 17 moves in the direction opposite to the arrow e, that is, in the direction away from the reference side rail 18. Moving. Thereby, the distance between the grips of the transfer grip device 33 described later can be arbitrarily adjusted. Therefore, after the grip holds the substrate, the movable side rail 17 is slightly moved in a direction away from the reference side rail 18, whereby an appropriate tensile force can be applied to the substrate.

Next, the moving device 90 for the reference rail 18 will be described with reference to FIG. Vertical members 91, 92 are respectively connected to the reference side rail 18 corresponding to the vertical members 48, 49 connected to the movable side rail 17. The lower ends of the vertical members 91, 92 are fixed to slide members 93, 94, respectively, and the slide members 93, 94 are slidably fitted in the linear guides 44, 45. Further, L-shaped members 95 and 96 are arranged near the slide members 93 and 94, respectively.
The corners of 5,96 are appropriately pivotally supported on the pedestal so that they can freely rotate. Further, one ends 95a, 96a of the L-shaped members 95, 96 are connected to the vertical members 91, 92 via rods 97, 98, respectively.
The other ends 95b and 96b are connected by a connecting rod 99. The other end 96b of the L-shaped member 96 is connected to the rod 100a of the air cylinder 100 whose base end is fixed to the frame.

The operation of the moving device 90 for the reference-side rail 18 constructed as above will be described. When the rod 100a of the air cylinder 100 in the extended state retracts, the L-shaped member 96 turns counterclockwise with its corner portion as a fulcrum. This pivoting movement pulls the vertical member 92 in the outward direction via the rod 98, that is, in the direction opposite to the movable side rail 17, so that the slide member 94 slides on the linear guide 44 in the outward direction. Further, at the same time when the L-shaped member 96 turns counterclockwise, the connecting rod 99 is pulled toward the air cylinder 100, and the other L-shaped member 95 also turns counterclockwise.
Therefore, since the slide member 93 also slides outward in the same manner as described above, the reference rail 18 also moves outward by the predetermined distance D. The retracted air cylinder 100
When the rod 100a of the above extends, the above-mentioned constituent members respectively move in the directions opposite to the above-mentioned movements, and the reference side rail 18 moves inward,
That is, it moves toward the movable side rail 17.

Next, the transfer grip device 33 will be described. As shown in FIG. 4, the printed circuit board P is
The grips 51 of the transfer grip device 33 are gripped and conveyed from both sides in the conveyance direction indicated by the arrow a. In the case of the present embodiment, the printed circuit board P is gripped by the six grips 51 on one side. However, for example, when the printed circuit board P is small as shown by the chain line, it is gripped by the three grips 51 on one side. It can also be transported.

One grip 51 is shown in FIGS. 5 and 6. Grip 51 is an upper grip 51a and a lower grip
51b, an intermediate plate 52 common to the six grips is located under the lower grip 51b, and a lower member 68 is disposed below the intermediate plate 52. A common push-up member 53 is provided. Two air cylinders 54 for raising and lowering the push-up member 53 are provided near both ends of the push-up member 53 via rods 54a. Also,
The upper grip 51a and the push-up member 53 are two connecting members 55 and 55.
The lower grip 51b, the intermediate plate 52, and the lower member 68.
Is connected through the lower grip 51b and the lower member.
68 is two springs 56, 5 that penetrate the intermediate plate 52.
Linked by 6

Further, the lower grip 51b and the intermediate plate 52
The lower member 68 and the lower member 68 are connected by the link mechanism 57 having three sections as follows. The center link 58 is rotatably supported by the intermediate plate 52 by the pin 59, and the upper link 60 has both ends thereof pinned to one end of the center link 58 and the lower grip 51b.
The lower link 66 is pivotally supported by 61 and 62 respectively, and the lower link 66 has both ends thereof at the other end of the central link 58 and the lower member 68.
It is pivotally supported by pins 63 and 64.

Next, the operation of the transfer grip device 33 configured as described above will be described. As for the upper and lower grips 51a and 51b of the normal grip 51, the lower grip 51b is pressed upward by the force of the springs 56 and 56 acting in the vertical direction in the drawing, and the upper grip 51a and the rod 54a of the air cylinder 54 are It is in a closed state because it is retracted and positioned downward. The contact surface of the upper and lower grips at this time is the reference surface for carrying the printed circuit board. In this closed state, the air cylinder 54 is driven and its rod 54a
When is extended, the push-up member 53 moves upward, and the connecting member 5
The upper grip 51a moves upward through the 5,55. At the same time, the push-up member 53 pushes the lower member 68 upward, whereby the lower link 66 moves upward and the central link 58 is rotated clockwise. When the center link 58 rotates clockwise, the upper link 60 moves downward and the lower grip
Move 51b downwards against the force of springs 56,56. As a result, the grip 51 is opened.

