JPH0533495B2 - - Google Patents
Info
- Publication number
- JPH0533495B2 JPH0533495B2 JP18184585A JP18184585A JPH0533495B2 JP H0533495 B2 JPH0533495 B2 JP H0533495B2 JP 18184585 A JP18184585 A JP 18184585A JP 18184585 A JP18184585 A JP 18184585A JP H0533495 B2 JPH0533495 B2 JP H0533495B2
- Authority
- JP
- Japan
- Prior art keywords
- lens
- sample
- electron
- magnetic field
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000005284 excitation Effects 0.000 claims description 6
- 230000005389 magnetism Effects 0.000 claims 1
- 230000004075 alteration Effects 0.000 description 21
- 239000000696 magnetic material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18184585A JPS6244941A (ja) | 1985-08-21 | 1985-08-21 | 透過型電子顕微鏡における試料の観察方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18184585A JPS6244941A (ja) | 1985-08-21 | 1985-08-21 | 透過型電子顕微鏡における試料の観察方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244941A JPS6244941A (ja) | 1987-02-26 |
| JPH0533495B2 true JPH0533495B2 (fr) | 1993-05-19 |
Family
ID=16107820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18184585A Granted JPS6244941A (ja) | 1985-08-21 | 1985-08-21 | 透過型電子顕微鏡における試料の観察方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244941A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013096900A (ja) * | 2011-11-02 | 2013-05-20 | Jeol Ltd | 透過電子顕微鏡および透過電子顕微鏡像の観察方法 |
-
1985
- 1985-08-21 JP JP18184585A patent/JPS6244941A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6244941A (ja) | 1987-02-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Telieps et al. | An analytical reflection and emission UHV surface electron microscope | |
| EP2091063B1 (fr) | Dispositif d'observation de faisceau à électrons utilisant un champ magnétique pré-spécimen en tant que lentille de formation d'image et procédé d'observation de spécimen | |
| US6744048B2 (en) | Lens system for phase plate for transmission electron microscope and transmission electron microscope | |
| EP2172960B1 (fr) | Correcteur d'aberrations chromatiques pour système de faisceaux de particules chargées et procédé de correction correspondant | |
| EP2091064B1 (fr) | Dispositif de faisceau à électrons | |
| US7601957B2 (en) | Electron microscope and combined illumination lens | |
| US4633085A (en) | Transmission-type electron microscope | |
| US6720558B2 (en) | Transmission electron microscope equipped with energy filter | |
| JPH0533495B2 (fr) | ||
| Munro et al. | High‐resolution, low‐energy beams by means of mirror optics | |
| JP2000228162A (ja) | 電子ビーム装置 | |
| US7060985B2 (en) | Multipole field-producing apparatus in charged-particle optical system and aberration corrector | |
| US3852597A (en) | Method and apparatus for observing a low magnification electron microscope image | |
| EP0085323B1 (fr) | Structure de pièce polaire pour lentille électromagnétique | |
| JP5324584B2 (ja) | 電子線装置 | |
| US6586737B2 (en) | Transmission electron microscope equipped with energy filter | |
| KR100904894B1 (ko) | 대물렌즈 조리개 및 이를 이용한 패턴형성장치 | |
| KR100607874B1 (ko) | 고분해능 이미지의 배경 잡음 제거를 위한 대물 렌즈 조리개 및 이를 이용한 패턴형성장치 | |
| EP4020519A1 (fr) | Plan d'échantillons exempt de champ magnétique pour microscope à particules chargées | |
| EP0555492A1 (fr) | Lentille electronique magnetique et microscope electronique l'utilisant | |
| JPS5927437A (ja) | 電子顕微鏡の結像法 | |
| Renganayaki et al. | Development of Nano Scale Characterisation with TEM | |
| JP2004335433A (ja) | 収差補正電子光学装置 | |
| DE19636613A1 (de) | Anlage zur Herstellung von Röntgenbeugungsaufnahmen mit einem großem Ausschnitt aus dem Reflexsystem | |
| JPH09190790A (ja) | 走査電子顕微鏡及び走査電子顕微鏡における試料観察方法 |