JPH05327392A - Piezoelectric tuning fork type resonating parts - Google Patents

Abstract

PURPOSE:To improve hermetic sealing property by providing adhesive agent layers on both sides at a tuning fork arm part and unifying a piezoelectric tuning fork resonator and a dummy board with the adhesive agent layers so as to remain a gap between the adhesive agent layers and the tuning fork arm part. CONSTITUTION:Adhesive agent layers 41 and 42 are provided on both sides at tuning fork arm parts 3 and 4 of a piezoelectric tuning fork resonator 1, and the resonator 1 and a dummy board 11 are unified by the layers 41 and 42 so as to form a slight gap between the tuning fork arm parts 3 and 4 and the dummy board 11. Then, frame members 35 and 36 and sealing boards 37 and 38 are laminated above and under the integrated resonator 1 and board 11 and attached by adhesive agents as a laminated body. Thus, the gap between the resonator 1 and the board 11 is sealed by the adhesive agent layers without fail, and secure hermetic sealing is obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to improvement of the structure of a piezoelectric tuning fork type resonance component in which a vibrating portion is sealed by bonding sealing substrates to both main surfaces of the piezoelectric tuning fork type resonator, and more particularly to The present invention relates to a structure improvement for improving airtightness of a part.

[0002]

2. Description of the Related Art It is difficult for a sealing substrate to crack or crack.
As a piezoelectric tuning-fork type resonance component excellent in hermetically sealing the vibrating portion, the present inventor has proposed a piezoelectric tuning-fork type resonance component in which a portion where a terminal electrode for electrically connecting to the outside is formed is improved. (Practical application No. 3-73941). 2 and 3
[Fig. 3] is an exploded perspective view and a perspective view for explaining such a piezoelectric tuning fork type resonance component. Referring to FIG. 2, the piezoelectric tuning fork type resonator 1 has slits 2a ...
By forming 2c, a pair of tuning fork arms 3 and 4 is formed. One resonance electrode 5 is formed on the upper surface of the piezoelectric substrate 2 near the innermost portion of the slit 2a. The resonance electrode 5 is electrically connected to the extraction electrode 6. The lead electrode 6 is formed on the upper surface of the piezoelectric substrate 2 at a position reaching the edge. In addition, 7 shows a dummy electrode.

On the lower surface of the piezoelectric substrate 2, as shown by projecting downward, the other resonance electrode 8 is formed so as to face the resonance electrode 5 formed on the upper surface of the piezoelectric substrate 2 from the front side to the back side. The resonance electrode 8 is electrically connected to the extraction electrode 9 formed on the lower surface of the piezoelectric substrate 2 so as to reach the edge. In addition, 10 shows a dummy electrode. A dummy substrate 11 is arranged laterally with a gap A from the tuning fork arms 3 and 4 of the piezoelectric tuning fork type resonator 1. Dummy electrodes 12a and 12b are formed on the upper surface of the dummy substrate 11, and dummy electrodes 13a and 13b are formed on the lower surface as shown by projecting downward. The dummy substrate 11 is a piezoelectric substrate 2 arranged on the side.
The dummy electrodes 12a, 12b, 13a, 13 in order to make the total thickness of the ceramic substrate uniform.
b has a structure formed.

The piezoelectric tuning fork type resonator 1 includes a lead electrode 6,
By applying an AC voltage to 9, it is configured to function as a two-terminal type piezoelectric oscillator. By stacking rectangular frame-shaped frame members 35 and 36 and sealing substrates 37 and 38 above and below the piezoelectric tuning-fork resonator 1 and the dummy substrate 11, and adhering them with an insulating adhesive, the lamination shown in FIG. The body 14 is obtained. On the end face of the laminated body 14, the terminal electrode 1
5, 16 and dummy terminal electrodes 17, 18 are formed,
A piezoelectric tuning fork type resonance component 19 is configured. Terminal electrode 1
Reference numerals 5 and 16 are formed so as to be electrically connected to the extraction electrodes 6 and 9.

As described above, by forming the terminal electrode on the end face of the laminated body, in this piezoelectric tuning-fork type resonance component, cracks or breaks are less likely to occur during handling of the sealing substrate. Further, in the conventional piezoelectric tuning fork type resonance component, a notch is formed at the edge of the sealing substrate to expose the extraction electrode,
Although it was electrically connected to the outside, the piezoelectric tuning fork type resonator proposed by the present inventor does not have such a notch, so that the bonding area between the piezoelectric tuning fork type resonator and the sealing substrate is large. And the airtight sealing of the vibrating part can be enhanced.