Further, as described above, when the rod 54a of the air cylinder 54 is retracted, the central link 58 is rotated counterclockwise by the action of the springs 56, 56, and the upper grip 51b.
Is pushed up, the grip 51 is immediately closed or the printed circuit board is gripped.

Next, the tension mechanism 70 which can be selectively attached to the transfer unit 12 will be described with reference to FIG. The tension mechanism 70 is roughly composed of a compression coil spring 71 and a link mechanism 72, and is provided on the upper surface of the transfer unit 12 slidably arranged on the reference rail 18. Both ends of the compression coil spring 71 are connected to a fixed member 73 fixed to the transfer unit 12 and a movable member 74, respectively, and are arranged at a substantially central portion of the transfer unit 12 along its longitudinal direction. The movable member 74 is
The first link arranged parallel to the compression coil spring 71
It is integrally connected to the middle part of 75. The second links 76 and 77 are axially supported at both ends of the first link 75, respectively.
The second links 76 and 77 are pivotally supported by the transfer unit 12 by pins 78 and 79 so as to be rotatable. Second link
76 and 77 are further connected to the transfer grip device 33 (see FIG. 6) via third links 80 and 81.

The pulling mechanism 70 operates as follows.
That is, the compression coil spring 71 whose one end is held by the fixing member 73
Always presses the movable member 74 in the conveyance direction of the printed circuit board P indicated by the arrow a, the first link 75 integrally connected to the movable member 74 also tries to move in the same direction. Therefore, the second links 76 and 77 connected to the first link 75 try to turn counterclockwise around the pins 78 and 79 as fulcrums. This turning force also tries to turn the third links 80, 81 pivotally supported by the second links 76, 77 counterclockwise, so that the transfer grip device 33 to which the third links 80, 81 are connected is Try to move outwards. As a result, the printed circuit board P gripped by the grip 51 is pulled outward and held horizontally.

When an excessive tensile force is applied to the transfer unit by the action of the transfer unit width-shifting mechanism, or when the printed circuit board is distorted, the action of the tensile mechanism 70 causes an excessive tensile force or strain. Can be buffered.

Next, the loader unit 13 and the unloader unit 14 will be described with reference to FIGS.
Since the loader unit and the unloader unit have the same configuration, only the unloader unit will be described and the description of the loader unit will be omitted.
The unloader unit 14 is an unloader unit drive device.
101, an unloader unit width direction driving device 102, and an unloader unit grip device 103.

First, the unloader unit driving device 101 will be described. As shown in FIG. 1, an unloader unit driving motor 104 is installed on a pedestal 15, and a pulley 105 is provided at the tip of the rotary shaft of the motor. Also,
As shown in FIG. 8, four unloader unit driving pulleys 106, 107, are provided on both sides of the unloader unit 14 in the width direction.
108 and 109 are arranged, and cogged belts 110 and 111 are respectively stretched. Further, the pulleys 106 and 108 are connected to each other by a transmission shaft 112, and the transmission shaft 112 penetrates one pulley 108, and a transmission shaft pulley 113 is provided at the tip thereof. The transmission shaft pulley 113 is connected by the pulley 105 and the belt 114 shown in FIG. In addition, the cogged belts 110 and 111 include two sides 115 that are parallel to the cog belt in the substantially rectangular frame 115.
The belt fixing stays 116 and 117 are connected to a and 115b, respectively. It should be noted that these two side frame frames 115a, 115
b is the linear guides 118 and 11 respectively, as shown in FIG.
9 is slidably arranged on the top.

The unloader unit driving device 101 configured as described above operates as follows. When the unloader unit drive motor 125 rotates, this rotation causes the belt 11
It is transmitted to the transmission shaft 112 via 4. When the transmission shaft 112 rotates, the cogged belts 110 and 111 rotate, and the frame frame 115, that is, the unloader unit 14 moves via the belt fixing stays 116 and 117 to the right or left in the drawing depending on the rotation direction of the motor 104.

