JPH0533369B2 - - Google Patents

Info

Publication number
JPH0533369B2
JPH0533369B2 JP2461384A JP2461384A JPH0533369B2 JP H0533369 B2 JPH0533369 B2 JP H0533369B2 JP 2461384 A JP2461384 A JP 2461384A JP 2461384 A JP2461384 A JP 2461384A JP H0533369 B2 JPH0533369 B2 JP H0533369B2
Authority
JP
Japan
Prior art keywords
optical axis
optical member
optical
concave mirror
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2461384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60168116A (ja
Inventor
Takamasa Hirose
Akyoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2461384A priority Critical patent/JPS60168116A/ja
Publication of JPS60168116A publication Critical patent/JPS60168116A/ja
Publication of JPH0533369B2 publication Critical patent/JPH0533369B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0892—Catadioptric systems specially adapted for the UV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0812—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
JP2461384A 1984-02-13 1984-02-13 反射光学系 Granted JPS60168116A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2461384A JPS60168116A (ja) 1984-02-13 1984-02-13 反射光学系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2461384A JPS60168116A (ja) 1984-02-13 1984-02-13 反射光学系

Publications (2)

Publication Number Publication Date
JPS60168116A JPS60168116A (ja) 1985-08-31
JPH0533369B2 true JPH0533369B2 (ko) 1993-05-19

Family

ID=12142995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2461384A Granted JPS60168116A (ja) 1984-02-13 1984-02-13 反射光学系

Country Status (1)

Country Link
JP (1) JPS60168116A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030007789A (ko) 2000-06-06 2003-01-23 아사히 가라스 가부시키가이샤 광섬유 케이블
US7194168B2 (en) * 2005-03-03 2007-03-20 Nexans Tight buffer optical fiber ribbon
JP5196869B2 (ja) * 2007-05-15 2013-05-15 キヤノン株式会社 投影光学系、露光装置及びデバイス製造方法

Also Published As

Publication number Publication date
JPS60168116A (ja) 1985-08-31

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term