[0006]

However, even with such a structure, the hermetic sealing property is sometimes impaired. That is, as described above, the frame material and the sealing substrate are laminated on the upper and lower sides of the piezoelectric tuning fork type resonator and the dummy substrate and bonded with an adhesive. The adhesive spontaneously flows into the space A of the above, and the airtightness of the inside is maintained. However, in some cases, the piezoelectric tuning fork type resonance component was manufactured without the adhesive agent completely flowing into the gap A. In such a case, even if the structure proposed by the present inventor is adopted, the hermetic sealing property cannot be improved.

An object of the present invention is to provide a piezoelectric tuning fork type resonance component having a structure capable of surely enhancing hermetic sealing.

[0008]

SUMMARY OF THE INVENTION A piezoelectric tuning fork type resonance component of the present invention has an adhesive layer provided on both sides of the tuning fork arm so as not to disturb the vibration of the tuning fork arm of the piezoelectric tuning fork resonator. The piezoelectric tuning fork type resonator and the dummy substrate are integrated by an adhesive layer so that a gap is left between the piezoelectric tuning fork type resonator and the dummy substrate. That is, the piezoelectric tuning-fork type resonance component of the present invention includes a piezoelectric substrate having a pair of tuning fork arms formed thereon, at least one pair of resonance electrodes for vibrating the tuning fork arms, and electrically connected to the resonance electrodes. And a piezoelectric tuning fork type resonator having an extraction electrode formed on the main surface of the piezoelectric substrate so as to reach the edge of the piezoelectric substrate, a dummy substrate disposed on the side of the piezoelectric tuning fork type resonator, and a piezoelectric tuning fork type resonance. The piezoelectric tuning fork type resonator includes a piezoelectric tuning fork type resonator and a pair of sealing substrates that are bonded to each other above and below a dummy substrate to form a laminated body so as to provide a space for preventing vibration of the tuning fork arm of the child. Adhesive layers are provided on both sides of the tuning fork arm to prevent vibration of the tuning fork arm, and the piezoelectric tuning fork resonator and the dummy substrate are glued so that a gap remains between the tuning fork arm and the tuning fork arm. It is characterized by being integrated by layers.

[0009]

In the piezoelectric tuning fork type resonance component of the present invention, adhesive layers are provided on both sides of the tuning fork arm of the piezoelectric tuning fork type resonator, and the piezoelectric tuning fork type resonator and the dummy substrate are integrated by the adhesive layer. For this reason, the gap between the piezoelectric tuning fork type resonator and the dummy substrate is surely sealed by this adhesive layer, and the airtightness can be improved. Furthermore, since the dummy substrate and the piezoelectric tuning fork type resonator are integrated by the adhesive layer, the piezoelectric tuning fork type resonator and the dummy substrate can be treated as one when assembling components by laminating and adhering. , Workability is improved and productivity can be improved.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an exploded perspective view showing an embodiment according to the present invention. With reference to FIG. 1, adhesive layers 41 and 42 are provided on both sides of the tuning fork arm portions 3 and 4 of the piezoelectric tuning fork resonator 1, and the piezoelectric tuning fork type resonance is provided by the adhesive layers 41 and 42. The child 1 and the dummy substrate 11 are integrated. Adhesive layers 41 and 42 are formed between the piezoelectric resonator 1 and the dummy substrate 11 so as to form a slight gap. The frame members 35 and 36 and the sealing substrates 37 and 38 are laminated on the upper and lower sides of the piezoelectric tuning-fork resonator 1 and the dummy substrate 11 which are integrated in this way, and they are bonded with an adhesive to form a laminated body. For other reference numbers, see FIG.
The description is omitted because it is the same as. The laminated body thus obtained has a terminal electrode formed on its end face in the same manner as the laminated body shown in FIG.