Next, the unloader unit width direction driving device 102 will be described. In FIG. 8, the frame 11
The drive shaft 121 is disposed on the 5a, and the orthogonal shaft gears 122 and 123 are connected to both ends thereof. Further, the tip of one of the orthogonal shaft gears 122 is further connected to the orthogonal shaft gear 124 through a shaft.
Are connected. A grip width shifting motor 125 is connected to the orthogonal shaft gear 124 via a shaft. Ball screws 126 and 127 are provided on the frame frames 115c and 115d orthogonal to the frame frames 115a and 115b, respectively.
One end of each is connected to the orthogonal shaft gears 122 and 123.

A movable grip holding member 128 is arranged in parallel to the drive shaft 121, and both ends of the movable grip 129, 130 are fitted to ball screws 126, 127.
Are connected to each. Also, the opposite frame
Linear guides 131 and 132 are attached to inner lower portions of the 115c and 115d, and slidably contact slide members 133 and 134 provided at lower portions of both ends of the movable side grip holding member 128. On the other hand, a fixed side grip holding member 135 is arranged opposite to the movable side grip holding member 128.

Fixed-side grip holding member 135 and frame frame
115b and the base end at an appropriate distance from each other.
Two air cylinders 136 fixed to 5b are provided. Further, slide members 137 and 138 are attached to lower portions of both ends of the fixed-side grip holding member 135. As a result, the fixed-side grip holding member 135 can slide on the linear guides 131 and 132 by the expansion and contraction of the air cylinder 136. As shown in FIG. 9, the movable-side and fixed-side grip holding members 128 and 135 are provided with unloader grips 139 with grips facing downward in the number or arrangement corresponding to the transfer grips 51.

Next, the operation of the unloader unit width direction driving device 102 configured as described above will be described. When the grip shifting motor 125 rotates, the orthogonal shaft gear 122 rotates via the orthogonal shaft gear 124. The rotation of the orthogonal shaft gear 122 is transmitted to the drive shaft 121 and the ball screw 126, and the rotation of the drive shaft 121 is further transmitted to the ball screw 127 via the orthogonal shaft gear 123. Rotation of the two ball screws 126, 127 in the same direction moves the movers 133, 134, and thus the movable grip holding member 128 also moves in the same direction. In addition, the movable side grip holding member 128 is the grip width adjusting motor 125.
Fixed side grip holding member 135
Move to or away from.

Further, as the air cylinder 136 extends, the fixed side holding member 135 is moved to the movable side grip holding member 12.
The slide member 13 that is pressed to the 8 side and is integrated with the holding member 135
7,138 slides on linear guides 131,132. As a result, the fixed side holding member 135 is moved to the movable side grip holding member 128.
Move closer to. When the air cylinder 136 retracts, the fixed-side holding member 135 similarly moves so as to be separated from the movable-side grip holding member 128. Although an AC servo drive motor, a cogged belt or the like is adopted as a drive device in the loader unit 13 and the unloader unit 14 of the present embodiment, an air cylinder or the like can be applied as a drive device.

Next, the curtain coater 11 schematically shown will be briefly described with reference to FIGS. The curtain coater 11 is the same as in the prior art shown in FIG. The curtain coater 11 is arranged at a substantially central portion of the transfer device 10. 212 is a coater head that discharges the coating resin toward the surface of the printed circuit board in a curtain shape, and 215 is a transfer belt cover that prevents the transfer belt from getting wet with the coating resin. Also,
Reference numeral 214 is a receiving port for receiving the discharged excess coating resin.
The horizontal dashed line indicated by L ₁ is the movement line of the printed circuit board P.

Next, the operation of the substrate coating transporting device 10 configured as described above will be described. First, as shown in FIG. 10, the loader unit 13 slides from the position shown in FIG. 1 toward the pre-process side, and grips the printed circuit board that has been appropriately processed in the pre-process by the grip device. The loader unit 13 that has received the printed circuit board returns to the position shown in FIG. At this time, the transfer grip device 33 of the transfer unit 12 and the grip device of the loader unit 13 are positioned so that the printed circuit board can be transferred, and the printed circuit board is transferred to the transfer unit 12.
The loader unit 13 and the transfer unit 12 are each provided with a width-shifting mechanism, and adjustment is performed according to the size of the printed circuit board.

