JPH0529131B2 - - Google Patents

Info

Publication number
JPH0529131B2
JPH0529131B2 JP61239679A JP23967986A JPH0529131B2 JP H0529131 B2 JPH0529131 B2 JP H0529131B2 JP 61239679 A JP61239679 A JP 61239679A JP 23967986 A JP23967986 A JP 23967986A JP H0529131 B2 JPH0529131 B2 JP H0529131B2
Authority
JP
Japan
Prior art keywords
cathode
etching
reaction vessel
bellows
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61239679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6393114A (ja
Inventor
Tsunemasa Tokura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Engineering Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Engineering Works Co Ltd filed Critical Shibaura Engineering Works Co Ltd
Priority to JP23967986A priority Critical patent/JPS6393114A/ja
Publication of JPS6393114A publication Critical patent/JPS6393114A/ja
Publication of JPH0529131B2 publication Critical patent/JPH0529131B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP23967986A 1986-10-08 1986-10-08 ドライエツチング装置 Granted JPS6393114A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23967986A JPS6393114A (ja) 1986-10-08 1986-10-08 ドライエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23967986A JPS6393114A (ja) 1986-10-08 1986-10-08 ドライエツチング装置

Publications (2)

Publication Number Publication Date
JPS6393114A JPS6393114A (ja) 1988-04-23
JPH0529131B2 true JPH0529131B2 (enrdf_load_stackoverflow) 1993-04-28

Family

ID=17048296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23967986A Granted JPS6393114A (ja) 1986-10-08 1986-10-08 ドライエツチング装置

Country Status (1)

Country Link
JP (1) JPS6393114A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2926711B2 (ja) * 1988-05-13 1999-07-28 松下電器産業株式会社 ドライエッチング装置
JPH0258830A (ja) * 1988-08-24 1990-02-28 Nec Kyushu Ltd ドライエッチング装置
JPH087627Y2 (ja) * 1990-05-18 1996-03-04 国際電気株式会社 プラズマ処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60213026A (ja) * 1984-04-09 1985-10-25 Kokusai Electric Co Ltd ドライエツチング装置
JPS615521A (ja) * 1984-06-20 1986-01-11 Hitachi Ltd プラズマ処理装置

Also Published As

Publication number Publication date
JPS6393114A (ja) 1988-04-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term