Referring to FIG. 4, a laminated body of piezoelectric tuning fork type resonators as shown in FIG. 1 can be manufactured by using a mother piezoelectric substrate 51 having a plurality of tuning fork arms formed therein. That is, a mother piezoelectric substrate 51 in which a plurality of tuning fork arms, which are resonance parts, are continuously formed, and a mother sealing substrate 52.
And are integrated by a plurality of adhesive layers 60. The adhesive layer 60 is formed by applying the adhesive 61 on both sides of the resonance portion of the mother piezoelectric substrate 51 as shown in FIG. An adhesive is applied to a position corresponding to the mother dummy substrate 52 as well, and the mother piezoelectric substrate 51 and the mother dummy substrate 52 are butted and adhered to each other to be integrated. At this time, the tuning fork arm, which is the resonance portion, is the mother dummy substrate 5
Bonding is performed so that a slight gap is left between the mother dummy substrate 52 and the mother dummy substrate 52 so as not to come into contact with 2. Mother frame members 53 and 54 are formed above and below the mother piezoelectric substrate 51 and mother dummy substrate 52, which are integrated by the adhesive layer 60 as described above.
And the mother sealing substrates 55 and 56 are laminated.

FIG. 6 shows the laminated body 5 thus obtained.
0 is shown. Laminated body 5 as indicated by the broken line in FIG.
By cutting 0, it is possible to obtain a laminated body that becomes four piezoelectric tuning fork type resonance components. In the above example,
Although an example in which an adhesive is applied to the respective edges of the mother piezoelectric substrate and the mother dummy substrate to form an adhesive layer has been described, the mother piezoelectric substrate 51 and the mother dummy substrate 52 are formed as shown in FIG. Butt to make a slight gap, and apply an adhesive on the gap to form an adhesive layer 7
0 may be formed. In the above examples, the adhesive was applied by using the method of printing the adhesive.
In the present invention, the adhesive forming the adhesive layer provided between the piezoelectric tuning fork type resonator and the dummy substrate may be the same as the adhesive used when laminating and adhering the sealing substrates. It may be of different type or different type.

[0013]

According to the piezoelectric tuning fork type resonance component of the present invention, adhesive layers are provided on both sides of the tuning fork arm of the piezoelectric tuning fork type resonator, and the piezoelectric tuning fork type resonator and the dummy substrate are integrated by this adhesive layer. ing. Therefore, the gap between the piezoelectric tuning fork type resonator and the dummy substrate is always sealed by the adhesive layer, and reliable airtightness can be obtained for the entire piezoelectric tuning fork type resonant component. Further, since the piezoelectric tuning fork type resonator and the dummy substrate are integrated, when assembling the piezoelectric tuning fork type resonance component,
These can be handled integrally, workability is improved, and productivity can be improved.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing an embodiment according to the present invention.

FIG. 2 is an exploded perspective view showing a laminated body of comparative piezoelectric tuning fork type resonance components.

FIG. 3 is a perspective view showing a laminated body of a comparative piezoelectric tuning fork type resonance component similarly to FIG.

FIG. 4 is an exploded perspective view for explaining a process of manufacturing the laminated body of the embodiment shown in FIG.

FIG. 5 is a perspective view showing a state in which an adhesive is applied to the mother piezoelectric substrate.

FIG. 6 is a perspective view for explaining a step of cutting a laminated body in which each mother is laminated.

FIG. 7 is a perspective view showing a state of an adhesive layer in another example according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Piezoelectric tuning fork type resonator 2 ... Piezoelectric substrate 3,4 ... Tuning fork arm part 5,8 ... Resonance electrode 6,9 ... Extraction electrode 11 ... Dummy substrate 35, 36 ... Frame material 37, 38 ... Sealing substrate 41, 42 , 60, 70 ... Adhesive layer

Claims (1)

[Claims] 1. A piezoelectric substrate having a pair of tuning fork arms formed thereon, at least a pair of resonance electrodes for vibrating the tuning fork arms, and the piezoelectric substrate electrically connected to each of the resonance electrodes. A piezoelectric tuning fork type resonator having an extraction electrode formed on the main surface of the piezoelectric substrate so as to reach the edge of the piezoelectric substrate, a dummy substrate disposed laterally of the piezoelectric tuning fork type resonator, and the piezoelectric tuning fork type resonator. Of the piezoelectric tuning fork type resonator and a pair of sealing substrates that are laminated on the upper and lower sides of the dummy substrate to form a laminated body so as to provide a space for preventing vibration of the tuning fork arm of An adhesive layer is provided on both sides of the tuning fork arm so as not to interfere with the vibration of the tuning fork arm of the tuning fork resonator, and the piezoelectric tuning fork resonator and the dummy substrate are provided so that a gap is left between the tuning fork arm and the tuning fork arm. It is characterized in that and are integrated by the adhesive layer. A piezoelectric tuning-fork type resonance component.