The transfer unit 12, which has received the printed circuit board, is conveyed to the curtain coater 11 while its speed is appropriately adjusted by the timing belts 31 and 32. At this time, the transfer unit width-shifting mechanism is activated to apply a slight outward pulling force to the printed circuit board via the transfer grip device 33. As a result, the curtain coater 11 applies the coating while the printed circuit board is held horizontally, and uniform coating is possible. In addition, by attaching a tension mechanism 70 (see FIG. 7) to the transfer unit 12, it is possible to further ensure horizontal holding of the printed circuit board, and the transfer unit width-shifting mechanism allows an excessive tensile force to the printed circuit board. When
Further, when the printed circuit board is distorted, it can be buffered.

The printed circuit board uniformly coated by the curtain coater 11 is further transported by the transfer unit 12 to a position corresponding to the unloader unit 14 in FIG. At this position, the printed circuit board is transferred from the transfer unit 12 to the unloader unit 14, and the unloader unit 14 further conveys the printed circuit board to the position of the next process shown in FIG. 11 to perform the process of the next process. At this time, the transfer unit 12 simultaneously rotates the loader unit 13 by the timing belt rotating in the opposite direction.
When the loader unit 13 is moved to the side, it waits for the loader unit 13 to convey a new printed circuit board at an intermediate point between the coater head 11 and the loader unit 13. The series of operations described above is repeated while the width dimension of each substrate is detected by the microcomputer and a plurality of various sensors omitted in the above description.

[0041]

As is apparent from the above description, according to the present invention, in a method of coating a liquid paint on the surface of a substrate by curtain coating, the substrate is held horizontally,
Moreover, since the coating is performed by passing it through the liquid paint that flows in a curtain shape while applying horizontal tensile force from both ends, the substrate can be held accurately and the slack in the center of the substrate can be eliminated to maintain its horizontal position. Since the coating is performed while maintaining the state, it is possible to accurately perform the coating with a desired uniform thickness within the intended range. In addition, since the board is gripped from both ends, even if it is a lightweight board, it does not move due to vibration during transportation, etc., and peeling of coating etc. does not occur because the conveyor belt etc. does not contact the already printed printed circuit on the back side. Can be prevented. Therefore, it is possible to prevent the generation of a defective board and improve the quality of the printed board. According to the device of the present invention, in addition to the above-mentioned effects,
The force of the substrate is not applied, and the quality of the substrate can be better maintained.

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment of the present invention.

2 is a plan view of the thin plate transport device of FIG. 1. FIG.

FIG. 3 is an explanatory diagram of a movable-side rail moving device.

FIG. 4 is a schematic explanatory view showing a holding state of a substrate of a transfer grip.

FIG. 5 is a front view showing a transfer grip device.

FIG. 6 is a side view of the device of FIG.

FIG. 7 is a schematic perspective view showing a pulling mechanism of the transfer unit.

FIG. 8 is a plan view of an unloader unit.

9 is a right side view of the unit of FIG.

FIG. 10 is a schematic front view showing a state in which the loader unit has moved to the previous process side.

FIG. 11 is a schematic front view showing a state where the unloader unit has moved to the next process side.

FIG. 12 is a schematic view showing a conventional transfer device including a curtain coater.

FIG. 13 is a schematic cross-sectional view showing a conventional V-shaped conveyor device.

[Explanation of symbols]

 10 Substrate coating equipment 11 Curtain coater 12 Transfer unit 13 Loader unit 14 Unloader unit 17 Movable side rail 18 Reference side rail 33 Transfer grip device 70 Tension mechanism

Claims (3)

[Claims] 1. A method for coating a surface of a substrate with a liquid coating material by curtain coating, wherein the substrate is held horizontally, and the liquid coating material flows down like a curtain while applying horizontal tensile forces from both ends thereof. A method for coating a substrate, characterized by passing through. 2. A transport path that extends in one direction and a coating device that is provided in a transverse direction in the middle of the transport path to flow down the liquid coating material in a curtain shape, and the transport paths include a pair of parallel paths. A substrate coating transport device comprising rails, and grip means for gripping both ends of the substrate are slidably attached to the rails, respectively, and at least one grip means is movably attached in a direction crossing the rails. .. 3. At least one of the grip means,
The transporting device according to claim 2, further comprising a tensioning device that applies an elastic tensioning force outwardly across the rail.