JPH0528771Y2 - - Google Patents

Info

Publication number
JPH0528771Y2
JPH0528771Y2 JP15422987U JP15422987U JPH0528771Y2 JP H0528771 Y2 JPH0528771 Y2 JP H0528771Y2 JP 15422987 U JP15422987 U JP 15422987U JP 15422987 U JP15422987 U JP 15422987U JP H0528771 Y2 JPH0528771 Y2 JP H0528771Y2
Authority
JP
Japan
Prior art keywords
wafer
centers
arcs
positioning
positioning plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15422987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158939U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15422987U priority Critical patent/JPH0528771Y2/ja
Publication of JPH0158939U publication Critical patent/JPH0158939U/ja
Application granted granted Critical
Publication of JPH0528771Y2 publication Critical patent/JPH0528771Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP15422987U 1987-10-07 1987-10-07 Expired - Lifetime JPH0528771Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15422987U JPH0528771Y2 (enrdf_load_stackoverflow) 1987-10-07 1987-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15422987U JPH0528771Y2 (enrdf_load_stackoverflow) 1987-10-07 1987-10-07

Publications (2)

Publication Number Publication Date
JPH0158939U JPH0158939U (enrdf_load_stackoverflow) 1989-04-13
JPH0528771Y2 true JPH0528771Y2 (enrdf_load_stackoverflow) 1993-07-23

Family

ID=31430777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15422987U Expired - Lifetime JPH0528771Y2 (enrdf_load_stackoverflow) 1987-10-07 1987-10-07

Country Status (1)

Country Link
JP (1) JPH0528771Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0158939U (enrdf_load_stackoverflow) 1989-04-13

Similar Documents

Publication Publication Date Title
JPH0528771Y2 (enrdf_load_stackoverflow)
JPH0528772Y2 (enrdf_load_stackoverflow)
JPH0333456B2 (enrdf_load_stackoverflow)
JP2000068352A (ja) ウエーハ反転装置
JPS6119031B2 (enrdf_load_stackoverflow)
JPH0621668Y2 (ja) チャック機構
CA2126643A1 (en) Apparatus for Holding Solid Compact Medicaments During Processing
JPS63106141U (enrdf_load_stackoverflow)
JPH11338001A (ja) カメラの絞り機構
JPH023409Y2 (enrdf_load_stackoverflow)
JPS615542A (ja) 円形板状部材
JPS63124543A (ja) 板体チヤツキング機構
JP2541829B2 (ja) ロボットのマトリックス状ハンドへのワ―ク供給方法
JPH05269652A (ja) パレットの位置決め機構
JPH0614173Y2 (ja) 芯出し機構
JPH09193076A (ja) ギヤ仮組品の把持装置
ITTO930851A1 (it) Dispositivo e metodo per scambiare di posizione due tavole di lavoro, particolarmente tavole porta-pezzi per l'assemblaggio di gruppi
JPH0521312Y2 (enrdf_load_stackoverflow)
JPH0362681U (enrdf_load_stackoverflow)
JPH075638Y2 (ja) 半導体素子組立装置
JPS58155129A (ja) 多頭ホ−ルデイング治具の回転機構
JPH0141706Y2 (enrdf_load_stackoverflow)
SU1704947A1 (ru) Поводковый патрон
JPH0352044U (enrdf_load_stackoverflow)
JP2000294618A (ja) ウエハ保持機構